JPS63316340A - Magneto-optical recording medium - Google Patents
Magneto-optical recording mediumInfo
- Publication number
- JPS63316340A JPS63316340A JP15202087A JP15202087A JPS63316340A JP S63316340 A JPS63316340 A JP S63316340A JP 15202087 A JP15202087 A JP 15202087A JP 15202087 A JP15202087 A JP 15202087A JP S63316340 A JPS63316340 A JP S63316340A
- Authority
- JP
- Japan
- Prior art keywords
- recording medium
- magneto
- optical recording
- target
- alloy
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 229910045601 alloy Inorganic materials 0.000 claims abstract description 27
- 239000000956 alloy Substances 0.000 claims abstract description 27
- 229910052761 rare earth metal Inorganic materials 0.000 claims abstract description 12
- 150000002910 rare earth metals Chemical class 0.000 claims abstract description 12
- 229910052723 transition metal Inorganic materials 0.000 claims abstract description 9
- 150000003624 transition metals Chemical class 0.000 claims abstract description 6
- 229910052692 Dysprosium Inorganic materials 0.000 claims abstract description 5
- 229910052688 Gadolinium Inorganic materials 0.000 claims abstract description 5
- 229910052771 Terbium Inorganic materials 0.000 claims abstract description 3
- 229910052742 iron Inorganic materials 0.000 claims abstract description 3
- 229910052779 Neodymium Inorganic materials 0.000 claims abstract 3
- 229910052777 Praseodymium Inorganic materials 0.000 claims abstract 3
- 229910052772 Samarium Inorganic materials 0.000 claims abstract 3
- 229910052759 nickel Inorganic materials 0.000 claims abstract 2
- 238000004544 sputter deposition Methods 0.000 claims description 15
- 239000000203 mixture Substances 0.000 claims description 11
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 9
- 229910052760 oxygen Inorganic materials 0.000 claims description 9
- 239000001301 oxygen Substances 0.000 claims description 9
- 229910052751 metal Inorganic materials 0.000 claims description 2
- 239000002184 metal Substances 0.000 claims description 2
- 238000005477 sputtering target Methods 0.000 abstract description 10
- 238000005275 alloying Methods 0.000 abstract description 3
- 238000005266 casting Methods 0.000 description 9
- 238000004519 manufacturing process Methods 0.000 description 9
- 238000000034 method Methods 0.000 description 7
- 230000008018 melting Effects 0.000 description 6
- 238000002844 melting Methods 0.000 description 6
- 239000012535 impurity Substances 0.000 description 5
- 238000005245 sintering Methods 0.000 description 5
- 238000010586 diagram Methods 0.000 description 4
- 230000000694 effects Effects 0.000 description 4
- 230000005291 magnetic effect Effects 0.000 description 4
- 239000000758 substrate Substances 0.000 description 4
- 238000011156 evaluation Methods 0.000 description 3
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 3
- 239000010931 gold Substances 0.000 description 3
- 229910052737 gold Inorganic materials 0.000 description 3
- 239000010410 layer Substances 0.000 description 3
- 229920000515 polycarbonate Polymers 0.000 description 3
- 239000004417 polycarbonate Substances 0.000 description 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- 230000005374 Kerr effect Effects 0.000 description 2
- 229910052581 Si3N4 Inorganic materials 0.000 description 2
- 230000001133 acceleration Effects 0.000 description 2
- PMHQVHHXPFUNSP-UHFFFAOYSA-M copper(1+);methylsulfanylmethane;bromide Chemical compound Br[Cu].CSC PMHQVHHXPFUNSP-UHFFFAOYSA-M 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 239000011241 protective layer Substances 0.000 description 2
- 238000010298 pulverizing process Methods 0.000 description 2
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 229910000846 In alloy Inorganic materials 0.000 description 1
- 229910000979 O alloy Inorganic materials 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910000808 amorphous metal alloy Inorganic materials 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 238000002425 crystallisation Methods 0.000 description 1
- 230000008025 crystallization Effects 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 238000000227 grinding Methods 0.000 description 1
- XEEYBQQBJWHFJM-UHFFFAOYSA-N iron Substances [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 230000005381 magnetic domain Effects 0.000 description 1
- 230000005415 magnetization Effects 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 238000000465 moulding Methods 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 229920006289 polycarbonate film Polymers 0.000 description 1
- 230000001172 regenerating effect Effects 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000002893 slag Substances 0.000 description 1
- 230000001629 suppression Effects 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
- 230000007704 transition Effects 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
- 239000012808 vapor phase Substances 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
- Thin Magnetic Films (AREA)
Abstract
Description
【発明の詳細な説明】
（！梁上の利用分野〕
本発明は、例えばレーザー光等、の照射による加熱によ
り、記録・再生−消去が可能な光磁気記録媒体に関する
。DETAILED DESCRIPTION OF THE INVENTION (!Field of Application on Beams) The present invention relates to a magneto-optical recording medium that can be recorded, reproduced and erased by heating by irradiation with, for example, laser light.
。〔従来の技術〕
従来の光磁気記録媒体に右いて、記ｌｉ！媒体として例
えば、特開昭５７−９４９４８のように重希土類金１Ｉ
Ｔｂ、Ｄｙ、Ｇｄのうち一種類以上およびＰｅｔたはＣ
ｏのうち−ａｍ以上で形成された非晶質合金が用いられ
たきた。あるいは、特開昭５９−１７８６４１のように
重希土類金属−鉄系にＳｍを添加してキューツ一温度を
上げずにカー回転力を増大することが行われてきた。. [Prior Art] Regarding conventional magneto-optical recording media, As a medium, for example, heavy rare earth gold 1I is used as in JP-A-57-94948.
One or more of Tb, Dy, Gd and Pet or C
Amorphous alloys formed of -am or more of o have been used. Alternatively, as in JP-A-59-178641, Sm has been added to a heavy rare earth metal-iron system to increase the Kerr rotational force without increasing the temperature.
レーザー光のスポットで、記！！層を加熱しながら、外
部磁界を加え反転磁区を形成することにより記録を行い
、記録時より低パワーの直線偏光した上記レーザー光の
スポットを入射し、 カー効果あるいはフ７ラデイ効果
を利用して再生を行なう、いわゆる光磁気記録方式に用
いられる記録媒体においては、少なくとも次の性質を満
たすことが必要である。Record with a laser light spot! ! Recording is performed by applying an external magnetic field while heating the layer to form reversed magnetic domains, and during recording, a spot of the above-mentioned linearly polarized laser beam with a lower power is incident, and the Kerr effect or Fraday effect is utilized. A recording medium used for so-called magneto-optical recording for reproduction must satisfy at least the following properties.
１、半導体レーザーで記録・再生・消去を行える程度に
キュリ一温度が低く、通常の使用環境での温度に比べて
、キュリ一温度が充分高いこと。1. The Curie temperature is low enough to allow recording, playback, and erasing with a semiconductor laser, and the Curie temperature is sufficiently high compared to the temperature in the normal usage environment.
２、記録媒体が多結晶であると生ずる粒界ノイズ、単結
晶であると生ずる製造上の困難さを回連するため、記録
媒体が非常に非晶質であること。2. The recording medium is highly amorphous, since this results in grain boundary noise that occurs when the recording medium is polycrystalline, and manufacturing difficulties that occur when the recording medium is single crystal.
この場合、結晶化温度がキュリ一温度に比べて充分高い
ことが必要である。In this case, it is necessary that the crystallization temperature is sufficiently higher than the Curie temperature.
３、再生は、媒体のカー効果またはフ１ラデイ効果を利
用するため、上記の効果に起因するカー回転角またはフ
ッラブイ回転角が大きいこと。3. Since reproduction utilizes the Kerr effect or Flurry effect of the medium, the Kerr rotation angle or Flurry rotation angle caused by the above-mentioned effects is large.
４、記録密度を上げるため垂直磁化膜であること。4. Must be a perpendicular magnetization film to increase recording density.
そのため上記のような重希土類−遷移金属非晶質合金が
記録媒体として用いられてきた。Therefore, heavy rare earth-transition metal amorphous alloys as described above have been used as recording media.
光磁気記録媒体は、非晶質であることが必要であるため
、作製法としてはスパッタリング、蒸着などの気相急冷
法が利用されている。しかし、光磁気記録媒体として用
いられる重希土類−遷移金属非晶質合金とほぼ同組成の
合金を溶解、鋳造により作製することは、これらの合金
が割れ易いため困難である。そのため、スパッタリング
により光磁気記録媒体を作製する場合には単一のターゲ
ットから配録媒体を作製できないので、例えば、遷移金
属ターゲット上に希土類金属などのチップを置いは複合
ターゲット、または特開昭５９−２００７６２、特開昭
５９−２０８８１５のような埋め込み式ターゲットを用
いなければならなかった。重希土類−遷移金属合金のス
パッタリング用ターゲットは通常、溶解・鋳造により得
た塊を粉砕したのち焼結することによっても得られるこ
とが知られているが、この方法ではターゲット中に含ま
れる酸素や炭素などの不純物の温度を０．１重量％以下
に抑えることは困難である。 そのため、スパッタリン
グ用ターゲットあるいは蒸発源のもつ不純物が光磁気記
録媒体に混入し、その磁気特性をその本来のものより低
下させてしまうという欠点を育する。Since magneto-optical recording media must be amorphous, vapor phase rapid cooling methods such as sputtering and vapor deposition are used as manufacturing methods. However, it is difficult to produce alloys having substantially the same composition as the heavy rare earth-transition metal amorphous alloys used as magneto-optical recording media by melting and casting because these alloys are easily cracked. Therefore, when producing a magneto-optical recording medium by sputtering, it is not possible to produce a recording medium from a single target. -200762, JP-A-59-208815 had to be used. It is known that sputtering targets for heavy rare earth-transition metal alloys can also be obtained by pulverizing and sintering a lump obtained by melting and casting, but this method eliminates the oxygen and It is difficult to suppress the temperature of impurities such as carbon to 0.1% by weight or less. As a result, impurities from the sputtering target or evaporation source mix into the magneto-optical recording medium, resulting in a disadvantage that the magnetic properties thereof become lower than their original properties.
また、他の製造方法として、希土類金属と遷移金属とを
各々異なるカソードでスパッタする多元スパッタ法も行
なわれている。しかしこの方法では、均一な組成の膜を
再現性良く作製することが困難である。一方、希土類金
属と遷移金属からなる光磁気記録媒体においては、その
特性が組成に対して非常に敏感なので、この方法では、
ｆｆｉ産はほとんど不可能である。Furthermore, as another manufacturing method, a multi-source sputtering method is also used in which rare earth metals and transition metals are sputtered using different cathodes. However, with this method, it is difficult to produce a film with a uniform composition with good reproducibility. On the other hand, since the properties of magneto-optical recording media made of rare earth metals and transition metals are very sensitive to the composition, this method
ffi production is almost impossible.
製造上の問題以外にも記録特性の問題がある。In addition to manufacturing problems, there are problems with recording characteristics.
公知のように（第１０回応用磁気学会学術講演概要集
１９８８．１１ １３５頁）スパッタリング用ターゲッ
トの酸素濃度が多いときにはそのターゲットから作られ
た光磁気記録媒体の特性はそうでないターゲットから作
られたものに比べて劣ってしまう。As is known (Summary of the 10th Academic Conference of Japan Society of Applied Magnetics)
(November 1988, p. 135) When a sputtering target has a high oxygen concentration, the characteristics of a magneto-optical recording medium made from that target are inferior to those made from a target other than that.
本発明はこのような問題点を解決するもので、重希土類
金属、遷移金属のほか、軽希土類金属のうち一種類以上
からなる合金を用いることにより、従来のものよに比べ
て高性能な光磁気記録媒体を提供することにある。The present invention solves these problems by using an alloy consisting of one or more of heavy rare earth metals, transition metals, and light rare earth metals, thereby achieving higher performance optical performance than conventional ones. The purpose of this invention is to provide a magnetic recording medium.
本発明の光磁気記録媒体は、 軽希土類金ＷＡＳｍ、Ｎ
ｄ１Ｐｒ一種類以上（以下ＬＲと呼ぶ。）ｆｆｉ伶土類
金属、Ｔｂｓ Ｄｙ、Ｇｄ （以下ＨＲと呼ぶ、）−Ｍ
類以上、遷移金ｒ１４Ｆｅｓ Ｃｏｓ Ｎｉのうち一種
類以上 （以下ＴＭと呼ぶ）から構成され、組成式を
ＬＲｘＨＲｙＴＭｌ−ｘ−ｙ
としたとき、本発明はにおいては、
０．０＜ｘ＜０．３
０．０５＜ｙ＜Ｑ、ＩＱ
であり、上記組成からなる合金塊をスパッタリングやタ
ーゲットとして用い、上記組成の光磁気記録媒体を作製
する。Ｘはより好ましくは、０．０２＜ｘ＜０．１、最
も好ましくは０．０３＜ｘ＜０．０８である。またｙは
より好ましくは、０、１５＜ｙ＜０．２０、最も好まし
くは、０．１５＜ｙ＜０．１８である。The magneto-optical recording medium of the present invention comprises light rare earth gold WASm, N
d1Pr one or more types (hereinafter referred to as LR)ffi earth metals, Tbs Dy, Gd (hereinafter referred to as HR)-M
The present invention is composed of one or more types of transition gold r14Fes Cos Ni (hereinafter referred to as TM), and the compositional formula is LRxHRyTMl-x-y, and the present invention satisfies the following conditions: 0.0<x<0.3 0.05<y<Q, IQ, and an alloy ingot having the above composition is used for sputtering or as a target to produce a magneto-optical recording medium having the above composition. X is more preferably 0.02<x<0.1, most preferably 0.03<x<0.08. Moreover, y is more preferably 0, 15<y<0.20, most preferably 0.15<y<0.18.
本発明の光磁気記録媒体の最も大きな特徴はその製造法
にある。鋳造法により作製されたスパッタリング用ター
ゲットを用いて、 スパッタリング法で基板上に非晶質
合金を付着することにより記録媒体を作ることを目的と
して鋭意研究した結果、次のような全く新しい知見に基
づく光磁気記録媒体の組成を発見した。本発明の光磁気
記録媒体は、以下に述べる工程により作られる。まず、
ＬＲ％ＨＲ，およびＴＭのうち一種類以上の元素を溶解
・鋳造により所望のターゲットの大きさより大きな合金
塊をつくり貼り合わせ、ターゲットとする。この工程に
おいて従来のように合金塊を粉砕・焼結することな（ス
パッタリング・ターゲットを作製できる合金組成を進ん
だところに本発明の特長がある。この際合金ターゲット
を作るためには、従来から用いられてきたＨ Ｒ％ＴＭ
のほかＬＲのうち−ｉｉｎ以上の元素が不可欠でありこ
れらの元素の添加により溶解ｅ鋳造時の鋳型の温度制御
が不要となり生産効果の向上及び歩留りの向上をはかる
ことができる。これらなしではすでに述べたように、鋳
型の温度制御を行なったとしても鋳造した合金が割れて
しまうためスパッタリング用合金ターゲットを作製する
ことは不可能であった。このようにして、作られた合金
ターゲットを用いてスパッタリング法により光磁気記録
媒体を作製する。The most significant feature of the magneto-optical recording medium of the present invention is its manufacturing method. As a result of intensive research aimed at creating a recording medium by depositing an amorphous alloy onto a substrate using a sputtering method using a sputtering target made by a casting method, we have discovered the following completely new findings. Discovered the composition of magneto-optical recording media. The magneto-optical recording medium of the present invention is produced by the steps described below. first,
One or more elements among LR%HR and TM are melted and cast to create an alloy ingot larger than the desired target size and bonded together to form a target. The feature of the present invention is that the alloy composition has been developed so that a sputtering target can be produced without pulverizing and sintering the alloy ingot as in the past in this process. H R%TM that has been used
In addition, elements of −iin or higher in LR are essential, and by adding these elements, it becomes unnecessary to control the temperature of the mold during melting and e-casting, and it is possible to improve production efficiency and yield. Without these, as already mentioned, it would be impossible to produce an alloy target for sputtering because the cast alloy would crack even if the temperature of the mold was controlled. A magneto-optical recording medium is produced by sputtering using the alloy target thus produced.
溶解・鋳造により作製とれた合金においては溶解時に溶
解炉中で起こる反応により酸素や窒素などの不純物がス
ラグとして鋳造物の外に出されてしまうため、低酸素な
合金が得られる。このようにして得た合金塊を研削する
だけでスパッタリング・ターゲットをすることが実現で
きた。In alloys produced by melting and casting, impurities such as oxygen and nitrogen are expelled from the casting as slag due to reactions that occur in the melting furnace during melting, resulting in a low-oxygen alloy. It was possible to create a sputtering target by simply grinding the alloy ingot thus obtained.
鋳造法によって作った、不純物濃度が非常に低レベルの
スパッタリング合金用ターゲットを用いると、従来の光
磁気記録媒体においては不可欠であったＴｂを含まない
光磁気記録媒体も量産できるようになるという知見も得
られた。このことにより単一のターゲットであるために
生ずる製造コストの低下のほかにも必要に応じて高価な
Ｔｂを使用せずに光磁気記録媒体を製造できるため材料
コストを下げることができた。不純物の少ない合金ター
ゲットによれば、Ｔｂを用いた場合、従来のＴｂを含む
光磁気記録媒体よりも高性能のものが得られることはい
うで亥ない。Knowledge that by using a sputtering alloy target with an extremely low impurity concentration made by casting, it will be possible to mass produce magneto-optical recording media that do not contain Tb, which is essential in conventional magneto-optical recording media. was also obtained. This not only reduces manufacturing costs due to the use of a single target, but also reduces material costs because magneto-optical recording media can be manufactured as needed without using expensive Tb. It goes without saying that an alloy target with fewer impurities can provide higher performance than conventional magneto-optical recording media containing Tb when Tb is used.
（実施例１）
本実施例で述べる試料はすべてスパッタリングにより作
製され、その際に用いたターゲットは鋳造により作られ
た合金塊である。このようにした得られた合金ターゲッ
トの対応表および酸素温度を分析した結果をそれぞれ表
１．２に示す。(Example 1) All the samples described in this example were produced by sputtering, and the target used at that time was an alloy ingot produced by casting. Table 1.2 shows the correspondence table of the alloy targets thus obtained and the results of oxygen temperature analysis.
表１
表２
このように本発明の光磁気記録媒体においては焼結法に
よらｔともターゲットを作ることができるため上記のよ
うに低酸素濃度の合金塊が得られた。通常、焼結法によ
ってできたターゲットの酸素濃度は０．１ｆｆｉ量パー
セントを下回ることはない。Table 1 Table 2 As described above, in the magneto-optical recording medium of the present invention, the target can be made with a sintering method, so that an alloy ingot with a low oxygen concentration was obtained as described above. Typically, the oxygen concentration in targets produced by sintering processes will not fall below 0.1 ffi mass percent.
（実施例２）
鋳造により得られた合金塊を成型して得たターゲットを
用いてスパッタリングを行なう際のスパッタリング装置
内の構成を第１図に示す。ターゲットの合金化により、
１つのターゲットからスパッタすることが可能となり光
磁気配０媒体をスパッタリングによって量産する際の効
率を上げることが可能となった。(Example 2) FIG. 1 shows the internal configuration of a sputtering apparatus when sputtering is performed using a target obtained by molding an alloy ingot obtained by casting. By alloying the target,
It has become possible to perform sputtering from one target, and it has become possible to increase the efficiency when mass producing magneto-optical distribution media by sputtering.
（実施例３）
表１に示した資料番号１．２．３．４の光磁気記録媒体
の記録特性の＃２録・再性特性を調べるために、溝付き
ポリカーボネイトの上に設けられた窒化アルミニウムの
保護層を設けたものを接看剤を介してポリカーボネイト
に接着したものを、評価用ディスクとした。光磁気記録
媒体の構造を第２図に示す。 記録層及び保護層の膜厚
はそれぞれ１１００ｎである。結果を表３に示す。試料
番号２のＣ／Ｎ比と記録パワーとの関係を第３図に示す
。(Example 3) In order to investigate #2 recording and reproducing characteristics of the magneto-optical recording medium of document number 1.2.3.4 shown in Table 1, a nitrided polycarbonate film provided on a grooved polycarbonate was A disc for evaluation was prepared by adhering an aluminum protective layer to polycarbonate via a adhesive. The structure of the magneto-optical recording medium is shown in FIG. The recording layer and the protective layer each have a thickness of 1100 nm. The results are shown in Table 3. FIG. 3 shows the relationship between the C/N ratio and recording power for sample number 2.
表３
評価はディスク回転数９００ｒｐｍｓ記録ピット長１゜
７μｍ１分解能帯域３０ｋＨｚで行った。Table 3 Evaluation was performed at a disk rotation speed of 900 rpm, a recording pit length of 1°7 μm, and a resolution band of 30 kHz.
！＆適記録パワーは二次高周波抑圧比が最小となる記録
パワーから定めた。このようにＴｂを含む記Ｂ媒体はも
ちろん、そうでない記録媒体においても好ましい記録・
再生特性を有する。! & The appropriate recording power was determined from the recording power that minimized the secondary high frequency suppression ratio. In this way, not only recording media containing Tb, but also recording media other than those containing Tb are preferred.
Has regenerative properties.
（実施例４）
本発明の光磁気記録媒体と従来例のＴｂＦｅＣ０の光磁
気記録媒体をともに温度６０°Ｃ１相対湿度９０％の加
速条件下でのエラー・レイトの増加を時間の関数として
描いたものが、第４図である。ＴｂＦｅＣｏは焼結によ
って得られたスパッタリング・ターゲットを用いた。こ
のターゲットの酸素濃度は１．５重量％であった。この
実験で用いた光磁気記録媒体の構造は本発明、従来例と
もに実施例３と同様に第２図のようなものであった。(Example 4) The increase in error rate was plotted as a function of time for both the magneto-optical recording medium of the present invention and the conventional magneto-optical recording medium of TbFeC0 under acceleration conditions of a temperature of 60° C. and a relative humidity of 90%. This is shown in Figure 4. For TbFeCo, a sputtering target obtained by sintering was used. The oxygen concentration of this target was 1.5% by weight. The structure of the magneto-optical recording medium used in this experiment was as shown in FIG. 2 in both the present invention and the conventional example, as in Example 3.
第４図に示しはように本発明の如く酸素濃度の低いター
ゲットから作製した光磁気記録媒体においては長期信頼
性に優れる。As shown in FIG. 4, a magneto-optical recording medium manufactured from a target with a low oxygen concentration as in the present invention has excellent long-term reliability.
以上述べてきたように本発明によれば、スパッタリング
・ターゲットの合金化を達成できる。そのため、生産性
および記録媒体としての特性の両方を向上することがで
きる。As described above, according to the present invention, alloying of a sputtering target can be achieved. Therefore, both productivity and characteristics as a recording medium can be improved.
第１図は、本発明の光磁気記録媒体を製造するために用
いたスパッタリング装置を示す図。
１０１・・・合′金ターゲット
１０２・・・磁石
１０３・・・真空槽
１０４・・・基板ｉｉ＃Ｍ
１０５・・・基板
第２図は、Ｃ／Ｎ比評価及び加速試験に用いた光磁気記
録媒体の構造を示す図。
２０１・・・ポリカーボネイト基板
２０２・・・窒化アルミニウムと窒化珪素の混合物２０
３・・・記録層
２０４・・・窒化アルミニウムと窒化珪素の混合物第３
図は、本発明の光磁気記録媒体のＣ／Ｎ比と記録レーザ
ーパワーとの関係を示す図。
第４図は、温度６０°Ｃで相対湿度９０％にあける本発
明の光磁気記録媒体と従来例の光磁気記録媒体のエラー
・レイトと時間の関係を示す図。
４０１・・・従来例の光磁気記録媒体
４０２・・・本発明の光磁気記録媒体
以 上
出願人 セイコーエプソン株式会ｔｔ
代理人 弁理士 最 上 務 他１名第１図
第２図FIG. 1 is a diagram showing a sputtering apparatus used to manufacture the magneto-optical recording medium of the present invention. 101...Alloy target 102...Magnet 103...Vacuum chamber 104...Substrate ii#M 105...Substrate Figure 2 shows the magneto-optical device used for C/N ratio evaluation and acceleration test. FIG. 3 is a diagram showing the structure of a recording medium. 201... Polycarbonate substrate 202... Mixture of aluminum nitride and silicon nitride 20
3... Recording layer 204... Third mixture of aluminum nitride and silicon nitride
The figure is a diagram showing the relationship between the C/N ratio and the recording laser power of the magneto-optical recording medium of the present invention. FIG. 4 is a diagram showing the relationship between error rate and time of the magneto-optical recording medium of the present invention and the conventional magneto-optical recording medium at a temperature of 60° C. and a relative humidity of 90%. 401: Conventional magneto-optical recording medium 402: Magneto-optical recording medium of the present invention Applicant: Seiko Epson Corporation TT Agent: Patent attorney Tsutomu Mogami and 1 other person Figure 1 Figure 2
Claims (2)
ゲットによりスパッタリング法で作製される情報記録媒
体において、軽希土類金属Ｓｍ、Ｎｄ、Ｐｒのうち一種
類以上、重積土類金属Ｔｂ、Ｄｙ、Ｇｄのうち一種類以
上、遷移金属Ｆｅ、Ｃｏ、Ｎｉのうち一種類以上及びＴ
ｉ、Ｂのうち一種類以上からなる合金を用い、組成式を
、 （Ｓｍ、Ｎｄ、Ｐｒ）ｘ（Ｔｂ、Ｄｙ、Ｇｄ）ｙ（Ｆｅ
、Ｃｏ、Ｎｉ）１−ｘ−ｙ と表したとき、 ０．０＜ｘ＜０．３ ０．０５＜ｙ＜０．１８ の範囲にあることを特徴とする光磁気記録媒体。(1) In an information recording medium in which information can be recorded, reproduced, and erased by light and is manufactured by a sputtering method using a single target, one or more of light rare earth metals Sm, Nd, and Pr, heavy earth metal Tb, One or more of Dy and Gd, one or more of transition metals Fe, Co, and Ni, and T
Using an alloy consisting of one or more of i and B, the composition formula is (Sm, Nd, Pr) x (Tb, Dy, Gd) y (Fe
.
ることを特徴とする特許請求の範囲第１項記載の光磁気
記録媒体。(2) The magneto-optical recording medium according to claim 1, wherein the oxygen concentration of the target is less than 0.1% by weight.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15202087A JPS63316340A (en) | 1987-06-18 | 1987-06-18 | Magneto-optical recording medium |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15202087A JPS63316340A (en) | 1987-06-18 | 1987-06-18 | Magneto-optical recording medium |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63316340A true JPS63316340A (en) | 1988-12-23 |
Family
ID=15531304
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15202087A Pending JPS63316340A (en) | 1987-06-18 | 1987-06-18 | Magneto-optical recording medium |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63316340A (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02123542A (en) * | 1988-11-02 | 1990-05-11 | Fujitsu Ltd | Magneto-optical disk and its production |
| JPH03113852A (en) * | 1989-09-28 | 1991-05-15 | Sanyo Electric Co Ltd | Magneto-optical recording medium |
| WO1993010530A1 (en) * | 1991-11-22 | 1993-05-27 | Seiko Epson Corporation | Magnetooptical recording media |
| US5667887A (en) * | 1989-03-28 | 1997-09-16 | Seiko Epson Corporation | Magneto-optical media |
-
1987
- 1987-06-18 JP JP15202087A patent/JPS63316340A/en active Pending
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02123542A (en) * | 1988-11-02 | 1990-05-11 | Fujitsu Ltd | Magneto-optical disk and its production |
| US5667887A (en) * | 1989-03-28 | 1997-09-16 | Seiko Epson Corporation | Magneto-optical media |
| JPH03113852A (en) * | 1989-09-28 | 1991-05-15 | Sanyo Electric Co Ltd | Magneto-optical recording medium |
| WO1993010530A1 (en) * | 1991-11-22 | 1993-05-27 | Seiko Epson Corporation | Magnetooptical recording media |
| US5648161A (en) * | 1991-11-22 | 1997-07-15 | Seiko Epson Corporation | Magneto-optical recording medium having large kerr rotational angle in short wavelength range |
| US5792571A (en) * | 1991-11-22 | 1998-08-11 | Seiko Epson Corporation | Magneto-optical recording medium having large kerr rotational angle in short wavelength range |
| US5843570A (en) * | 1991-11-22 | 1998-12-01 | Seiko Epson Corporation | Magneto-optical recording medium having large kerr rotational angle in short wavelength range |
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