JPS6227018A - 濾過装置 - Google Patents
濾過装置Info
- Publication number
- JPS6227018A JPS6227018A JP60165941A JP16594185A JPS6227018A JP S6227018 A JPS6227018 A JP S6227018A JP 60165941 A JP60165941 A JP 60165941A JP 16594185 A JP16594185 A JP 16594185A JP S6227018 A JPS6227018 A JP S6227018A
- Authority
- JP
- Japan
- Prior art keywords
- container
- liquid
- filtration
- valve
- pipe
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000007788 liquid Substances 0.000 claims abstract description 94
- 238000001914 filtration Methods 0.000 claims abstract description 66
- 238000011109 contamination Methods 0.000 abstract description 3
- 230000003252 repetitive effect Effects 0.000 abstract 1
- 239000007789 gas Substances 0.000 description 26
- 239000011261 inert gas Substances 0.000 description 6
- 238000000034 method Methods 0.000 description 6
- 238000010586 diagram Methods 0.000 description 5
- 239000000126 substance Substances 0.000 description 5
- 238000009826 distribution Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 230000005540 biological transmission Effects 0.000 description 1
- 230000003749 cleanliness Effects 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 239000004744 fabric Substances 0.000 description 1
- 230000001771 impaired effect Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- BFKJFAAPBSQJPD-UHFFFAOYSA-N tetrafluoroethene Chemical group FC(F)=C(F)F BFKJFAAPBSQJPD-UHFFFAOYSA-N 0.000 description 1
- 238000005303 weighing Methods 0.000 description 1
Landscapes
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Filtration Of Liquid (AREA)
- Weting (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60165941A JPS6227018A (ja) | 1985-07-29 | 1985-07-29 | 濾過装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60165941A JPS6227018A (ja) | 1985-07-29 | 1985-07-29 | 濾過装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6227018A true JPS6227018A (ja) | 1987-02-05 |
| JPH0587283B2 JPH0587283B2 (enrdf_load_stackoverflow) | 1993-12-16 |
Family
ID=15821922
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP60165941A Granted JPS6227018A (ja) | 1985-07-29 | 1985-07-29 | 濾過装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6227018A (enrdf_load_stackoverflow) |
-
1985
- 1985-07-29 JP JP60165941A patent/JPS6227018A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0587283B2 (enrdf_load_stackoverflow) | 1993-12-16 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EXPY | Cancellation because of completion of term |