JPH0153572B2 - - Google Patents

Info

Publication number
JPH0153572B2
JPH0153572B2 JP58192514A JP19251483A JPH0153572B2 JP H0153572 B2 JPH0153572 B2 JP H0153572B2 JP 58192514 A JP58192514 A JP 58192514A JP 19251483 A JP19251483 A JP 19251483A JP H0153572 B2 JPH0153572 B2 JP H0153572B2
Authority
JP
Japan
Prior art keywords
liquid level
liquid
returnable
chemical
tank
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP58192514A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6084136A (ja
Inventor
Shigeru Iizuka
Masahiro Yamazaki
Shigemitsu Kamya
Yoshiro Oka
Katsuhiro Fujino
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Zeon Corp
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Nippon Zeon Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd, Nippon Zeon Co Ltd filed Critical Fujitsu Ltd
Priority to JP19251483A priority Critical patent/JPS6084136A/ja
Priority to US06/660,412 priority patent/US4676404A/en
Priority to EP19840402079 priority patent/EP0138718B1/en
Priority to DE8484402079T priority patent/DE3465970D1/de
Priority to KR1019840006391A priority patent/KR930000225B1/ko
Publication of JPS6084136A publication Critical patent/JPS6084136A/ja
Publication of JPH0153572B2 publication Critical patent/JPH0153572B2/ja
Granted legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J4/00—Feed or outlet devices; Feed or outlet control devices
    • B01J4/008—Feed or outlet control devices

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Weting (AREA)
  • Feeding, Discharge, Calcimining, Fusing, And Gas-Generation Devices (AREA)
JP19251483A 1983-10-17 1983-10-17 密閉型通い缶からの薬液の供給方法並びに供給看視装置 Granted JPS6084136A (ja)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP19251483A JPS6084136A (ja) 1983-10-17 1983-10-17 密閉型通い缶からの薬液の供給方法並びに供給看視装置
US06/660,412 US4676404A (en) 1983-10-17 1984-10-12 Method and apparatus for feeding drug liquid from hermetic returnable can
EP19840402079 EP0138718B1 (en) 1983-10-17 1984-10-16 Method and apparatus for feeding drug liquid from hermetic returnable can
DE8484402079T DE3465970D1 (en) 1983-10-17 1984-10-16 Method and apparatus for feeding drug liquid from hermetic returnable can
KR1019840006391A KR930000225B1 (ko) 1983-10-17 1984-10-16 밀폐형 반환식 통으로부터의 약액 공급방법 및 장치

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP19251483A JPS6084136A (ja) 1983-10-17 1983-10-17 密閉型通い缶からの薬液の供給方法並びに供給看視装置

Publications (2)

Publication Number Publication Date
JPS6084136A JPS6084136A (ja) 1985-05-13
JPH0153572B2 true JPH0153572B2 (enrdf_load_stackoverflow) 1989-11-14

Family

ID=16292547

Family Applications (1)

Application Number Title Priority Date Filing Date
JP19251483A Granted JPS6084136A (ja) 1983-10-17 1983-10-17 密閉型通い缶からの薬液の供給方法並びに供給看視装置

Country Status (1)

Country Link
JP (1) JPS6084136A (enrdf_load_stackoverflow)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5346620B2 (ja) * 1997-07-11 2013-11-20 アドバンスト テクノロジー マテリアルズ，インコーポレイテッド バルク化学物質供給システム
JP4697882B2 (ja) * 2006-05-19 2011-06-08 東京エレクトロン株式会社 処理液供給装置及び処理液供給方法並びに処理液供給用制御プログラム
JP5985616B2 (ja) 2011-05-28 2016-09-06 インテグリス・インコーポレーテッド 浄化機能を有する補充可能なアンプル
CN107915302A (zh) * 2016-10-10 2018-04-17 天津有序环境科技发展有限公司 半自动氨水倾倒笼

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58101732A (ja) * 1981-12-14 1983-06-17 Nippon Telegr & Teleph Corp <Ntt> 薬液供給装置

Also Published As

Publication number Publication date
JPS6084136A (ja) 1985-05-13

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