JPS6239834B2 - - Google Patents

Info

Publication number
JPS6239834B2
JPS6239834B2 JP55126697A JP12669780A JPS6239834B2 JP S6239834 B2 JPS6239834 B2 JP S6239834B2 JP 55126697 A JP55126697 A JP 55126697A JP 12669780 A JP12669780 A JP 12669780A JP S6239834 B2 JPS6239834 B2 JP S6239834B2
Authority
JP
Japan
Prior art keywords
mesa portion
layer
photoresist
mesa
buffer layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP55126697A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5750478A (en
Inventor
Hirobumi Mizuno
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Electric Co Ltd filed Critical Nippon Electric Co Ltd
Priority to JP55126697A priority Critical patent/JPS5750478A/ja
Publication of JPS5750478A publication Critical patent/JPS5750478A/ja
Publication of JPS6239834B2 publication Critical patent/JPS6239834B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00—Field-effect transistors [FET]
    • H10D30/80—FETs having rectifying junction gate electrodes

Landscapes

  • Junction Field-Effect Transistors (AREA)
  • Electrodes Of Semiconductors (AREA)
JP55126697A 1980-09-12 1980-09-12 Manufacture of semiconductor device Granted JPS5750478A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP55126697A JPS5750478A (en) 1980-09-12 1980-09-12 Manufacture of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP55126697A JPS5750478A (en) 1980-09-12 1980-09-12 Manufacture of semiconductor device

Publications (2)

Publication Number Publication Date
JPS5750478A JPS5750478A (en) 1982-03-24
JPS6239834B2 true JPS6239834B2 (enrdf_load_stackoverflow) 1987-08-25

Family

ID=14941602

Family Applications (1)

Application Number Title Priority Date Filing Date
JP55126697A Granted JPS5750478A (en) 1980-09-12 1980-09-12 Manufacture of semiconductor device

Country Status (1)

Country Link
JP (1) JPS5750478A (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6248437U (enrdf_load_stackoverflow) * 1985-09-10 1987-03-25
JPH03115044U (enrdf_load_stackoverflow) * 1990-03-09 1991-11-27

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0789558B2 (ja) * 1984-06-12 1995-09-27 日本電気株式会社 半導体装置の製造方法

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51151571U (enrdf_load_stackoverflow) * 1975-05-27 1976-12-03
JPS5842631B2 (ja) * 1976-03-10 1983-09-21 日本電気株式会社 接合ゲ−ト型電界効果トランジスタの製造方法

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6248437U (enrdf_load_stackoverflow) * 1985-09-10 1987-03-25
JPH03115044U (enrdf_load_stackoverflow) * 1990-03-09 1991-11-27

Also Published As

Publication number Publication date
JPS5750478A (en) 1982-03-24

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