JPS6234144B2 - - Google Patents
Info
- Publication number
- JPS6234144B2 JPS6234144B2 JP17320380A JP17320380A JPS6234144B2 JP S6234144 B2 JPS6234144 B2 JP S6234144B2 JP 17320380 A JP17320380 A JP 17320380A JP 17320380 A JP17320380 A JP 17320380A JP S6234144 B2 JPS6234144 B2 JP S6234144B2
- Authority
- JP
- Japan
- Prior art keywords
- chip
- board
- input
- pedestal
- substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000012360 testing method Methods 0.000 claims description 35
- 239000000758 substrate Substances 0.000 claims description 29
- 239000004065 semiconductor Substances 0.000 claims description 21
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 claims description 20
- 239000011521 glass Substances 0.000 claims description 10
- 230000003287 optical effect Effects 0.000 claims description 6
- 239000000463 material Substances 0.000 claims description 2
- 239000012780 transparent material Substances 0.000 claims 1
- 238000000034 method Methods 0.000 description 19
- 229910000679 solder Inorganic materials 0.000 description 9
- 239000004020 conductor Substances 0.000 description 5
- 238000005516 engineering process Methods 0.000 description 5
- 239000000919 ceramic Substances 0.000 description 4
- 239000010949 copper Substances 0.000 description 3
- 229910052751 metal Inorganic materials 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 2
- 239000011651 chromium Substances 0.000 description 2
- 229910052802 copper Inorganic materials 0.000 description 2
- 230000007547 defect Effects 0.000 description 2
- 238000000151 deposition Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 239000010931 gold Substances 0.000 description 2
- 230000010354 integration Effects 0.000 description 2
- 239000011159 matrix material Substances 0.000 description 2
- 235000012431 wafers Nutrition 0.000 description 2
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 239000000969 carrier Substances 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 230000009977 dual effect Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 239000005357 flat glass Substances 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- 238000001259 photo etching Methods 0.000 description 1
- 229920002120 photoresistant polymer Polymers 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 230000035939 shock Effects 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 238000001771 vacuum deposition Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Testing Of Individual Semiconductor Devices (AREA)
- Measuring Leads Or Probes (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP17320380A JPS5797637A (en) | 1980-12-10 | 1980-12-10 | Substrate for test of semiconductor chip |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP17320380A JPS5797637A (en) | 1980-12-10 | 1980-12-10 | Substrate for test of semiconductor chip |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5797637A JPS5797637A (en) | 1982-06-17 |
JPS6234144B2 true JPS6234144B2 (enrdf_load_stackoverflow) | 1987-07-24 |
Family
ID=15956016
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP17320380A Granted JPS5797637A (en) | 1980-12-10 | 1980-12-10 | Substrate for test of semiconductor chip |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5797637A (enrdf_load_stackoverflow) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6481333A (en) * | 1987-09-24 | 1989-03-27 | Hitachi Ltd | Test board for flip-chip |
US7476555B2 (en) * | 2006-11-15 | 2009-01-13 | Airdio Wireless Inc. | Method of chip manufacturing |
-
1980
- 1980-12-10 JP JP17320380A patent/JPS5797637A/ja active Granted
Also Published As
Publication number | Publication date |
---|---|
JPS5797637A (en) | 1982-06-17 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
US6268739B1 (en) | Method and device for semiconductor testing using electrically conductive adhesives | |
JP5306224B2 (ja) | コンプライアンスを有するマイクロ電子アセンブリ及びそのための方法 | |
EP0073149B1 (en) | Semiconductor chip mounting module | |
JP3694546B2 (ja) | 半導体ウェハをプローブする方法 | |
US5786701A (en) | Bare die testing | |
US20030063450A1 (en) | Multiple die interconnect system | |
JP2000111576A (ja) | コンタクトストラクチャのパッケ―ジング・相互接続 | |
US6392428B1 (en) | Wafer level interposer | |
JPH08504036A (ja) | エリアアレイ配線チップのtabテスト | |
KR19980047801A (ko) | 웨이퍼 레벨 칩 스케일 패키지 및 그의 제조 방법 | |
JPH02133943A (ja) | 高集積回路及びその製造方法 | |
JP2000304773A (ja) | コンタクトストラクチャのパッケージング・相互接続 | |
JPH08285892A (ja) | 裸集積回路デバイスをテストするための構造体 | |
JP2000306961A (ja) | プローブカード及び半導体装置の試験方法 | |
JPH10319087A (ja) | ダイ検査法およびその装置 | |
US6548756B2 (en) | Packaging and interconnection of contact structure | |
JP2003508898A (ja) | マイクロビームアセンブリおよび集積回路と基板との内部連結方法 | |
US6673653B2 (en) | Wafer-interposer using a ceramic substrate | |
JPH0737948A (ja) | ダイ試験装置 | |
JP2001201534A (ja) | 集積回路の試験 | |
JP2715793B2 (ja) | 半導体装置及びその製造方法 | |
US5945734A (en) | Wire-bond free input/output interface for GaAs ICs with means of determining known good die | |
US5940680A (en) | Method for manufacturing known good die array having solder bumps | |
JPS6234144B2 (enrdf_load_stackoverflow) | ||
US6281693B1 (en) | Semiconductor device test board and a method of testing a semiconductor device |