JPS62262245A - Magneto-optical recording medium - Google Patents
Magneto-optical recording mediumInfo
- Publication number
- JPS62262245A JPS62262245A JP10415586A JP10415586A JPS62262245A JP S62262245 A JPS62262245 A JP S62262245A JP 10415586 A JP10415586 A JP 10415586A JP 10415586 A JP10415586 A JP 10415586A JP S62262245 A JPS62262245 A JP S62262245A
- Authority
- JP
- Japan
- Prior art keywords
- recording medium
- magneto
- optical recording
- rare earth
- alloy
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 229910045601 alloy Inorganic materials 0.000 claims abstract description 16
- 239000000956 alloy Substances 0.000 claims abstract description 16
- 229910052761 rare earth metal Inorganic materials 0.000 claims abstract description 12
- 150000002910 rare earth metals Chemical class 0.000 claims abstract description 11
- 239000000758 substrate Substances 0.000 claims abstract description 9
- 229910052723 transition metal Inorganic materials 0.000 claims abstract description 6
- 150000003624 transition metals Chemical class 0.000 claims abstract description 5
- 229910052688 Gadolinium Inorganic materials 0.000 claims abstract description 4
- 229910052779 Neodymium Inorganic materials 0.000 claims abstract description 4
- 229910052772 Samarium Inorganic materials 0.000 claims abstract description 4
- 229910052771 Terbium Inorganic materials 0.000 claims abstract description 4
- 238000001816 cooling Methods 0.000 claims abstract description 4
- 229910052720 vanadium Inorganic materials 0.000 claims abstract description 4
- 229910052796 boron Inorganic materials 0.000 claims abstract 3
- 229910052742 iron Inorganic materials 0.000 claims abstract 3
- 229910052759 nickel Inorganic materials 0.000 claims abstract 3
- 229910052758 niobium Inorganic materials 0.000 claims abstract 3
- 229910052719 titanium Inorganic materials 0.000 claims abstract 3
- 229910052726 zirconium Inorganic materials 0.000 claims abstract 3
- 229910052684 Cerium Inorganic materials 0.000 claims abstract 2
- 229910052692 Dysprosium Inorganic materials 0.000 claims abstract 2
- 239000000203 mixture Substances 0.000 claims description 7
- 229910052777 Praseodymium Inorganic materials 0.000 claims 2
- 229910052750 molybdenum Inorganic materials 0.000 claims 2
- 238000004519 manufacturing process Methods 0.000 abstract description 8
- 239000007792 gaseous phase Substances 0.000 abstract 2
- 238000004544 sputter deposition Methods 0.000 description 10
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 9
- 239000001301 oxygen Substances 0.000 description 9
- 229910052760 oxygen Inorganic materials 0.000 description 9
- 230000000694 effects Effects 0.000 description 7
- 238000000034 method Methods 0.000 description 7
- 230000003287 optical effect Effects 0.000 description 6
- 238000005477 sputtering target Methods 0.000 description 6
- 239000002131 composite material Substances 0.000 description 5
- 238000002844 melting Methods 0.000 description 5
- 230000008018 melting Effects 0.000 description 5
- 238000010791 quenching Methods 0.000 description 5
- 230000000171 quenching effect Effects 0.000 description 5
- 239000012808 vapor phase Substances 0.000 description 5
- 238000010586 diagram Methods 0.000 description 4
- 229910052751 metal Inorganic materials 0.000 description 4
- 239000002184 metal Substances 0.000 description 4
- 238000005266 casting Methods 0.000 description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- 230000005374 Kerr effect Effects 0.000 description 2
- 238000005336 cracking Methods 0.000 description 2
- 239000013078 crystal Substances 0.000 description 2
- 238000002425 crystallisation Methods 0.000 description 2
- 230000008025 crystallization Effects 0.000 description 2
- 229910000765 intermetallic Inorganic materials 0.000 description 2
- 230000005415 magnetization Effects 0.000 description 2
- 150000002739 metals Chemical class 0.000 description 2
- 239000004575 stone Substances 0.000 description 2
- 230000001629 suppression Effects 0.000 description 2
- 238000007740 vapor deposition Methods 0.000 description 2
- 241000218691 Cupressaceae Species 0.000 description 1
- 101100508105 Rattus norvegicus Ide gene Proteins 0.000 description 1
- 229910000796 S alloy Inorganic materials 0.000 description 1
- 241000270666 Testudines Species 0.000 description 1
- 241001441724 Tetraodontidae Species 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- XTKDAFGWCDAMPY-UHFFFAOYSA-N azaperone Chemical compound C1=CC(F)=CC=C1C(=O)CCCN1CCN(C=2N=CC=CC=2)CC1 XTKDAFGWCDAMPY-UHFFFAOYSA-N 0.000 description 1
- 210000003323 beak Anatomy 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 230000000593 degrading effect Effects 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000000465 moulding Methods 0.000 description 1
- 150000004767 nitrides Chemical class 0.000 description 1
- 239000012071 phase Substances 0.000 description 1
- 229920000515 polycarbonate Polymers 0.000 description 1
- 239000004417 polycarbonate Substances 0.000 description 1
- 230000008929 regeneration Effects 0.000 description 1
- 238000011069 regeneration method Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000002893 slag Substances 0.000 description 1
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明は、例えばレーザー光等の照射により、記録・消
去・外生が可能な光磁気記録媒体に関するＯ
〔従来の技術〕
レーザー光のスポットで記録層を加熱しながら外部ｆｄ
界を加え、反転−区を形成することにより記録し、記録
時より低パワーの直１ｉｌｌ！偏光した上記レーザー光
のスポットを入射し、カー効果あるいはファラデー効果
を利用して再生を行なう、いわゆる光＆１ｘ記録方式Ｖ
Ｃ用いられる記録媒体においては、少なくとも次の性質
を満たすことが必要である０
１． 半導体レーザーで記録・消去を行なえる程嘴にキ
エリー温１ｆが低く、通常の使用環境温変に比べて、キ
エリ一温度が充分高いこと。[Detailed Description of the Invention] [Industrial Application Field] The present invention relates to a magneto-optical recording medium that can be recorded, erased, and recorded by, for example, irradiation with laser light. [Prior Art] Laser light spot external fd while heating the recording layer with
Recording is performed by adding a field and forming an inverted area, and direct 1ill with lower power than when recording! The so-called optical & 1x recording method V, in which a spot of the above-mentioned polarized laser beam is incident and reproduction is performed using the Kerr effect or Faraday effect.
C The recording medium used must satisfy at least the following properties0 1. The Chieri temperature 1f of the beak is low enough to allow recording and erasing with a semiconductor laser, and the Chieri temperature 1f is sufficiently high compared to the temperature change of the normal usage environment.
２ 記録媒体が、多結晶であると生ずる粒界ノイズ、単
結晶であると生ずる製造の困難さを回避するため、記録
媒体が非晶質であること。この場合、結晶化温實がキ為
す一温度に比べて充分高いことが必要である。2. The recording medium must be amorphous in order to avoid grain boundary noise that occurs when the recording medium is polycrystalline and manufacturing difficulties that occur when the recording medium is single crystal. In this case, it is necessary that the crystallization temperature is sufficiently higher than the crystallization temperature.
五 再生は、カー効果、ファフデー効果を利用するため
、上記の効果に起因するカー回転角、ファヲヂー回転角
が大きいこと。5. Since regeneration utilizes the Kerr effect and Fahday effect, the Kerr rotation angle and Fahday rotation angle caused by the above effects are large.
４、 垂直磁化膜であること、〕
そのため、従来からＴ ｂ Ｆ ｅ ＋ Ｔ ｂ Ｆ
ｅ Ｃｏ −Ｇ ｄ ＴｂＦｅＣｏなどの材料が上記の
性貿を満たすものとして光磁気記録媒体として用いられ
てきている。さらに１特開昭５９−１７８６４１のよう
に重希土類金属Ｔｂ、Ｇｄ、Ｄ）’１４８金属ＦｅＫ軽
希土類金属Ｓｍを添加することにより、記録特性を損な
うことなく、光再生特性を向上嘔せることを行なりてき
た。4. It is a perpendicular magnetization film.] Therefore, conventionally, T b Fe + T b F
Materials such as eCo-GdTbFeCo have been used as magneto-optical recording media as they meet the above requirements. Furthermore, as in JP-A-59-178641, by adding heavy rare earth metals Tb, Gd, D)'148 metal FeK and light rare earth metal Sm, the optical reproduction characteristics can be improved without impairing the recording characteristics. I've been doing it.
光磁気記録媒体は、非晶質であることが必要であるため
、作製法としてスパッタリング、蒸着などの気相急冷法
が利用されている。Since magneto-optical recording media must be amorphous, vapor phase rapid cooling methods such as sputtering and vapor deposition are used as a manufacturing method.
しかし、光磁気記録媒体として用いられる希土類−遷移
金属非晶質合金には、室温でのみかけ上の磁化が消失す
る補償組成付近で金属間化合物を作シやすく、これらの
金属間化合物が割れやすいという欠点がある。そのため
、スパッタリングによシ記録謀体をｆｆ、ｌｌｌする場
合には単一のターゲットから記録媒体を作製で含ないの
で、例えば、遷移金属ターゲット上にチップを置いた複
合ターゲット、または特開昭５９−２００７６２、特開
昭５９−２Ｑ８８１５のような埋め込み式複合ターゲッ
トあるいは、焼結ターゲットを用いなければならなかっ
た〇
希土類のスパッタ用ターゲットは通常、溶解、鋳造によ
る方法で作製されるが、この方法では、ターゲットに含
まれる酸素をα１恵盪パーセント以下に抑えることは困
雉である。焼結ターゲットでも事情は変わらない０その
丸め、スパッタリング用ターゲットあるいは蒸着源の持
つ酸素が記録媒体中に混入し、その磁気特性を落として
しまうという欠点を有する。However, rare earth-transition metal amorphous alloys used as magneto-optical recording media tend to form intermetallic compounds near the compensation composition where apparent magnetization disappears at room temperature, and these intermetallic compounds are prone to cracking. There is a drawback. Therefore, when sputtering is used to create a recording medium using sputtering, a recording medium is not produced from a single target, so for example, a composite target in which a chip is placed on a transition metal target, or JP-A-59 -200762, JP-A-59-2Q8815, an embedded composite target or a sintered target had to be used. Rare earth sputtering targets are usually manufactured by melting or casting, but this method Therefore, it is difficult to suppress the oxygen contained in the target to less than α1%. The same is true for sintered targets, which have the disadvantage that oxygen from the sputtering target or vapor deposition source mixes into the recording medium, degrading its magnetic properties.
本発明はこのような問題点を解決するもので、重希土類
金属、２４１ｆＳ金属のほか、軽希土類金属およびＴｉ
＊ＢｖＺｒ ｗＮｂ ＊Ｍｏ ＋Ｖ＊Ｗか・らなる合
金を（ヤ製し、気相急冷法で記録媒体を作製することに
より、従来のものに比べて高性能な光磁気記録媒体を機
供することにある。The present invention solves these problems, and in addition to heavy rare earth metals and 241fS metals, light rare earth metals and Ti
By manufacturing an alloy consisting of *BvZr wNb *Mo +V*W and using a vapor phase quenching method to produce a recording medium, we have created a magneto-optical recording medium with higher performance than conventional ones. be.
本発明の光磁気記録媒体は、基体上に形成され情報を光
により記録、Ｐ＋生できる記録媒体として、軽希土類金
ＪＡＳｍ＊ＮｄｔＰｒ＋Ｃｅ＊Ｅｕ のうち１種類以上
、重布土類金属Ｔｂ＝Ｄｙ＊Ｇｄのうち１種類以上、Ｎ
ｉ移金属Ｆｅ＋ＣｏｔＮｔのうち１種類以上およびＴｉ
ｔＢ＋ＺｒｔＮｂ＋Ｍｏ＋ＶｔＷのうち１種類以上の元
素から構成される合金を用い、気相急冷法により基体上
に形成することを特徴とする０
軽希土類金属ＳｍｔＮｄ 、ｃｏ＋Ｐｒｔａｕ のうち
１種類以上をＬＲ，重希土類金属Ｔ ｂ ｒ Ｄ ｙ
ｅ Ｇ ｄのうち１種類以上ｔＨＲ，ｍ移金属Ｆ ｅ
ｔ Ｃｏ ｔＮＬのうち１種類以上ｔＴＭとし、さらに
ＴｔｓＢ＊Ｚｒ＋Ｎｂ＊ＭｏｔＶｔＷのうち一棟類以上
をＡと表わし、組成式を
（ＬＲｘＨＲ＊ −ｘ ） ｙ ＴＭ １−ｙ−ｚ Ａ
ｚとしたとき本発明では、ｘ、ｙｔｚは（α１≦Ｘ≦
α４、α２ ＜、 ｙ≦（Ｌ５ 、Ｏ＜Ｚ≦１１である
ｏＸはより好ましくは、α１５≦Ｘ≦α５５、液も好ま
しくはα２≦Ｘ≦（Ｌ３でおる。またｙはより好ましく
はα２≦Ｘ≦（Ｌ３としたとき本発明では、Ｘ ｅ ３
’ ｍ Ｚはα１≦Ｘ≦α４．α２＜７≦１５゜０＜ｚ
＜（１１である。Ｘはより好ましくは、α１５≦Ｘ≦（
Ｌ３５、最も好ましくは［α２≦Ｘ≦α３でめる◎また
ｙはより好ましくはα２≦ｙ≦α４、最も好ましくは、
α２≦ｙ≦１１３５でおる。・また２はより好ましくは
、α０２≦２≦α１、最も好ましくは、α０３くｚ≦α
０８である。またＬＲとして好ましくは、Ｓｒｎあるい
はＮｄであり、最も好ましくはＳｍとＮｄの混合物であ
る。The magneto-optical recording medium of the present invention is a recording medium formed on a substrate and capable of optically recording information and generating P+.The magneto-optical recording medium of the present invention is a recording medium that is formed on a substrate and can record information using light and generate P+. One or more types of Gd, N
i One or more of the transfer metals Fe+CotNt and Ti
It is characterized in that it is formed on a substrate by a vapor phase quenching method using an alloy composed of one or more elements of tB+ZrtNb+Mo+VtW. b r D y
One or more of e G d tHR, m transfer metal F e
One or more types of tCo tNL are tTM, and one or more of TtsB*Zr+Nb*MotVtW is expressed as A, and the composition formula is (LRxHR* -x) y TM 1-y-z A
In the present invention, x and ytz are (α1≦X≦
α4, α2<, y≦(L5, O<Z≦11, oX is more preferably α15≦X≦α55, liquid is also preferably α2≦X≦(L3, and y is more preferably α2≦ When X≦(L3, in the present invention, X e 3
' m Z is α1≦X≦α4. α2<7≦15゜0<z
<(11. X is more preferably α15≦X≦(
L35, most preferably [α2≦X≦α3◎, and y is more preferably α2≦y≦α4, most preferably,
α2≦y≦1135. - 2 is more preferably α02≦2≦α1, most preferably α03x≦α
It is 08. Furthermore, LR is preferably Srn or Nd, and most preferably a mixture of Sm and Nd.
〔実、権例１〕 実施例により、本発明の効果について述べる。[Actually, Law 1] The effects of the present invention will be described with reference to Examples.
本実施例１および実施例２，３．４で示す本発明の光磁
気記録媒体はすべて、低周波溶解炉で溶解した合金を鋳
造、成形したものをスパッタリング用ターゲットとし、
スパッタリングで基体上に形成した。In all of the magneto-optical recording media of the present invention shown in Example 1, Examples 2, and 3.4, sputtering targets are cast and formed alloys melted in a low-frequency melting furnace.
It was formed on the substrate by sputtering.
本発明による光磁気記録媒体を作製する目的で作った合
金ターゲット中の酸素の重量比をパーセントで示したも
のが表１である。これらの合金ターゲットは、実施例１
で述べたように低周波溶解炉で溶解した合金を鋳造・成
形したものを合金ターゲットとした。Table 1 shows the weight ratio of oxygen in the alloy target prepared for the purpose of producing the magneto-optical recording medium according to the present invention, expressed as a percentage. These alloy targets were prepared in Example 1.
As mentioned above, the alloy target was made by casting and molding the alloy melted in a low-frequency melting furnace.
表 １
複合ターゲットでスパッタリングにより記録媒体を作製
する場合、希土類だけからなる単体のターゲットおるい
はチップを使わざるを得なかりた。Table 1 When producing a recording medium by sputtering using a composite target, it was necessary to use a single target or chip made only of rare earth elements.
通常これら冷土類中の＋Ｒ素を（Ｌ１１ｉｉｉ％以下に
抑えることは困難である。従って、これらを用いて気相
急冷法で作る限り、作製された膜中の酸素墓を極端に減
らすことは不可能であった〇希土類と遷移金属にＴ ｉ
ｅ Ｚ ｒ ｔ−添加したため等軸ルが生じゃすくなシ
割れにくくなりた。そのため鋳造によるスパッタリング
用合金ターゲットが作製できた。なお、合金の作シやす
さはＴｉ５ＢｔＺｒ＋Ｎｂ＋Ｍｏ ｌｖｌｗどれでもほ
ぼ同じであった゛ が、Ｔｉを必ず含むようにし２種
類以上これらの元素を入れるとさらに作９やすい。なお
、合金を溶解後、低周波溶解炉中にはスラグが残ってお
り、特に希土類中に多い酸素はスフグ中に取シ残された
と考えられる。Normally, it is difficult to suppress the +R element in these cold earths to less than (L11iii%).Therefore, as long as these are used to make the film by the vapor phase quenching method, it is not possible to drastically reduce the oxygen graves in the film. It was impossible to apply Ti to rare earths and transition metals.
Due to the addition of e Z r t-, the equiaxed rubber became less prone to cracking. Therefore, we were able to fabricate an alloy target for sputtering by casting. The ease of fabrication of the alloy was almost the same for Ti5BtZr+Nb+Molvlw, but it is even easier to fabricate if Ti is always included and two or more of these elements are added. Note that after melting the alloy, slag remained in the low frequency melting furnace, and it is thought that oxygen, which is particularly abundant in rare earths, was left behind in the pufferfish.
本発明によれば、スパッタリング用ターゲットの酸素濃
質を低く抑えることができ、従って記録媒体中の酸素濃
質を低く抑えることができる。According to the present invention, the oxygen concentration in the sputtering target can be kept low, and therefore the oxygen concentration in the recording medium can be kept low.
〔実施例２〕
実施例１で述べたような方法で、（ＮｄａｚｓＤ）’ａ
ｙｓ）ｘ（ＦｅａｉｉＣｏａ４ｓ）ａｓｓ−ｚＴｉａｏ
ｓ合金ターゲットを３Ｊｌｌ類用意し、スパッタリング
により光（ａ！Ａ記録媒体を作製し九。あらかじめＩ
Ｘ １０−’ Ｔｏｒｒ以下に排気した與空檜中でアル
ゴン分圧１ｍＴｏｒｒのもとで、直流スパッタリングを
行ない、光ｒＪｉ１気記録線記録媒体した。スパッタリ
ングによシ形成された記録媒体の厚さは〆１ａａｏＡで
めった。[Example 2] By the method described in Example 1, (NdazsD)'a
ys)x(FaiiCoa4s)ass-zTiao
Prepare 3Jll of S alloy targets, and prepare an optical (a!A recording medium) by sputtering.
Direct current sputtering was carried out under an argon partial pressure of 1 mTorr in an open-air cypress evacuated to a temperature below X 10 -' Torr to produce an optical recording medium. The thickness of the recording medium formed by sputtering was determined by 1aaoA.
本発明の光６ｉ１気記録媒体の組成とファラデー回転角
および保磁力の関係を第１図に示す。また、従来のよう
に、複合ターゲットを用いる方式で作製した記録媒体の
組成とファラデー回転角および保磁力の関係を第２図に
示す。本発明によれば、保磁力の大きい領域でファラデ
ー回転角を大きくすることができる。FIG. 1 shows the relationship between the composition, Faraday rotation angle, and coercive force of the optical recording medium of the present invention. Further, FIG. 2 shows the relationship between the composition, Faraday rotation angle, and coercive force of a recording medium manufactured by a conventional method using a composite target. According to the present invention, the Faraday rotation angle can be increased in a region where the coercive force is large.
このような特性の向上が、実施例１に述べた酸素濃度の
低下によるものかどうかは不明である力ζ合金ターゲッ
トによるスパッタリングで作製した記録媒体は複合ター
ゲットによるものより本質的に良い特性を持つといえる
。It is unclear whether this improvement in properties is due to the decrease in oxygen concentration mentioned in Example 1.Recording media fabricated by sputtering using a ζ alloy target have inherently better properties than those using a composite target. It can be said.
〔実施例３〕
本発明の光磁気記録媒体の記談・再生特性を調べるため
に、淘付きポリカーボネイト基体上に約１００ＯＡ窒化
アｐミニウムを形成し、その上に本発明の光磁気記録媒
体を約４５０大形成し、さらにその上に鼠化アルミニウ
ムを約１０００Ｘ形成した。再生信号は光磁気記録媒体
の透過光から得、次のような条件で記録・再生を行なっ
た。[Example 3] In order to investigate the recording/reproduction characteristics of the magneto-optical recording medium of the present invention, about 100 OA apminium nitride was formed on a polycarbonate substrate with a filter, and the magneto-optical recording medium of the present invention was formed on it. A layer of about 450× was formed, and aluminum ratide was further formed on it to a size of about 1,000×. The reproduction signal was obtained from the light transmitted through the magneto-optical recording medium, and recording and reproduction were performed under the following conditions.
溝間記録、再生パワー１ ｍ Ｗ ＋記録磁界６０００
ｅ、＠速毎秒４．７ ｍ ＊記録周波ｆｌ Ｉ Ｍ Ｈ
ｚ ｒ帯械３０ｋＨｚである。Recording between grooves, reproduction power 1 mW + recording magnetic field 6000
e, @speed 4.7 m/s *Recording frequency fl I MH
Zr band machine 30kHz.
第５図に本発明の光磁気記録媒体の再生時のＣ／Ｎ比お
よび２次高調波抑圧比と記録レーザーパワーとの関係を
示す。なお、記録媒体作成に用いたスパッタリング用タ
ーゲットは、実施例２の試料曽号２で示したものである
。記録媒体の組成はスパッタリング用ターゲットとほぼ
同じであった０
第４図に記録媒体を従来から最もよい光磁気記録媒体の
ひとつとされているＴｂａｚｏ（ＦｅａｓＣｏａｔ）ａ
ｓＫ変えたものについてＣ／Ｎ比および２次高調波抑圧
比を示す。FIG. 5 shows the relationship between the C/N ratio and the second harmonic suppression ratio during reproduction of the magneto-optical recording medium of the present invention and the recording laser power. The sputtering target used to create the recording medium was the one shown in Sample No. 2 of Example 2. The composition of the recording medium was almost the same as that of the sputtering target.
The C/N ratio and the second harmonic suppression ratio are shown for the case where sK is changed.
本発明の光１ｉｆｆ気記録媒体により、従来から良いと
されているＴｂＦｅＣｏに比べてＣ／Ｎ比をあげること
ができた。The optical recording medium of the present invention has a higher C/N ratio than TbFeCo, which is conventionally considered to be good.
以上述べてきたように本発明は、溶解・鋳造した合金が
等軸晶となることをゝ利用して、低酸素濃度の気相急冷
源を作製できるため従来のものに比べて高性能な光磁気
記録媒体を作製できるという効果を有する。。As described above, the present invention utilizes the fact that the melted and cast alloy becomes an equiaxed crystal to create a gas phase quenching source with a low oxygen concentration, which enables it to produce a high-performance light source compared to conventional ones. This has the effect that a magnetic recording medium can be manufactured. .
また、気相急冷法によシ量産を行なう際にも量産の効率
を上げることができるという効果も有する０In addition, it also has the effect of increasing the efficiency of mass production when mass production is performed using the vapor phase quenching method.
第１図・−・−・一本発明の（Ｎｄａ＊５Ｄ７ｔｙｓ）
ｘ （ＦｅａｔｓＣｏ偽１）ａｓｓ−ｚＴｉ亀ＯＳのＸ
とファフデー回転角と保磁力の関係を示す図。
第２図−ｍ−従来例の（ＮｄａｘｓＤ）’ａｙｓ）ｘ
（ＦｌａｇｓＣＯａａｓ）ａｓｓ−２ＴｉａｓｓのＸと
ファフデー回転角と保磁力の一係を示す図。
ｔＪＩＩｓ図−一・・・・本発明の（Ｎｄ＋ｕｓＤ）’
１ｔｓ）ｚ （ＦｅａｉｓＣｏａ４ｓ）ａｓｓ−２Ｔｉ
・・Ｓを用いた光磁気配Ｗ、媒体の記録パワーとＣ／Ｎ
比の関係を示す図。
第４図・−・−・−従来のＴｂａｔｏ （Ｆｅａ＠Ｃｏ
ａｘ）ａ＠ｏを用いた光磁気記録媒体の記録パワーとＣ
／Ｎ比の関ｆｌｋｔ−示す図。
以上（Ｎｄσ、２Ｅ Ｄ７０４！’）ｙｅ （Ｆｅ
ｏ、５ｒ ＣＯａ ｕｆ）ａｆｂｘ 石’ ａ、ｓｒ
甲の石
第 １ 図
０７Ｆフデ一回Ｓ月
ｘ４１Ｊ域力
（Ｎｅｌｏ、ｘ Ｄｙａｙｒ）；ｃ （Ｆｇ ｏｘ Ｃ
ｏ ａ、ｅａｒ）ａ、ｗ−ｘ−Ｔｉｏ、ｅｓ中のル
皓２図Figure 1 - - - - One of the present invention (Nda*5D7tys)
x (FeatsCo fake 1) ass-zTi turtle OS x
A diagram showing the relationship between Fahday rotation angle and coercive force. Figure 2-m-Conventional example (NdaxsD)'ays)x
(FlagsCOaas) A diagram showing the relationship between X, Fafday rotation angle, and coercive force of ass-2Tiass. tJIIs diagram-1...(Nd+usD)' of the present invention
1ts)z (FeaisCoa4s)ass-2Ti
...Magneto-optical distribution W using S, recording power and C/N of the medium
A diagram showing the relationship between ratios. Figure 4-----Conventional Tbato (Fea@Co
ax) Recording power and C of magneto-optical recording medium using a@o
FIG.
or more (Ndσ, 2E D704!')ye (Fe
o, 5r COa uf) afbx stone' a, sr
Instep stone No. 1 Figure 07F Fude once S month x41J area power (Nelo,
o a, ear) a, w-x-Tio, es in Le Hao 2 diagram
Claims (1)
できる記録媒体として、軽希土類金属Ｓｍ、Ｎｄ、Ｐｒ
、Ｃｅのうち１種類以上、重希土類金属Ｔｂ、Ｄｙ、Ｇ
ｄ、Ｅｕのうち１種類以上、遷移金属Ｆｅ、Ｃｏ、Ｎｉ
のうち１種類以上およびＴｉ、Ｂ、Ｚｒ、Ｎｂ、Ｍｏ、
Ｖ、Ｗのうち１種類以上の元素から構成される光磁気記
録媒体において、組成式を｛（ＬＲ）＿ｘ（ＨＲ）＿１
＿−＿ｘ）＿ｙＴＭ＿１＿−＿ｙ＿−＿ｚＡ＿ｚと書き
あらわしたとき、 ０．１≦ｘ≦０．４ ０．２≦ｙ≦０．５ ０＜ｚ≦０．１ の範囲にある合金を用い、気相急冷法により基体上に形
成されることを特徴とする光磁気記録媒体。 （但し、ＬＲは軽希土類金属Ｓｍ、Ｎｄ、Ｃｅ、Ｐｒの
うち１種類以上、ＨＲは重希土類金属Ｔｂ、Ｄｙ、Ｇｄ
のうち１類以上、ＴＭは遷移金属Ｆｅ、Ｃｏ、Ｎｉのう
ち１種類以上、およびＡはＴｉ、Ｂ、Ｚｒ、Ｎｂ、Ｍｏ
、Ｖ、Ｗのうち１種類以上を示す。）[Claims] A recording medium formed on a substrate and capable of recording, erasing, and reproducing information with light is made of light rare earth metals Sm, Nd, and Pr.
, one or more of Ce, heavy rare earth metals Tb, Dy, G
d, one or more of Eu, transition metals Fe, Co, Ni
One or more of the following and Ti, B, Zr, Nb, Mo,
In a magneto-optical recording medium composed of one or more elements among V and W, the composition formula is {(LR)_x(HR)_1
_-_x)_yTM_1_-_y_-_zA_z, using an alloy in the range of 0.1≦x≦0.4 0.2≦y≦0.5 0<z≦0.1, A magneto-optical recording medium characterized in that it is formed on a substrate by a rapid cooling method. (However, LR is one or more of the light rare earth metals Sm, Nd, Ce, Pr, and HR is the heavy rare earth metal Tb, Dy, Gd.
TM is one or more of the transition metals Fe, Co, and Ni, and A is Ti, B, Zr, Nb, and Mo.
, V, and W. )
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10415586A JPS62262245A (en) | 1986-05-07 | 1986-05-07 | Magneto-optical recording medium |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10415586A JPS62262245A (en) | 1986-05-07 | 1986-05-07 | Magneto-optical recording medium |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62262245A true JPS62262245A (en) | 1987-11-14 |
Family
ID=14373172
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10415586A Pending JPS62262245A (en) | 1986-05-07 | 1986-05-07 | Magneto-optical recording medium |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62262245A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63140058A (en) * | 1986-12-03 | 1988-06-11 | Hitachi Ltd | Magneto-optical recording material |
| EP0770996A3 (en) * | 1995-10-28 | 1998-01-28 | Samsung Electronics Co., Ltd. | Amorphous alloy of light rare earth-transition metal and semi-metal, magneto-optical recording layer and magneto-optical disk adopting the layer |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6115308A (en) * | 1984-07-02 | 1986-01-23 | Hitachi Ltd | Photomagnetic recording material |
| JPS6152841A (en) * | 1984-08-24 | 1986-03-15 | 松下電器産業株式会社 | Electric cleaner |
| JPS62214537A (en) * | 1986-03-14 | 1987-09-21 | Seiko Epson Corp | Photomagnetic recording medium |
| JPS62226450A (en) * | 1986-03-27 | 1987-10-05 | Seiko Epson Corp | Photomagnetic recording medium |
-
1986
- 1986-05-07 JP JP10415586A patent/JPS62262245A/en active Pending
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6115308A (en) * | 1984-07-02 | 1986-01-23 | Hitachi Ltd | Photomagnetic recording material |
| JPS6152841A (en) * | 1984-08-24 | 1986-03-15 | 松下電器産業株式会社 | Electric cleaner |
| JPS62214537A (en) * | 1986-03-14 | 1987-09-21 | Seiko Epson Corp | Photomagnetic recording medium |
| JPS62226450A (en) * | 1986-03-27 | 1987-10-05 | Seiko Epson Corp | Photomagnetic recording medium |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63140058A (en) * | 1986-12-03 | 1988-06-11 | Hitachi Ltd | Magneto-optical recording material |
| EP0770996A3 (en) * | 1995-10-28 | 1998-01-28 | Samsung Electronics Co., Ltd. | Amorphous alloy of light rare earth-transition metal and semi-metal, magneto-optical recording layer and magneto-optical disk adopting the layer |
| US6331338B1 (en) | 1995-10-28 | 2001-12-18 | Samsung Electronics Co., Ltd. | Amorphous alloy of light rare earth-transition metal and semi-metal, magneto-optical recording layer made of the alloy, and magneto-optical disk adopting the layer |
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