JPS62297086A - クリ−ンル−ム用ロボツト構造 - Google Patents

クリ−ンル−ム用ロボツト構造

Info

Publication number
JPS62297086A
JPS62297086A JP13918886A JP13918886A JPS62297086A JP S62297086 A JPS62297086 A JP S62297086A JP 13918886 A JP13918886 A JP 13918886A JP 13918886 A JP13918886 A JP 13918886A JP S62297086 A JPS62297086 A JP S62297086A
Authority
JP
Japan
Prior art keywords
robot
clean room
bellows
backward
arm
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP13918886A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0443757B2 (enExample
Inventor
信利 鳥居
進 伊藤
康夫 佐々木
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fanuc Corp
Original Assignee
Fanuc Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fanuc Corp filed Critical Fanuc Corp
Priority to JP13918886A priority Critical patent/JPS62297086A/ja
Publication of JPS62297086A publication Critical patent/JPS62297086A/ja
Publication of JPH0443757B2 publication Critical patent/JPH0443757B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Manipulator (AREA)
JP13918886A 1986-06-17 1986-06-17 クリ−ンル−ム用ロボツト構造 Granted JPS62297086A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13918886A JPS62297086A (ja) 1986-06-17 1986-06-17 クリ−ンル−ム用ロボツト構造

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13918886A JPS62297086A (ja) 1986-06-17 1986-06-17 クリ−ンル−ム用ロボツト構造

Publications (2)

Publication Number Publication Date
JPS62297086A true JPS62297086A (ja) 1987-12-24
JPH0443757B2 JPH0443757B2 (enExample) 1992-07-17

Family

ID=15239604

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13918886A Granted JPS62297086A (ja) 1986-06-17 1986-06-17 クリ−ンル−ム用ロボツト構造

Country Status (1)

Country Link
JP (1) JPS62297086A (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011522397A (ja) * 2008-04-25 2011-07-28 エーエスエムエル ネザーランズ ビー．ブイ． 真空内使用のためのロボット

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5629353U (enExample) * 1979-08-13 1981-03-19
JPS5924292U (ja) * 1982-08-05 1984-02-15 東京エレクトロン株式会社 腕状機構
JPS6133891A (ja) * 1984-07-26 1986-02-17 松下電器産業株式会社 工業用ロボツト

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5629353U (enExample) * 1979-08-13 1981-03-19
JPS5924292U (ja) * 1982-08-05 1984-02-15 東京エレクトロン株式会社 腕状機構
JPS6133891A (ja) * 1984-07-26 1986-02-17 松下電器産業株式会社 工業用ロボツト

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011522397A (ja) * 2008-04-25 2011-07-28 エーエスエムエル ネザーランズ ビー．ブイ． 真空内使用のためのロボット
US8614786B2 (en) 2008-04-25 2013-12-24 Asml Netherlands B.V. Robot for in-vacuum use

Also Published As

Publication number Publication date
JPH0443757B2 (enExample) 1992-07-17

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