JPS622632A - 静電吸着装置 - Google Patents

静電吸着装置

Info

Publication number
JPS622632A
JPS622632A JP14163285A JP14163285A JPS622632A JP S622632 A JPS622632 A JP S622632A JP 14163285 A JP14163285 A JP 14163285A JP 14163285 A JP14163285 A JP 14163285A JP S622632 A JPS622632 A JP S622632A
Authority
JP
Japan
Prior art keywords
filled rubber
thermal conductivity
insulation layer
insulating layer
wafer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP14163285A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0263307B2 (enrdf_load_stackoverflow
Inventor
Toshimasa Kisa
木佐　俊正
Naomichi Abe
阿部　直道
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP14163285A priority Critical patent/JPS622632A/ja
Publication of JPS622632A publication Critical patent/JPS622632A/ja
Publication of JPH0263307B2 publication Critical patent/JPH0263307B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Jigs For Machine Tools (AREA)
JP14163285A 1985-06-28 1985-06-28 静電吸着装置 Granted JPS622632A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14163285A JPS622632A (ja) 1985-06-28 1985-06-28 静電吸着装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14163285A JPS622632A (ja) 1985-06-28 1985-06-28 静電吸着装置

Publications (2)

Publication Number Publication Date
JPS622632A true JPS622632A (ja) 1987-01-08
JPH0263307B2 JPH0263307B2 (enrdf_load_stackoverflow) 1990-12-27

Family

ID=15296552

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14163285A Granted JPS622632A (ja) 1985-06-28 1985-06-28 静電吸着装置

Country Status (1)

Country Link
JP (1) JPS622632A (enrdf_load_stackoverflow)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63283037A (ja) * 1987-05-14 1988-11-18 Fujitsu Ltd 静電吸着装置
JPS6417792U (enrdf_load_stackoverflow) * 1987-07-23 1989-01-30
JPH0227748A (ja) * 1988-07-16 1990-01-30 Tomoegawa Paper Co Ltd 静電チャック装置及びその作成方法
JPH02214533A (ja) * 1989-02-15 1990-08-27 Hitachi Ltd 真空処理方法及び装置
JPH10158815A (ja) * 1996-11-29 1998-06-16 Nissin Electric Co Ltd 静電チャック用被保持物配置部材及びその製造方法並びに静電チャック

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63283037A (ja) * 1987-05-14 1988-11-18 Fujitsu Ltd 静電吸着装置
JPS6417792U (enrdf_load_stackoverflow) * 1987-07-23 1989-01-30
JPH0227748A (ja) * 1988-07-16 1990-01-30 Tomoegawa Paper Co Ltd 静電チャック装置及びその作成方法
JPH02214533A (ja) * 1989-02-15 1990-08-27 Hitachi Ltd 真空処理方法及び装置
JPH10158815A (ja) * 1996-11-29 1998-06-16 Nissin Electric Co Ltd 静電チャック用被保持物配置部材及びその製造方法並びに静電チャック

Also Published As

Publication number Publication date
JPH0263307B2 (enrdf_load_stackoverflow) 1990-12-27

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Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees