JPS6244686B2 - - Google Patents

Info

Publication number
JPS6244686B2
JPS6244686B2 JP54102759A JP10275979A JPS6244686B2 JP S6244686 B2 JPS6244686 B2 JP S6244686B2 JP 54102759 A JP54102759 A JP 54102759A JP 10275979 A JP10275979 A JP 10275979A JP S6244686 B2 JPS6244686 B2 JP S6244686B2
Authority
JP
Japan
Prior art keywords
mark
electron beam
wafer
integrated circuit
pattern
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP54102759A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5627927A (en
Inventor
Yasunobu Kawachi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Shibaura Electric Co Ltd filed Critical Tokyo Shibaura Electric Co Ltd
Priority to JP10275979A priority Critical patent/JPS5627927A/ja
Publication of JPS5627927A publication Critical patent/JPS5627927A/ja
Publication of JPS6244686B2 publication Critical patent/JPS6244686B2/ja
Granted legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y10/00—Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y40/00—Manufacture or treatment of nanostructures
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/317—Electron-beam or ion-beam tubes for localised treatment of objects for changing properties of the objects or for applying thin layers thereon, e.g. for ion implantation
    • H01J37/3174—Particle-beam lithography, e.g. electron beam lithography

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Nanotechnology (AREA)
  • Physics & Mathematics (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Mathematical Physics (AREA)
  • Theoretical Computer Science (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Analytical Chemistry (AREA)
  • Electron Beam Exposure (AREA)
JP10275979A 1979-08-14 1979-08-14 Location in electron beam injection Granted JPS5627927A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10275979A JPS5627927A (en) 1979-08-14 1979-08-14 Location in electron beam injection

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10275979A JPS5627927A (en) 1979-08-14 1979-08-14 Location in electron beam injection

Publications (2)

Publication Number Publication Date
JPS5627927A JPS5627927A (en) 1981-03-18
JPS6244686B2 true JPS6244686B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1987-09-22

Family

ID=14336118

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10275979A Granted JPS5627927A (en) 1979-08-14 1979-08-14 Location in electron beam injection

Country Status (1)

Country Link
JP (1) JPS5627927A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6074519A (ja) * 1983-09-30 1985-04-26 Fujitsu Ltd 電子ビ−ム露光における試料の位置合せ方法
GB2218876B (en) * 1988-05-12 1993-01-06 Mitsubishi Electric Corp Inversion phenomenon preventing circuit
JPH05300467A (ja) * 1992-04-23 1993-11-12 Mitsubishi Electric Corp Ｆｍ信号処理装置
US9619728B2 (en) * 2015-05-31 2017-04-11 Fei Company Dynamic creation of backup fiducials

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS547193B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1971-11-17 1979-04-04
JPS5854496B2 (ja) * 1975-12-24 1983-12-05 セイコーエプソン株式会社 半導体装置の製造方法

Also Published As

Publication number Publication date
JPS5627927A (en) 1981-03-18

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