JPS623945B2 - - Google Patents

Info

Publication number
JPS623945B2
JPS623945B2 JP9132181A JP9132181A JPS623945B2 JP S623945 B2 JPS623945 B2 JP S623945B2 JP 9132181 A JP9132181 A JP 9132181A JP 9132181 A JP9132181 A JP 9132181A JP S623945 B2 JPS623945 B2 JP S623945B2
Authority
JP
Japan
Prior art keywords
plate holder
plate
mask substrate
edge
holder
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP9132181A
Other languages
English (en)
Japanese (ja)
Other versions
JPS584925A (ja
Inventor
Satoshi Araihara
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP56091321A priority Critical patent/JPS584925A/ja
Publication of JPS584925A publication Critical patent/JPS584925A/ja
Publication of JPS623945B2 publication Critical patent/JPS623945B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H10P95/00—

Landscapes

  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Preparing Plates And Mask In Photomechanical Process (AREA)
JP56091321A 1981-06-12 1981-06-12 プレ−ト保持具 Granted JPS584925A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56091321A JPS584925A (ja) 1981-06-12 1981-06-12 プレ−ト保持具

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56091321A JPS584925A (ja) 1981-06-12 1981-06-12 プレ−ト保持具

Publications (2)

Publication Number Publication Date
JPS584925A JPS584925A (ja) 1983-01-12
JPS623945B2 true JPS623945B2 (show.php) 1987-01-28

Family

ID=14023186

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56091321A Granted JPS584925A (ja) 1981-06-12 1981-06-12 プレ−ト保持具

Country Status (1)

Country Link
JP (1) JPS584925A (show.php)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2796131B2 (ja) * 1989-06-29 1998-09-10 沖電気工業株式会社 ホトマスクケース及びホトマスクの保管方法

Also Published As

Publication number Publication date
JPS584925A (ja) 1983-01-12

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