JPH0445238Y2 - - Google Patents

Info

Publication number
JPH0445238Y2
JPH0445238Y2 JP1985158397U JP15839785U JPH0445238Y2 JP H0445238 Y2 JPH0445238 Y2 JP H0445238Y2 JP 1985158397 U JP1985158397 U JP 1985158397U JP 15839785 U JP15839785 U JP 15839785U JP H0445238 Y2 JPH0445238 Y2 JP H0445238Y2
Authority
JP
Japan
Prior art keywords
slide
growth
solution
substrate
boat
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1985158397U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6265832U (cs
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1985158397U priority Critical patent/JPH0445238Y2/ja
Publication of JPS6265832U publication Critical patent/JPS6265832U/ja
Application granted granted Critical
Publication of JPH0445238Y2 publication Critical patent/JPH0445238Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
JP1985158397U 1985-10-15 1985-10-15 Expired JPH0445238Y2 (cs)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1985158397U JPH0445238Y2 (cs) 1985-10-15 1985-10-15

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1985158397U JPH0445238Y2 (cs) 1985-10-15 1985-10-15

Publications (2)

Publication Number Publication Date
JPS6265832U JPS6265832U (cs) 1987-04-23
JPH0445238Y2 true JPH0445238Y2 (cs) 1992-10-23

Family

ID=31081846

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1985158397U Expired JPH0445238Y2 (cs) 1985-10-15 1985-10-15

Country Status (1)

Country Link
JP (1) JPH0445238Y2 (cs)

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5267571A (en) * 1975-12-03 1977-06-04 Hitachi Ltd Crystallization method for semiconductor
JPS567999A (en) * 1979-06-28 1981-01-27 Boeicho Gijutsu Kenkyu Honbuch Method of floating up underwater linking body
JPS56161639A (en) * 1980-05-16 1981-12-12 Fujitsu Ltd Method of epitaxially growing in liquid phase
JPS5756925A (en) * 1980-09-20 1982-04-05 Fujitsu Ltd Liquid phase epitaxially growing method and device for gallium arsenide and /or aluminum gallium arsenide

Also Published As

Publication number Publication date
JPS6265832U (cs) 1987-04-23

Similar Documents

Publication Publication Date Title
JPH0445238Y2 (cs)
US4261770A (en) Process for producing epitaxial semiconductor material layers on monocrystalline substrates via liquid phase shift epitaxy
KR870003552A (ko) 화합물 반도체장치의 제조방법
JPH0438517Y2 (cs)
JPH0218576B2 (cs)
JPH029444B2 (cs)
JPH0338831Y2 (cs)
JPS621258Y2 (cs)
JPH0419196B2 (cs)
KR900001716B1 (ko) 액상 박막 결정 성장장치
JPH0571558B2 (cs)
JPS6220998Y2 (cs)
JPH058154B2 (cs)
JPH0454371B2 (cs)
JPH043101B2 (cs)
JPH0247435B2 (ja) Gaasekisoepitakisharuseichoho
JPS6235998B2 (cs)
JPH0210568B2 (cs)
JPS6129121A (ja) ＧａＡｓ液相エピタシヤル成長法
JPS5895815A (ja) 積層構造を有する半導体装置の製造方法
JPH0476204B2 (cs)
JPS5992524A (ja) 液相エピタキシヤル成長方法
JPH04321593A (ja) 液相エピタキシャル成長方法
JPS59104121A (ja) ３−５族化合物半導体液相エピタキシヤル成長方法およびこれに用いられる半導体基板支持装置
JPS5917241A (ja) 液相成長方法