JPS62294483A - Reduction of anion load in ultrapure water system - Google Patents
Reduction of anion load in ultrapure water systemInfo
- Publication number
- JPS62294483A JPS62294483A JP13848786A JP13848786A JPS62294483A JP S62294483 A JPS62294483 A JP S62294483A JP 13848786 A JP13848786 A JP 13848786A JP 13848786 A JP13848786 A JP 13848786A JP S62294483 A JPS62294483 A JP S62294483A
- Authority
- JP
- Japan
- Prior art keywords
- water
- carbon dioxide
- raw water
- air
- treatment
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 229910021642 ultra pure water Inorganic materials 0.000 title claims description 13
- 239000012498 ultrapure water Substances 0.000 title claims description 13
- 150000001450 anions Chemical class 0.000 title claims description 7
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 86
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 claims abstract description 76
- 239000001569 carbon dioxide Substances 0.000 claims abstract description 38
- 229910002092 carbon dioxide Inorganic materials 0.000 claims abstract description 38
- 238000005342 ion exchange Methods 0.000 claims abstract description 15
- 239000003795 chemical substances by application Substances 0.000 claims abstract description 6
- 238000001223 reverse osmosis Methods 0.000 claims description 22
- 238000000034 method Methods 0.000 claims description 21
- 238000006114 decarboxylation reaction Methods 0.000 claims description 12
- 238000001179 sorption measurement Methods 0.000 claims description 7
- 230000002378 acidificating effect Effects 0.000 claims description 4
- 238000007664 blowing Methods 0.000 claims description 2
- 230000007935 neutral effect Effects 0.000 claims description 2
- 239000002351 wastewater Substances 0.000 claims description 2
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 abstract description 10
- 239000002253 acid Substances 0.000 abstract description 7
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 abstract description 4
- 239000003513 alkali Substances 0.000 abstract description 4
- 239000007788 liquid Substances 0.000 abstract description 2
- HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 description 6
- 238000002347 injection Methods 0.000 description 5
- 239000007924 injection Substances 0.000 description 5
- 238000004519 manufacturing process Methods 0.000 description 4
- 239000012528 membrane Substances 0.000 description 4
- 150000003839 salts Chemical class 0.000 description 4
- 238000010612 desalination reaction Methods 0.000 description 3
- VTYYLEPIZMXCLO-UHFFFAOYSA-L Calcium carbonate Chemical compound [Ca+2].[O-]C([O-])=O VTYYLEPIZMXCLO-UHFFFAOYSA-L 0.000 description 2
- 150000007513 acids Chemical class 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 150000002500 ions Chemical class 0.000 description 2
- 230000001172 regenerating effect Effects 0.000 description 2
- 235000011121 sodium hydroxide Nutrition 0.000 description 2
- BVKZGUZCCUSVTD-UHFFFAOYSA-M Bicarbonate Chemical compound OC([O-])=O BVKZGUZCCUSVTD-UHFFFAOYSA-M 0.000 description 1
- BVKZGUZCCUSVTD-UHFFFAOYSA-L Carbonate Chemical compound [O-]C([O-])=O BVKZGUZCCUSVTD-UHFFFAOYSA-L 0.000 description 1
- CDBYLPFSWZWCQE-UHFFFAOYSA-L Sodium Carbonate Chemical compound [Na+].[Na+].[O-]C([O-])=O CDBYLPFSWZWCQE-UHFFFAOYSA-L 0.000 description 1
- 238000005273 aeration Methods 0.000 description 1
- 229910000019 calcium carbonate Inorganic materials 0.000 description 1
- BVKZGUZCCUSVTD-UHFFFAOYSA-N carbonic acid Chemical compound OC(O)=O BVKZGUZCCUSVTD-UHFFFAOYSA-N 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 239000010419 fine particle Substances 0.000 description 1
- 238000011835 investigation Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000006386 neutralization reaction Methods 0.000 description 1
- 239000012466 permeate Substances 0.000 description 1
- 238000001556 precipitation Methods 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- -1 that is Substances 0.000 description 1
Abstract
Description
【発明の詳細な説明】
６ 発明の詳ａ′／に、説明
（産業上の利用分野）
本発明は、電子工業分野、医薬品製造分野等において用
いられる高度に精製された純水、すなわち超純水の製造
方法に関する。Detailed Description of the Invention 6 Detailed Description of the Invention A'/, Explanation (Industrial Application Field) The present invention is directed to highly purified pure water, that is, ultrapure water, used in the electronic industry field, pharmaceutical manufacturing field, etc. Concerning a method for producing water.
（従来の技術）
上記分野の超純水製造システムとしては、原水を逆浸透
装置により処理して微粒子を除去するとともに塩類濃度
をある程度低減させ、のちイオン交換装置において最終
の脱塩を行うプロセスが基本となる。逆浸透装置に供給
される原水は、逆浸透膜上の炭酸カルシウム等のスケー
ルの析出の防止のため、また膜の材質による膜劣化の防
止のため、塩類、硫酸等の酸を注入して弱酸性にするこ
とが行われている。これに伴い原水中の重炭酸イオン等
は炭化ガスとなるので、原水中には炭酸ガスが遊離の状
態でかなりの量で存在することになる。(Prior art) As an ultrapure water production system in the above field, there is a process in which raw water is treated with a reverse osmosis device to remove fine particles and reduce the salt concentration to some extent, and then final desalination is performed in an ion exchange device. Becomes the basics. The raw water supplied to the reverse osmosis equipment is weakened by injecting salts and acids such as sulfuric acid to prevent the precipitation of scales such as calcium carbonate on the reverse osmosis membrane and to prevent membrane deterioration due to the membrane material. It is made acidic. As a result, bicarbonate ions and the like in the raw water turn into carbonized gas, so a considerable amount of carbon dioxide gas is present in the free state in the raw water.
この遊離炭酸ガスは逆浸透膜では除去甥れずに自由に通
過するので、後続のイオン交換装置の負荷を大きくする
ことになる。そこで逆浸透装置の前または後に空気吹込
式の充填塔型式の脱炭酸塔を設けて炭酸ガスをストリッ
ピングし、イオン交換装置の負荷低減を図ることが一般
に行われている。This free carbon dioxide gas is not removed by the reverse osmosis membrane and passes through it freely, which increases the load on the subsequent ion exchange device. Therefore, it is common practice to provide an air-blown packed column type decarboxylation tower before or after the reverse osmosis device to strip carbon dioxide gas and reduce the load on the ion exchange device.
（発明が解決しようとする問題点）
前記従来技術の方法は炭酸ガスストリッピングをいくら
入念に行っても水中の炭酸ガス濃度は２ ｐｐｍ程度以
下に下らず、このため高説塩率の逆浸透処理の後にも、
この残留炭酸ガスはそのま１イオン交換装置の負荷とし
て残ることになる。(Problems to be Solved by the Invention) In the method of the prior art described above, no matter how carefully the carbon dioxide gas stripping is performed, the carbon dioxide concentration in the water does not fall below about 2 ppm, and for this reason, reverse osmosis with a high salt rate Even after processing,
This residual carbon dioxide gas remains as a load on the ion exchanger.
本発明は従来技術の上記問題点を解決し、超純水製造過
程の水中に含まれる炭酸ガスのレベルをさらに下げ、後
続するイオン交換装置の負荷を軽減する手段を提供する
ことを目的とする。The present invention aims to solve the above-mentioned problems of the prior art and provide a means for further lowering the level of carbon dioxide gas contained in water during the ultrapure water production process and reducing the load on the subsequent ion exchange equipment. .
（問題点を解決するだめの手段）
前記問題を検討の結果、水中の炭酸ガス濃度の低下を阻
む原因は脱炭酸塔において水中の炭酸ガスの駆逐除去を
遂行する空気にあることが知見きれた。すなわち空気中
には炭酸ガスが通常３００ｐｐｍ程度含まれており、こ
の空気をその１ま脱炭酸に用いたのでは炭酸ガスの分圧
により水中に平衡濃度の炭酸ガスが残る結果となる。(Means to solve the problem) As a result of examining the above problem, it was found that the cause of preventing the decrease in the concentration of carbon dioxide in water is the air that performs the expulsion and removal of carbon dioxide in water in the decarboxylation tower. . That is, air normally contains about 300 ppm of carbon dioxide gas, and if this air is used for decarbonation, an equilibrium concentration of carbon dioxide gas will remain in the water due to the partial pressure of carbon dioxide gas.
本発明は、この究明に基いて対策として創作されたもの
でろって、空気吹込式の脱炭酸塔に吹込む空気は炭酸ガ
スを除去したものとする。The present invention was created as a countermeasure based on this investigation, and assumes that the air blown into the air-blowing type decarboxylation tower has carbon dioxide removed.
そのため、予め苛性ソーダ等のアルカリ剤を循環する湿
式吸着塔の充填層において予め炭酸ガスを除去した空気
をつくり、この空気を使用して脱炭酸塔で水中炭酸ガス
の除去を遂行する超純水製造システムを構成する。Therefore, we create ultrapure water by removing carbon dioxide from the air in advance in the packed bed of a wet adsorption tower that circulates an alkaline agent such as caustic soda, and then use this air to remove carbon dioxide from water in a decarbonation tower. Configure the system.
すなわち、本発明の超純水装置におけるアニオン負荷低
減方法は、構成上、原水を逆浸透処理ののちイオン交換
処理して超純水を製造する過程において、脱炭酸処理を
逆浸透処理の前または後において実施し、アルカリ剤を
用いる湿式吸着塔を通過させて炭酸ガス濃度を低下させ
た空気と当該過程の水との接触により前記脱炭酸処理を
行うようにしたことを特徴とする。That is, the method for reducing the anion load in the ultrapure water apparatus of the present invention has a structure in which, in the process of producing ultrapure water by subjecting raw water to reverse osmosis treatment and then ion exchange treatment, decarboxylation treatment is performed before or after reverse osmosis treatment. The method is characterized in that the decarboxylation treatment is carried out later by contacting the water in the process with air whose carbon dioxide concentration has been reduced by passing through a wet adsorption tower using an alkaline agent.
添付図は本発明方法を実施する超純水設備の装置および
処理フローの１例を示す。The attached diagram shows an example of an ultrapure water facility and a processing flow for carrying out the method of the present invention.
処理されるべき原水（１）は原水槽（２）に受入れられ
原水ポンプ（３）によ）原水の脱炭酸塔（４）の上位に
送入される。この送水ライン（５）には酸貯槽（６）か
ら酸注入ポンプ（７）により塩酸、硫酸等の酸を注入し
、原水のＰＩ−Ｉを４〜５に下げ、Ｍアルカリ度の一部
寸たけ全部を炭酸ガスに変換しておく。Raw water (1) to be treated is received in a raw water tank (2) and sent (by a raw water pump (3)) to the upper part of a raw water decarbonation tower (4). Hydrochloric acid, sulfuric acid, and other acids are injected into this water supply line (5) from the acid storage tank (6) using the acid injection pump (7) to lower the PI-I of the raw water to 4 to 5, and reduce the M alkalinity by a certain amount. Convert all of it into carbon dioxide gas.
一方、空気はプロア（８）によシ先づ湿式吸着塔（９）
に吹込まれる。湿式吸着塔（９）においてはそのアルカ
リ水槽０１にアルカリ水ａυが保有されており、このア
ルカリ水は循環ポンプ＠によυ循環ラインσ葎を通り塔
内のラツシヒリング等の充填層０→にスプレーさり１１
．充填層０→内を流下する間に上昇流する空気と気液接
触を行い、空気中の炭酸ガスを吸収除去する。On the other hand, the air is transferred to the wet adsorption tower (9) before being transferred to the Proa (8).
is blown into. In the wet adsorption tower (9), alkaline water aυ is held in its alkaline water tank 01, and this alkaline water is sprayed onto the packed bed 0→ of the Ratschig ring in the tower through the circulation line σ by the circulation pump @. Sari 11
．． While flowing down inside the packed bed 0, gas-liquid contact is made with the upwardly flowing air, and carbon dioxide gas in the air is absorbed and removed.
アルカリ水０１）としては、常に強アルカリに保持され
るようアルカリ貯槽αＯからアルカリ注入ポンプＤＩに
よりアルカリ剤を循環ライン０に注入する。アルカリ剤
としては例えば２０％苛性ソーダ等を用いる。アルカリ
水槽ａ１には若干の水を補給して、炭酸ソーダとして数
チ、ＰＨとして１３程度以上を保持するようにする。こ
うしてアルカリ水槽ａ１より少■のプローａカを行い。As the alkaline water 01), an alkaline agent is injected into the circulation line 0 from the alkaline storage tank αO by the alkaline injection pump DI so that it is always kept strongly alkaline. As the alkaline agent, for example, 20% caustic soda is used. A small amount of water is replenished into the alkaline water tank a1 to maintain several liters of soda carbonate and a pH of about 13 or more. In this way, a smaller amount of probing was performed than in the alkaline water tank a1.
常に上記条件を保つようにする。Always maintain the above conditions.
炭酸ガスを除去された空気はデミスタ−（ト）を経てア
ルカリ水滴が除去され管路ＯＩを経て原水脱炭酸塔（４
）に送られる。The air from which carbon dioxide gas has been removed passes through a demister (T), alkaline water droplets are removed, and the air passes through a pipe OI to a raw water decarboxylation tower (4).
) will be sent to.
脱炭酸塔（４）では供給された原水は、塔内でスプレー
されラッシヒリング等の充填層−内を流下し管路ＯＩか
ら送られる炭酸ガスを除去された空気と接触し、脱炭酸
され、脱炭酸水Ｑυとして溜められる。In the decarboxylation tower (4), the supplied raw water is sprayed in the tower, flows through a packed bed such as a Raschig ring, and comes into contact with the air from which carbon dioxide gas is removed, which is sent from the pipe OI, and is decarboxylated. It is stored as carbonated water Qυ.
この脱炭酸水■υは脱炭酸水ポンプ（イ）にょフ送出さ
れカートリッジフィルタ（財）全通過し、ココで下流の
逆浸透装置（ハ）の目づまりを生じさせるかも知れない
懸濁固形物が除去される。カートリッジフィルタ■を通
過した処理水はさらに加圧ポンプ（イ）により逆浸透処
理に心理に必要な圧力、通常１５〜４０ｋｙ／ｄＧに加
圧されて逆浸透装置（財）に送られ逆浸透処理され透過
水（ホ）を得る。This decarbonated water ■υ is sent out through the decarbonated water pump (a) and passes through the cartridge filter, where suspended solids that may clog the downstream reverse osmosis device (c) are removed. removed. The treated water that has passed through the cartridge filter ■ is further pressurized by a pressure pump (A) to the psychologically necessary pressure for reverse osmosis treatment, usually 15 to 40 ky/dG, and then sent to the reverse osmosis equipment (foundation) for reverse osmosis treatment. and obtain permeated water (e).
この透過水は、後続処理として必要となるイオン交換！
＠に送られてイオン交換処理され、その処理水（ハ）は
処理水槽−に送られ使用に供される。This permeated water undergoes ion exchange, which is necessary as a subsequent treatment!
The treated water (c) is sent to the treated water tank and used for ion exchange treatment.
逆浸透装ｊｕ（ハ）からはその濃縮側からブロー水（ト
）が系外に放出され、この水は弱酸性であるためアルカ
リ水ブローａηと混合してＰＨ５，８〜８．６程度の中
性水質のｕト水として放流される。Blow water (t) is released from the reverse osmosis device from the concentration side, and since this water is weakly acidic, it is mixed with alkaline water blow aη to a pH of about 5.8 to 8.6. It is discharged as neutral water.
原水脱炭酸塔（４）は全く同様な構造で逆浸透装置（ハ
）の処理水（透過水）出口に設置し、後続するイオン交
換装置に）の前段階で脱炭酸処理を行ってもよい。The raw water decarboxylation tower (4) has exactly the same structure and may be installed at the treated water (permeate water) outlet of the reverse osmosis device (c) to perform the decarboxylation process before the subsequent ion exchange device). .
（作用）
以上のように炭酸ガスを除去した空気を用いて充填塔に
て曝気して脱炭酸処理を行えば、炭酸ガスの分圧の低下
により原水中の炭酸ガス濃度を無処理空気使用の場合に
較べて大幅に低下させること・ができる。(Function) If decarbonation treatment is performed by aeration in a packed tower using the air from which carbon dioxide has been removed as described above, the carbon dioxide concentration in raw water can be lowered by reducing the partial pressure of carbon dioxide compared to using untreated air. It is possible to significantly reduce the amount compared to the case.
（実施例） 以下、本発明方法の実施例を数値により示す。(Example) Examples of the method of the present invention are shown below using numerical values.
先づ原水に硫酸を注入してＩ’Ｈを下げアルカリ度をほ
ぼ全量、炭酸ガスに変換させる一方、空気中の炭酸ガス
をアルカリ水で除去して濃度２０〜３０ ｐｐｍに低下
させ、この空気により脱炭酸処理を行い、のち逆浸透処
理するプロセスの図中指摘の各過程点＋Ａｌ （ＢＩ
Ｋ５の）の水質を第１表に示す。First, sulfuric acid is injected into the raw water to lower the I'H and almost all the alkalinity is converted to carbon dioxide gas, while carbon dioxide in the air is removed with alkaline water to reduce the concentration to 20-30 ppm. Each process point pointed out in the figure + Al (BI
The water quality of K5) is shown in Table 1.
比較のため、従来技術によシ脱炭酸処理した場合の図中
指摘の各過程点−０３ｆ （ｃｆｉ−での水質を第２表
に示す。For comparison, Table 2 shows the water quality at each process point -03f (cfi-) indicated in the figure when decarboxylation was performed using the conventional technique.
第１表 本発明実施例の水質
〔註記＝Ａ原水、Ｂ硫酸注入後原水、Ｃ炭酸ガス除去空
気による水中炭酸ガス除去処
理後、Ｄ逆浸透処理後〕
〔註記＝Ｃ′：従来技術による炭酸ガス除去処理後、Ｄ
′：従来技術のプロセスの逆
浸透処理後〕
また本発明方法においてブロー水とそれらの混合結果は
第６表に示すように彦る。Table 1 Water quality of Examples of the present invention [Notes = A Raw water, B Raw water after sulfuric acid injection, C After water carbon dioxide removal treatment with carbon dioxide removal air, D After reverse osmosis treatment] [Notes = C': Carbonic acid by conventional technology After gas removal treatment, D
': After reverse osmosis treatment in the process of the prior art] In addition, in the method of the present invention, the blow water and the mixing results thereof are as shown in Table 6.
第６表 ブロー水
（発明の効果）
以上のように、本発明方法により炭酸ガス除脱処理した
空気により水中炭酸ガスのストリッピング除去処理をし
た処理水は、炭酸ガス濃度が０．２ｐｐｍ８度となシ、
この炭酸ガスは後続工程が逆浸透処理してもそのまま透
過してイオン交換処理のアニオン負荷の一部となるが、
全アニオン負荷は３．８ｐｐｍ程度に軽減される。これ
は従来技術でのイオン交換処理の全アニオン負荷が５．
９ｐｐｍであるの、に較べて６４褒にも負担が軽減され
る。この値は通常の再生式イオン交換装置ではあまり問
題とならないが、超純水装置のように最終的脱塩を非再
生型イオン交換装置で仕上処理する必要がβる場合には
、その耐用期間、期間末期の脱塩機能の点で大きな効果
があられれる。同様のことは高説塩率逆浸透装置を用い
て微量イオンを除去するプロセスにも適用される。Table 6 Blow water (effects of the invention) As described above, treated water that has been subjected to stripping removal treatment of carbon dioxide gas in water using air treated to remove carbon dioxide gas by the method of the present invention has a carbon dioxide concentration of 0.2 ppm and 8 degrees Celsius. Nasi,
This carbon dioxide gas passes through the subsequent reverse osmosis process and becomes part of the anion load in the ion exchange process.
The total anion load is reduced to around 3.8 ppm. This means that the total anion load of the ion exchange treatment using the conventional technology is 5.
The burden is reduced to 64 points compared to 9 ppm. This value does not pose much of a problem with ordinary regenerative ion exchange equipment, but in cases where final desalination needs to be completed with a non-regenerative ion exchange equipment, such as in ultrapure water equipment, the service life of , it has a great effect on the desalination function at the end of the period. The same applies to the process of removing trace ions using a high salt rate reverse osmosis device.
１だ酸性、アルカリ性ブロー水の混合排出により、特に
排水中和装置を別途に設ける必要はなくなる。Mixed discharge of acidic and alkaline blow water eliminates the need for a separate wastewater neutralization device.
添付図は本発明方法を実施する超純水設備の装置および
連続式のフローの１例を示す図である０
（１）・・原水、（２）・・原水槽、（３）・・原水ポ
ンプ％（４）・・原水脱炭酸塔、（５）・・送水ライン
、（６）・・酸貯槽、（７）・・酸注入ポンプ、（８）
・・ブロア、（９）・・湿式吸着塔、００・・アルカリ
水槽、Ｏａ・・アルカリ水、Ｏａ・・循環ポンプ、σｅ
・・循環ライン、０４）・・充填層、０Ｑ・・アルカリ
貯槽、０１・・アルカリ注入ポンプ、σカ・・ブロー、
α枠・・デミスタ−１ＯＩ・・管路、翰・・充填層、Ｑ
υ・・脱炭酸水、（イ）・・脱炭酸水ポンプ、＠・・カ
ートリッジフィルタ、（財）・・逆浸透装置、（ハ）・
・加圧ポンプ、（ト）φ・透過水、■・・イオン交換塔
、＠・・処理水、（イ）・・処理水槽、（ト）・・ブロ
ー水。The attached drawings are diagrams showing an example of the equipment and continuous flow of ultrapure water equipment that implements the method of the present invention.0 (1) Raw water, (2) Raw water tank, (3) Raw water Pump% (4) Raw water decarboxylation tower, (5) Water supply line, (6) Acid storage tank, (7) Acid injection pump, (8)
・・Blower, (9)・・Wet adsorption tower, 00・・Alkaline water tank, Oa・・Alkaline water, Oa・・Circulation pump, σe
・・Circulation line, 04)・・Packed bed, 0Q・・Alkali storage tank, 01・・Alkali injection pump, σ・・・Blow,
α frame...Demister-1OI...Pipeline, Window...Filled bed, Q
υ...Decarbonated water, (A)...Decarbonated water pump, @...Cartridge filter, (Foundation)...Reverse osmosis device, (C)...
・Pressure pump, (g) φ・permeated water, ■... ion exchange tower, @... treated water, (i)... treated water tank, (g)... blow water.
Claims (2)
水を製造する過程において、充填塔による脱炭酸処理を
逆浸透処理の前または後において実施し、アルカリ剤を
用いる湿式吸着塔を通過させて炭酸ガス濃度を低下させ
た空気を前記充填塔に吹き込み当該過程の水との接触に
より前記脱炭酸処理を行うようにしたことを特徴とする
超純水装置におけるアニオン負荷低減方法。(1) In the process of producing ultrapure water by subjecting raw water to reverse osmosis treatment and then ion exchange treatment, decarboxylation treatment using a packed tower is performed before or after reverse osmosis treatment, and a wet adsorption tower using an alkaline agent is used. A method for reducing an anion load in an ultrapure water apparatus, characterized in that the decarbonation treatment is performed by blowing air that has been passed through to reduce the carbon dioxide concentration into the packed tower and comes into contact with the water in the process.
式吸着塔より出るアルカリ性ブロー水とを混合し中性Ｐ
Ｈ範囲の排水とする特許請求の範囲第１項記載の超純水
装置におけるアニオン負荷低減方法。(2) Mix the weakly acidic concentrated side blow water generated from reverse osmosis treatment with the alkaline blow water coming out of the wet adsorption tower to create a neutral P
A method for reducing anion load in an ultrapure water apparatus according to claim 1, wherein the wastewater is in the H range.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13848786A JPH0694028B2 (en) | 1986-06-13 | 1986-06-13 | Method for reducing anion load in ultrapure water equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13848786A JPH0694028B2 (en) | 1986-06-13 | 1986-06-13 | Method for reducing anion load in ultrapure water equipment |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62294483A true JPS62294483A (en) | 1987-12-21 |
| JPH0694028B2 JPH0694028B2 (en) | 1994-11-24 |
Family
ID=15223243
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13848786A Expired - Fee Related JPH0694028B2 (en) | 1986-06-13 | 1986-06-13 | Method for reducing anion load in ultrapure water equipment |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0694028B2 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4576760B2 (en) * | 2001-06-25 | 2010-11-10 | 栗田工業株式会社 | Circulating cooling water treatment method |
-
1986
- 1986-06-13 JP JP13848786A patent/JPH0694028B2/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4576760B2 (en) * | 2001-06-25 | 2010-11-10 | 栗田工業株式会社 | Circulating cooling water treatment method |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0694028B2 (en) | 1994-11-24 |
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