JPS6239834B2 - - Google Patents
Info
- Publication number
- JPS6239834B2 JPS6239834B2 JP55126697A JP12669780A JPS6239834B2 JP S6239834 B2 JPS6239834 B2 JP S6239834B2 JP 55126697 A JP55126697 A JP 55126697A JP 12669780 A JP12669780 A JP 12669780A JP S6239834 B2 JPS6239834 B2 JP S6239834B2
- Authority
- JP
- Japan
- Prior art keywords
- mesa portion
- layer
- photoresist
- mesa
- buffer layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D30/00—Field-effect transistors [FET]
- H10D30/80—FETs having rectifying junction gate electrodes
Landscapes
- Electrodes Of Semiconductors (AREA)
- Junction Field-Effect Transistors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP55126697A JPS5750478A (en) | 1980-09-12 | 1980-09-12 | Manufacture of semiconductor device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP55126697A JPS5750478A (en) | 1980-09-12 | 1980-09-12 | Manufacture of semiconductor device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5750478A JPS5750478A (en) | 1982-03-24 |
| JPS6239834B2 true JPS6239834B2 (OSRAM) | 1987-08-25 |
Family
ID=14941602
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP55126697A Granted JPS5750478A (en) | 1980-09-12 | 1980-09-12 | Manufacture of semiconductor device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5750478A (OSRAM) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6248437U (OSRAM) * | 1985-09-10 | 1987-03-25 | ||
| JPH03115044U (OSRAM) * | 1990-03-09 | 1991-11-27 |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0789558B2 (ja) * | 1984-06-12 | 1995-09-27 | 日本電気株式会社 | 半導体装置の製造方法 |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS51151571U (OSRAM) * | 1975-05-27 | 1976-12-03 | ||
| JPS5842631B2 (ja) * | 1976-03-10 | 1983-09-21 | 日本電気株式会社 | 接合ゲ−ト型電界効果トランジスタの製造方法 |
-
1980
- 1980-09-12 JP JP55126697A patent/JPS5750478A/ja active Granted
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6248437U (OSRAM) * | 1985-09-10 | 1987-03-25 | ||
| JPH03115044U (OSRAM) * | 1990-03-09 | 1991-11-27 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5750478A (en) | 1982-03-24 |
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