JPS6226418B2 - - Google Patents
Info
- Publication number
- JPS6226418B2 JPS6226418B2 JP54061438A JP6143879A JPS6226418B2 JP S6226418 B2 JPS6226418 B2 JP S6226418B2 JP 54061438 A JP54061438 A JP 54061438A JP 6143879 A JP6143879 A JP 6143879A JP S6226418 B2 JPS6226418 B2 JP S6226418B2
- Authority
- JP
- Japan
- Prior art keywords
- target object
- inspection
- image signal
- imaging device
- dimensional
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
- G01N21/956—Inspecting patterns on the surface of objects
Landscapes
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Monitoring And Testing Of Nuclear Reactors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6143879A JPS55154442A (en) | 1979-05-21 | 1979-05-21 | Inspecting apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6143879A JPS55154442A (en) | 1979-05-21 | 1979-05-21 | Inspecting apparatus |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS55154442A JPS55154442A (en) | 1980-12-02 |
| JPS6226418B2 true JPS6226418B2 (enExample) | 1987-06-09 |
Family
ID=13171063
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6143879A Granted JPS55154442A (en) | 1979-05-21 | 1979-05-21 | Inspecting apparatus |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS55154442A (enExample) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0612244B2 (ja) * | 1983-11-18 | 1994-02-16 | トキコ株式会社 | 溝検出装置 |
| JP5764093B2 (ja) * | 2012-06-04 | 2015-08-12 | 株式会社日立パワーソリューションズ | 検査システムおよび検査方法 |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5379594A (en) * | 1976-12-24 | 1978-07-14 | Hitachi Ltd | Surface inspecting apparatus of objects |
-
1979
- 1979-05-21 JP JP6143879A patent/JPS55154442A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS55154442A (en) | 1980-12-02 |
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