JPS6227156B2 - - Google Patents

Info

Publication number
JPS6227156B2
JPS6227156B2 JP54170993A JP17099379A JPS6227156B2 JP S6227156 B2 JPS6227156 B2 JP S6227156B2 JP 54170993 A JP54170993 A JP 54170993A JP 17099379 A JP17099379 A JP 17099379A JP S6227156 B2 JPS6227156 B2 JP S6227156B2
Authority
JP
Japan
Prior art keywords
workpiece
metal
mask member
resist
etching
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP54170993A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5696076A (en
Inventor
Tomio Kume
Shoichi Tsutsumi
Seiji Yoneoka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP17099379A priority Critical patent/JPS5696076A/ja
Publication of JPS5696076A publication Critical patent/JPS5696076A/ja
Publication of JPS6227156B2 publication Critical patent/JPS6227156B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • ing And Chemical Polishing (AREA)
  • Magnetic Heads (AREA)
JP17099379A 1979-12-28 1979-12-28 Formation of metallic mask for ion etching Granted JPS5696076A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17099379A JPS5696076A (en) 1979-12-28 1979-12-28 Formation of metallic mask for ion etching

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17099379A JPS5696076A (en) 1979-12-28 1979-12-28 Formation of metallic mask for ion etching

Publications (2)

Publication Number Publication Date
JPS5696076A JPS5696076A (en) 1981-08-03
JPS6227156B2 true JPS6227156B2 (enrdf_load_stackoverflow) 1987-06-12

Family

ID=15915122

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17099379A Granted JPS5696076A (en) 1979-12-28 1979-12-28 Formation of metallic mask for ion etching

Country Status (1)

Country Link
JP (1) JPS5696076A (enrdf_load_stackoverflow)

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5812341B2 (ja) * 1976-04-15 1983-03-08 富士通株式会社 ドライエツチング法
JPS6031909B2 (ja) * 1977-08-17 1985-07-25 株式会社日立製作所 エツチング加工法

Also Published As

Publication number Publication date
JPS5696076A (en) 1981-08-03

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