JPS623991B2 - - Google Patents

Info

Publication number
JPS623991B2
JPS623991B2 JP55163932A JP16393280A JPS623991B2 JP S623991 B2 JPS623991 B2 JP S623991B2 JP 55163932 A JP55163932 A JP 55163932A JP 16393280 A JP16393280 A JP 16393280A JP S623991 B2 JPS623991 B2 JP S623991B2
Authority
JP
Japan
Prior art keywords
insulating film
polycrystalline silicon
silicon layer
layer
gate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP55163932A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5787164A (en
Inventor
Fujio Masuoka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Shibaura Electric Co Ltd filed Critical Tokyo Shibaura Electric Co Ltd
Priority to JP55163932A priority Critical patent/JPS5787164A/ja
Priority to DE8181305349T priority patent/DE3175125D1/de
Priority to EP81305349A priority patent/EP0052982B1/en
Priority to US06/321,322 priority patent/US4803529A/en
Publication of JPS5787164A publication Critical patent/JPS5787164A/ja
Publication of JPS623991B2 publication Critical patent/JPS623991B2/ja
Priority to US07/193,079 priority patent/US4910565A/en
Granted legal-status Critical Current

Links

Landscapes

  • Semiconductor Memories (AREA)
  • Non-Volatile Memory (AREA)
JP55163932A 1980-11-20 1980-11-20 Manufacture of semiconductor memory storage Granted JPS5787164A (en)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP55163932A JPS5787164A (en) 1980-11-20 1980-11-20 Manufacture of semiconductor memory storage
DE8181305349T DE3175125D1 (en) 1980-11-20 1981-11-11 Semiconductor memory device and method for manufacturing the same
EP81305349A EP0052982B1 (en) 1980-11-20 1981-11-11 Semiconductor memory device and method for manufacturing the same
US06/321,322 US4803529A (en) 1980-11-20 1981-11-13 Electrically erasable and electrically programmable read only memory
US07/193,079 US4910565A (en) 1980-11-20 1988-05-12 Electrically erasable and electrically programmable read-only memory

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP55163932A JPS5787164A (en) 1980-11-20 1980-11-20 Manufacture of semiconductor memory storage

Publications (2)

Publication Number Publication Date
JPS5787164A JPS5787164A (en) 1982-05-31
JPS623991B2 true JPS623991B2 (enExample) 1987-01-28

Family

ID=15783558

Family Applications (1)

Application Number Title Priority Date Filing Date
JP55163932A Granted JPS5787164A (en) 1980-11-20 1980-11-20 Manufacture of semiconductor memory storage

Country Status (1)

Country Link
JP (1) JPS5787164A (enExample)

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52106275A (en) * 1976-03-03 1977-09-06 Nec Corp Floating type nonvoltile semiconductor memory element
JPS5513901A (en) * 1978-07-17 1980-01-31 Hitachi Ltd Fixed memory of semiconductor

Also Published As

Publication number Publication date
JPS5787164A (en) 1982-05-31

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