JPS623979B2 - - Google Patents

Info

Publication number
JPS623979B2
JPS623979B2 JP55162341A JP16234180A JPS623979B2 JP S623979 B2 JPS623979 B2 JP S623979B2 JP 55162341 A JP55162341 A JP 55162341A JP 16234180 A JP16234180 A JP 16234180A JP S623979 B2 JPS623979 B2 JP S623979B2
Authority
JP
Japan
Prior art keywords
slider
substrate
base body
glass substrate
protrusion
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP55162341A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5785236A (en
Inventor
Jiro Kobayashi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nikon Corp
Original Assignee
Nippon Kogaku KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Kogaku KK filed Critical Nippon Kogaku KK
Priority to JP55162341A priority Critical patent/JPS5785236A/ja
Publication of JPS5785236A publication Critical patent/JPS5785236A/ja
Publication of JPS623979B2 publication Critical patent/JPS623979B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
    • G03F1/66—Containers specially adapted for masks, mask blanks or pellicles; Preparation thereof

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Reciprocating Conveyors (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
JP55162341A 1980-11-18 1980-11-18 Carrier device for glass substrate or the like Granted JPS5785236A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP55162341A JPS5785236A (en) 1980-11-18 1980-11-18 Carrier device for glass substrate or the like

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP55162341A JPS5785236A (en) 1980-11-18 1980-11-18 Carrier device for glass substrate or the like

Publications (2)

Publication Number Publication Date
JPS5785236A JPS5785236A (en) 1982-05-27
JPS623979B2 true JPS623979B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1987-01-28

Family

ID=15752708

Family Applications (1)

Application Number Title Priority Date Filing Date
JP55162341A Granted JPS5785236A (en) 1980-11-18 1980-11-18 Carrier device for glass substrate or the like

Country Status (1)

Country Link
JP (1) JPS5785236A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63263102A (ja) * 1987-04-17 1988-10-31 ベーベーエス・クラフトファールツオイグテクニク・アクチェンゲゼルシャフト 自動車用ホイールのロック装置

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS513743U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1974-06-25 1976-01-12

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63263102A (ja) * 1987-04-17 1988-10-31 ベーベーエス・クラフトファールツオイグテクニク・アクチェンゲゼルシャフト 自動車用ホイールのロック装置

Also Published As

Publication number Publication date
JPS5785236A (en) 1982-05-27

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