JPS62298142A - 半導体装置 - Google Patents

半導体装置

Info

Publication number
JPS62298142A
JPS62298142A JP14234386A JP14234386A JPS62298142A JP S62298142 A JPS62298142 A JP S62298142A JP 14234386 A JP14234386 A JP 14234386A JP 14234386 A JP14234386 A JP 14234386A JP S62298142 A JPS62298142 A JP S62298142A
Authority
JP
Japan
Prior art keywords
substrate
internal circuit
metal layer
microwave
semiconductor substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP14234386A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0573262B2 (enrdf_load_stackoverflow
Inventor
Hiroyuki Nagao
長尾　博之
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp filed Critical NEC Corp
Priority to JP14234386A priority Critical patent/JPS62298142A/ja
Publication of JPS62298142A publication Critical patent/JPS62298142A/ja
Publication of JPH0573262B2 publication Critical patent/JPH0573262B2/ja
Granted legal-status Critical Current

Links

JP14234386A 1986-06-17 1986-06-17 半導体装置 Granted JPS62298142A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14234386A JPS62298142A (ja) 1986-06-17 1986-06-17 半導体装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14234386A JPS62298142A (ja) 1986-06-17 1986-06-17 半導体装置

Publications (2)

Publication Number Publication Date
JPS62298142A true JPS62298142A (ja) 1987-12-25
JPH0573262B2 JPH0573262B2 (enrdf_load_stackoverflow) 1993-10-14

Family

ID=15313153

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14234386A Granted JPS62298142A (ja) 1986-06-17 1986-06-17 半導体装置

Country Status (1)

Country Link
JP (1) JPS62298142A (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4956697A (en) * 1987-12-14 1990-09-11 Mitsubishi Denki Kabushiki Kaisha Microwave monolithic integrated circuit with heat radiating electrode
JPH0316159A (ja) * 1989-05-23 1991-01-24 Shinko Electric Ind Co Ltd 電子装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4956697A (en) * 1987-12-14 1990-09-11 Mitsubishi Denki Kabushiki Kaisha Microwave monolithic integrated circuit with heat radiating electrode
JPH0316159A (ja) * 1989-05-23 1991-01-24 Shinko Electric Ind Co Ltd 電子装置

Also Published As

Publication number Publication date
JPH0573262B2 (enrdf_load_stackoverflow) 1993-10-14

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