JPS62298142A - 半導体装置 - Google Patents
半導体装置Info
- Publication number
- JPS62298142A JPS62298142A JP14234386A JP14234386A JPS62298142A JP S62298142 A JPS62298142 A JP S62298142A JP 14234386 A JP14234386 A JP 14234386A JP 14234386 A JP14234386 A JP 14234386A JP S62298142 A JPS62298142 A JP S62298142A
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- internal circuit
- metal layer
- microwave
- semiconductor substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000004065 semiconductor Substances 0.000 title claims abstract description 26
- 239000000758 substrate Substances 0.000 claims abstract description 25
- 239000002184 metal Substances 0.000 claims abstract description 11
- 230000005855 radiation Effects 0.000 abstract description 4
- 230000017525 heat dissipation Effects 0.000 description 5
- 230000000694 effects Effects 0.000 description 4
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 3
- 238000005219 brazing Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 238000003486 chemical etching Methods 0.000 description 1
- 238000001312 dry etching Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000001020 plasma etching Methods 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 238000001039 wet etching Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14234386A JPS62298142A (ja) | 1986-06-17 | 1986-06-17 | 半導体装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14234386A JPS62298142A (ja) | 1986-06-17 | 1986-06-17 | 半導体装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62298142A true JPS62298142A (ja) | 1987-12-25 |
| JPH0573262B2 JPH0573262B2 (enrdf_load_stackoverflow) | 1993-10-14 |
Family
ID=15313153
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14234386A Granted JPS62298142A (ja) | 1986-06-17 | 1986-06-17 | 半導体装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62298142A (enrdf_load_stackoverflow) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4956697A (en) * | 1987-12-14 | 1990-09-11 | Mitsubishi Denki Kabushiki Kaisha | Microwave monolithic integrated circuit with heat radiating electrode |
| JPH0316159A (ja) * | 1989-05-23 | 1991-01-24 | Shinko Electric Ind Co Ltd | 電子装置 |
-
1986
- 1986-06-17 JP JP14234386A patent/JPS62298142A/ja active Granted
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4956697A (en) * | 1987-12-14 | 1990-09-11 | Mitsubishi Denki Kabushiki Kaisha | Microwave monolithic integrated circuit with heat radiating electrode |
| JPH0316159A (ja) * | 1989-05-23 | 1991-01-24 | Shinko Electric Ind Co Ltd | 電子装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0573262B2 (enrdf_load_stackoverflow) | 1993-10-14 |
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