JPS62287096A - 被処理物ラツキング装置 - Google Patents
被処理物ラツキング装置Info
- Publication number
- JPS62287096A JPS62287096A JP13222586A JP13222586A JPS62287096A JP S62287096 A JPS62287096 A JP S62287096A JP 13222586 A JP13222586 A JP 13222586A JP 13222586 A JP13222586 A JP 13222586A JP S62287096 A JPS62287096 A JP S62287096A
- Authority
- JP
- Japan
- Prior art keywords
- weight
- arm
- guide
- fixture
- guide body
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000463 material Substances 0.000 title abstract description 6
- 230000000630 rising effect Effects 0.000 abstract 1
- 238000010586 diagram Methods 0.000 description 5
- 229910052782 aluminium Inorganic materials 0.000 description 4
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 4
- 238000000034 method Methods 0.000 description 3
- 101150093826 par1 gene Proteins 0.000 description 3
- 238000004381 surface treatment Methods 0.000 description 3
- 238000011282 treatment Methods 0.000 description 3
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 2
- 238000007743 anodising Methods 0.000 description 2
- 238000013459 approach Methods 0.000 description 2
- 229910052802 copper Inorganic materials 0.000 description 2
- 239000010949 copper Substances 0.000 description 2
- 239000012528 membrane Substances 0.000 description 2
- 238000007796 conventional method Methods 0.000 description 1
- 238000005238 degreasing Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005868 electrolysis reaction Methods 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 239000000725 suspension Substances 0.000 description 1
- 238000005406 washing Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Framework For Endless Conveyors (AREA)
- Mounting, Exchange, And Manufacturing Of Dies (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13222586A JPS62287096A (ja) | 1986-06-06 | 1986-06-06 | 被処理物ラツキング装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13222586A JPS62287096A (ja) | 1986-06-06 | 1986-06-06 | 被処理物ラツキング装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62287096A true JPS62287096A (ja) | 1987-12-12 |
| JPH028039B2 JPH028039B2 (enrdf_load_stackoverflow) | 1990-02-22 |
Family
ID=15076307
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13222586A Granted JPS62287096A (ja) | 1986-06-06 | 1986-06-06 | 被処理物ラツキング装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62287096A (enrdf_load_stackoverflow) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0535854U (ja) * | 1991-10-16 | 1993-05-14 | 日本軽金属株式会社 | 表面処理用被処理材の吊付装置 |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH07122624A (ja) * | 1993-10-28 | 1995-05-12 | Nec Corp | ウェハのプリアライメント装置 |
-
1986
- 1986-06-06 JP JP13222586A patent/JPS62287096A/ja active Granted
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0535854U (ja) * | 1991-10-16 | 1993-05-14 | 日本軽金属株式会社 | 表面処理用被処理材の吊付装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH028039B2 (enrdf_load_stackoverflow) | 1990-02-22 |
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