JPS62292693A - 液相エピタキシャル成長方法 - Google Patents
液相エピタキシャル成長方法Info
- Publication number
- JPS62292693A JPS62292693A JP13492686A JP13492686A JPS62292693A JP S62292693 A JPS62292693 A JP S62292693A JP 13492686 A JP13492686 A JP 13492686A JP 13492686 A JP13492686 A JP 13492686A JP S62292693 A JPS62292693 A JP S62292693A
- Authority
- JP
- Japan
- Prior art keywords
- growth
- substrate
- soln
- solution
- substrate holder
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000007791 liquid phase Substances 0.000 title claims description 11
- 238000000034 method Methods 0.000 title description 22
- 239000000758 substrate Substances 0.000 claims abstract description 75
- 238000000926 separation method Methods 0.000 claims description 4
- 239000007788 liquid Substances 0.000 claims 1
- 238000001816 cooling Methods 0.000 abstract description 3
- 229920006395 saturated elastomer Polymers 0.000 abstract description 2
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 6
- 239000004065 semiconductor Substances 0.000 description 6
- 150000001875 compounds Chemical class 0.000 description 5
- 238000010586 diagram Methods 0.000 description 5
- 235000012431 wafers Nutrition 0.000 description 5
- 239000013078 crystal Substances 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 4
- 238000006243 chemical reaction Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 238000001947 vapour-phase growth Methods 0.000 description 2
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
- 238000000407 epitaxy Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000002488 metal-organic chemical vapour deposition Methods 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 239000012071 phase Substances 0.000 description 1
- 238000000197 pyrolysis Methods 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13492686A JPS62292693A (ja) | 1986-06-12 | 1986-06-12 | 液相エピタキシャル成長方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13492686A JPS62292693A (ja) | 1986-06-12 | 1986-06-12 | 液相エピタキシャル成長方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62292693A true JPS62292693A (ja) | 1987-12-19 |
| JPH0419196B2 JPH0419196B2 (cs) | 1992-03-30 |
Family
ID=15139772
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13492686A Granted JPS62292693A (ja) | 1986-06-12 | 1986-06-12 | 液相エピタキシャル成長方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62292693A (cs) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2010180085A (ja) * | 2009-02-04 | 2010-08-19 | Ihi Corp | 基板ホルダ |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4843425A (cs) * | 1971-10-05 | 1973-06-23 | ||
| JPS57180760U (cs) * | 1981-05-13 | 1982-11-16 |
-
1986
- 1986-06-12 JP JP13492686A patent/JPS62292693A/ja active Granted
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4843425A (cs) * | 1971-10-05 | 1973-06-23 | ||
| JPS57180760U (cs) * | 1981-05-13 | 1982-11-16 |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2010180085A (ja) * | 2009-02-04 | 2010-08-19 | Ihi Corp | 基板ホルダ |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0419196B2 (cs) | 1992-03-30 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |