JPS6227872B2 - - Google Patents

Info

Publication number
JPS6227872B2
JPS6227872B2 JP54047422A JP4742279A JPS6227872B2 JP S6227872 B2 JPS6227872 B2 JP S6227872B2 JP 54047422 A JP54047422 A JP 54047422A JP 4742279 A JP4742279 A JP 4742279A JP S6227872 B2 JPS6227872 B2 JP S6227872B2
Authority
JP
Japan
Prior art keywords
blind hole
chamber
cleaning
flow control
control plate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP54047422A
Other languages
English (en)
Japanese (ja)
Other versions
JPS55152583A (en
Inventor
Kanji Nagashima
Kazuaki Sato
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP4742279A priority Critical patent/JPS55152583A/ja
Publication of JPS55152583A publication Critical patent/JPS55152583A/ja
Publication of JPS6227872B2 publication Critical patent/JPS6227872B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Cleaning In General (AREA)
JP4742279A 1979-04-18 1979-04-18 Method of removing residual liquid in blind hole Granted JPS55152583A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4742279A JPS55152583A (en) 1979-04-18 1979-04-18 Method of removing residual liquid in blind hole

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4742279A JPS55152583A (en) 1979-04-18 1979-04-18 Method of removing residual liquid in blind hole

Publications (2)

Publication Number Publication Date
JPS55152583A JPS55152583A (en) 1980-11-27
JPS6227872B2 true JPS6227872B2 (enrdf_load_stackoverflow) 1987-06-17

Family

ID=12774708

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4742279A Granted JPS55152583A (en) 1979-04-18 1979-04-18 Method of removing residual liquid in blind hole

Country Status (1)

Country Link
JP (1) JPS55152583A (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63150874U (enrdf_load_stackoverflow) * 1987-03-25 1988-10-04
JP2018187549A (ja) * 2017-04-28 2018-11-29 Smc株式会社 液体排出方法

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63150874U (enrdf_load_stackoverflow) * 1987-03-25 1988-10-04
JP2018187549A (ja) * 2017-04-28 2018-11-29 Smc株式会社 液体排出方法

Also Published As

Publication number Publication date
JPS55152583A (en) 1980-11-27

Similar Documents

Publication Publication Date Title
EP0543322B1 (de) Verfahren zum Reinigen von metallischen Werkstücken
DE2621952C2 (de) Vorrichtung zum Entplattieren und Reinigen von Plättchen oder Substraten
DE69404414T2 (de) Reinigungsverfahren und Reinigungsgerät
DE60033084T2 (de) Vorrichtung und Verfahren zur Beschichtung einer Metallschicht auf die Oberfläche einer Keimschicht eines Halbleiterwafers
DE69108689T2 (de) Vorrichtung zum Reinigen von Siliciumscheiben.
DE69310425T2 (de) Verfahren und Vorrichtung zum Reinigen von Metallartikeln und Vorrichtung zum Spülen von Metallartikeln
US6073369A (en) Substrate drying apparatus and method
JP4526288B2 (ja) スリットノズル先端の調整装置及び調整方法
JPS6227872B2 (enrdf_load_stackoverflow)
DE2709515A1 (de) Verfahren und vorrichtung zur entfernung von ueberzuegen auf metallischen gegenstaenden
JPH10172945A (ja) ウエハー洗浄装置
JPS61204386A (ja) 表面処理方法とその装置
JP2837725B2 (ja) 半導体ウェーハの液体処理装置
JP3004334U (ja) 水平コンベア式連続洗浄装置
JP4236446B2 (ja) 手洗い機付きエアーシャワー装置
KR20020052855A (ko) 탈지설비의 칩 제거장치
JPH04118067A (ja) 塗布装置および塗布処理方法
DE2515993C3 (de) Glaswaschmaschine
JP2982664B2 (ja) 洗浄装置
JP2005177900A (ja) 切粉分別排出装置
JP4260132B2 (ja) 容器内面の水切り装置
JPS63270486A (ja) 帯状材の表面処理装置
JPH048184B2 (enrdf_load_stackoverflow)
JPH02144116A (ja) 排ガス処理装置
JPH0429898Y2 (enrdf_load_stackoverflow)