JPS62262648A - 永久磁石形サ−フエイスパルスモ−タ - Google Patents

永久磁石形サ−フエイスパルスモ−タ

Info

Publication number
JPS62262648A
JPS62262648A JP10473586A JP10473586A JPS62262648A JP S62262648 A JPS62262648 A JP S62262648A JP 10473586 A JP10473586 A JP 10473586A JP 10473586 A JP10473586 A JP 10473586A JP S62262648 A JPS62262648 A JP S62262648A
Authority
JP
Japan
Prior art keywords
stator
phase
permanent magnet
electromagnets
electromagnet
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP10473586A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0546784B2 (enrdf_load_stackoverflow
Inventor
Nagahiko Nagasaka
長坂 長彦
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Yaskawa Electric Corp
Original Assignee
Yaskawa Electric Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Yaskawa Electric Manufacturing Co Ltd filed Critical Yaskawa Electric Manufacturing Co Ltd
Priority to JP10473586A priority Critical patent/JPS62262648A/ja
Publication of JPS62262648A publication Critical patent/JPS62262648A/ja
Publication of JPH0546784B2 publication Critical patent/JPH0546784B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Linear Motors (AREA)
JP10473586A 1986-05-09 1986-05-09 永久磁石形サ−フエイスパルスモ−タ Granted JPS62262648A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10473586A JPS62262648A (ja) 1986-05-09 1986-05-09 永久磁石形サ−フエイスパルスモ−タ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10473586A JPS62262648A (ja) 1986-05-09 1986-05-09 永久磁石形サ−フエイスパルスモ−タ

Publications (2)

Publication Number Publication Date
JPS62262648A true JPS62262648A (ja) 1987-11-14
JPH0546784B2 JPH0546784B2 (enrdf_load_stackoverflow) 1993-07-14

Family

ID=14388753

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10473586A Granted JPS62262648A (ja) 1986-05-09 1986-05-09 永久磁石形サ−フエイスパルスモ−タ

Country Status (1)

Country Link
JP (1) JPS62262648A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02168846A (ja) * 1988-12-19 1990-06-28 Shin Etsu Chem Co Ltd 直接駆動型サーフェイスアクチュエータ

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02168846A (ja) * 1988-12-19 1990-06-28 Shin Etsu Chem Co Ltd 直接駆動型サーフェイスアクチュエータ

Also Published As

Publication number Publication date
JPH0546784B2 (enrdf_load_stackoverflow) 1993-07-14

Similar Documents

Publication Publication Date Title
JP3945148B2 (ja) Xyテーブル及びxyzテーブル
EP0237639B1 (en) Permanent magnet type linear electromagnetic actuator
JP2003158866A (ja) フォーサ及び三相リニアモータシステム
KR100964538B1 (ko) 선형 전동기
US4835424A (en) Platen laminated in mutually perpendicular direction for use with linear motors and the like
JPS61229226A (ja) アクチユエ−タ
JPH07131966A (ja) 2次元リニアモータ
JPH09308218A (ja) リニアモータ及びこれを用いたステージ装置や露光装置
JPS62262648A (ja) 永久磁石形サ−フエイスパルスモ−タ
US7250696B2 (en) Linear motor and X-Y stage
JPS635984B2 (enrdf_load_stackoverflow)
JPS61164459A (ja) リニアモ−タ
JP2004056864A (ja) リニアモータ
US4833351A (en) Muliple axis actuator
JPH03207256A (ja) リニアサーボモータ
JP3941026B2 (ja) リニアモータ
JPH0732578B2 (ja) X−yリニヤモ−タ
JPS5943823Y2 (ja) リニアパルスモ−タ−
JPH0312058Y2 (enrdf_load_stackoverflow)
JPS6395848A (ja) 永久磁石形サ−フエイスパルスモ−タ
JPH1118405A (ja) リニアモータ
JPH01160349A (ja) リニアパルスモータ
JPH0811047Y2 (ja) パルスモータ
JP3064309B2 (ja) リニアモータ
JP2706171B2 (ja) ステージ装置

Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees