JPS623574B2 - - Google Patents

Info

Publication number
JPS623574B2
JPS623574B2 JP3371978A JP3371978A JPS623574B2 JP S623574 B2 JPS623574 B2 JP S623574B2 JP 3371978 A JP3371978 A JP 3371978A JP 3371978 A JP3371978 A JP 3371978A JP S623574 B2 JPS623574 B2 JP S623574B2
Authority
JP
Japan
Prior art keywords
wiping tool
wiping
cleaning
semiconductor mask
cleaning liquid
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP3371978A
Other languages
English (en)
Japanese (ja)
Other versions
JPS54125980A (en
Inventor
Masataka Hisamichi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Electric Co Ltd filed Critical Nippon Electric Co Ltd
Priority to JP3371978A priority Critical patent/JPS54125980A/ja
Publication of JPS54125980A publication Critical patent/JPS54125980A/ja
Publication of JPS623574B2 publication Critical patent/JPS623574B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Cleaning In General (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
  • Preparing Plates And Mask In Photomechanical Process (AREA)
JP3371978A 1978-03-23 1978-03-23 Washing device for semiconductor mask cleansing wiper tool Granted JPS54125980A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3371978A JPS54125980A (en) 1978-03-23 1978-03-23 Washing device for semiconductor mask cleansing wiper tool

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3371978A JPS54125980A (en) 1978-03-23 1978-03-23 Washing device for semiconductor mask cleansing wiper tool

Publications (2)

Publication Number Publication Date
JPS54125980A JPS54125980A (en) 1979-09-29
JPS623574B2 true JPS623574B2 (US07714131-20100511-C00038.png) 1987-01-26

Family

ID=12394201

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3371978A Granted JPS54125980A (en) 1978-03-23 1978-03-23 Washing device for semiconductor mask cleansing wiper tool

Country Status (1)

Country Link
JP (1) JPS54125980A (US07714131-20100511-C00038.png)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010253399A (ja) * 2009-04-27 2010-11-11 Iwatani Internatl Corp 汚染表面清掃方法
CN106179875A (zh) * 2016-07-29 2016-12-07 芜湖市振华戎科智能科技有限公司 一种加密光盘生产线用滴胶装置

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5184371U (US07714131-20100511-C00038.png) * 1974-12-26 1976-07-06

Also Published As

Publication number Publication date
JPS54125980A (en) 1979-09-29

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