JPS6244433B2 - - Google Patents
Info
- Publication number
- JPS6244433B2 JPS6244433B2 JP53087850A JP8785078A JPS6244433B2 JP S6244433 B2 JPS6244433 B2 JP S6244433B2 JP 53087850 A JP53087850 A JP 53087850A JP 8785078 A JP8785078 A JP 8785078A JP S6244433 B2 JPS6244433 B2 JP S6244433B2
- Authority
- JP
- Japan
- Prior art keywords
- layer
- gaas
- semiconductor layer
- junction
- region
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000004065 semiconductor Substances 0.000 claims description 32
- 239000012535 impurity Substances 0.000 claims description 7
- 230000001747 exhibiting effect Effects 0.000 claims description 3
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 33
- 239000000758 substrate Substances 0.000 description 10
- 230000015556 catabolic process Effects 0.000 description 9
- 239000010408 film Substances 0.000 description 9
- 238000000098 azimuthal photoelectron diffraction Methods 0.000 description 6
- 238000005516 engineering process Methods 0.000 description 6
- 230000003287 optical effect Effects 0.000 description 6
- 229910004298 SiO 2 Inorganic materials 0.000 description 5
- 238000004891 communication Methods 0.000 description 5
- 238000009792 diffusion process Methods 0.000 description 5
- 238000000034 method Methods 0.000 description 5
- 229920002120 photoresistant polymer Polymers 0.000 description 5
- 239000000463 material Substances 0.000 description 4
- 229910000980 Aluminium gallium arsenide Inorganic materials 0.000 description 3
- 150000001875 compounds Chemical class 0.000 description 3
- 239000013078 crystal Substances 0.000 description 3
- 230000031700 light absorption Effects 0.000 description 3
- 230000035945 sensitivity Effects 0.000 description 3
- 239000010409 thin film Substances 0.000 description 3
- 230000005540 biological transmission Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 230000005684 electric field Effects 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 230000010355 oscillation Effects 0.000 description 2
- 230000002250 progressing effect Effects 0.000 description 2
- 230000006641 stabilisation Effects 0.000 description 2
- 238000011105 stabilization Methods 0.000 description 2
- 238000010521 absorption reaction Methods 0.000 description 1
- 239000000969 carrier Substances 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 230000005284 excitation Effects 0.000 description 1
- 238000000605 extraction Methods 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 239000007791 liquid phase Substances 0.000 description 1
- 239000013307 optical fiber Substances 0.000 description 1
- 239000008188 pellet Substances 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 238000000927 vapour-phase epitaxy Methods 0.000 description 1
Landscapes
- Light Receiving Elements (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8785078A JPS5513990A (en) | 1978-07-18 | 1978-07-18 | Semiconductor device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8785078A JPS5513990A (en) | 1978-07-18 | 1978-07-18 | Semiconductor device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5513990A JPS5513990A (en) | 1980-01-31 |
| JPS6244433B2 true JPS6244433B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1987-09-21 |
Family
ID=13926353
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8785078A Granted JPS5513990A (en) | 1978-07-18 | 1978-07-18 | Semiconductor device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5513990A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5722363U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * | 1980-07-11 | 1982-02-05 | ||
| JPS5773983A (en) * | 1980-10-27 | 1982-05-08 | Nec Corp | Semiconductor photodetector |
| JPS57198668A (en) * | 1981-06-01 | 1982-12-06 | Fujitsu Ltd | Light receiving element |
| JPS60102774A (ja) * | 1983-11-09 | 1985-06-06 | Kokusai Denshin Denwa Co Ltd <Kdd> | 半導体素子及びその製造方法 |
-
1978
- 1978-07-18 JP JP8785078A patent/JPS5513990A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5513990A (en) | 1980-01-31 |