JPS53142294A - Method and apparatus for focusing ions - Google Patents

Method and apparatus for focusing ions

Info

Publication number
JPS53142294A
JPS53142294A JP5606277A JP5606277A JPS53142294A JP S53142294 A JPS53142294 A JP S53142294A JP 5606277 A JP5606277 A JP 5606277A JP 5606277 A JP5606277 A JP 5606277A JP S53142294 A JPS53142294 A JP S53142294A
Authority
JP
Japan
Prior art keywords
focusing ions
focusing
ions
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP5606277A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6245664B2 (cs
Inventor
Bii Furenchi Jiyon
Emu Riido Neiru
Ei Batsukurei Jiyanetsuto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
GABANINGU COUNCIL ZA UNIV OBU
Original Assignee
GABANINGU COUNCIL ZA UNIV OBU
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by GABANINGU COUNCIL ZA UNIV OBU filed Critical GABANINGU COUNCIL ZA UNIV OBU
Priority to JP5606277A priority Critical patent/JPS53142294A/ja
Publication of JPS53142294A publication Critical patent/JPS53142294A/ja
Publication of JPS6245664B2 publication Critical patent/JPS6245664B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
  • Electron Tubes For Measurement (AREA)
JP5606277A 1977-05-17 1977-05-17 Method and apparatus for focusing ions Granted JPS53142294A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5606277A JPS53142294A (en) 1977-05-17 1977-05-17 Method and apparatus for focusing ions

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5606277A JPS53142294A (en) 1977-05-17 1977-05-17 Method and apparatus for focusing ions

Publications (2)

Publication Number Publication Date
JPS53142294A true JPS53142294A (en) 1978-12-11
JPS6245664B2 JPS6245664B2 (cs) 1987-09-28

Family

ID=13016585

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5606277A Granted JPS53142294A (en) 1977-05-17 1977-05-17 Method and apparatus for focusing ions

Country Status (1)

Country Link
JP (1) JPS53142294A (cs)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62103954A (ja) * 1985-10-30 1987-05-14 Hitachi Ltd 質量分析計
JP2002042721A (ja) * 2000-07-19 2002-02-08 Anelva Corp イオン付着質量分析装置
JP2010153278A (ja) * 2008-12-26 2010-07-08 Hitachi High-Technologies Corp 荷電粒子線加工装置
JP2014533873A (ja) * 2011-11-21 2014-12-15 ディーエイチ テクノロジーズ デベロップメント プライベート リミテッド 質量分析計においてカーテンガス流動を適用するためのシステムおよび方法
JP2021515371A (ja) * 2018-03-02 2021-06-17 ディーエイチ テクノロジーズ デベロップメント プライベート リミテッド 統合された低費用のカーテン板、オリフィスｐｃｂ、およびイオンレンズアセンブリ

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0281379U (cs) * 1988-12-14 1990-06-22

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62103954A (ja) * 1985-10-30 1987-05-14 Hitachi Ltd 質量分析計
JP2002042721A (ja) * 2000-07-19 2002-02-08 Anelva Corp イオン付着質量分析装置
JP2010153278A (ja) * 2008-12-26 2010-07-08 Hitachi High-Technologies Corp 荷電粒子線加工装置
JP2014533873A (ja) * 2011-11-21 2014-12-15 ディーエイチ テクノロジーズ デベロップメント プライベート リミテッド 質量分析計においてカーテンガス流動を適用するためのシステムおよび方法
JP2021515371A (ja) * 2018-03-02 2021-06-17 ディーエイチ テクノロジーズ デベロップメント プライベート リミテッド 統合された低費用のカーテン板、オリフィスｐｃｂ、およびイオンレンズアセンブリ

Also Published As

Publication number Publication date
JPS6245664B2 (cs) 1987-09-28

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