JPS6226179B2 - - Google Patents

Info

Publication number
JPS6226179B2
JPS6226179B2 JP57092885A JP9288582A JPS6226179B2 JP S6226179 B2 JPS6226179 B2 JP S6226179B2 JP 57092885 A JP57092885 A JP 57092885A JP 9288582 A JP9288582 A JP 9288582A JP S6226179 B2 JPS6226179 B2 JP S6226179B2
Authority
JP
Japan
Prior art keywords
probe card
sample
sample chamber
signal cable
tester
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP57092885A
Other languages
English (en)
Japanese (ja)
Other versions
JPS58209138A (ja
Inventor
Kazuyoshi Sugihara
Tooru Tojo
Mitsuo Tabata
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Shibaura Electric Co Ltd filed Critical Tokyo Shibaura Electric Co Ltd
Priority to JP57092885A priority Critical patent/JPS58209138A/ja
Publication of JPS58209138A publication Critical patent/JPS58209138A/ja
Publication of JPS6226179B2 publication Critical patent/JPS6226179B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H10P74/00—

Landscapes

  • Tests Of Electronic Circuits (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
JP57092885A 1982-05-31 1982-05-31 電子ビ−ムを用いたｉｃテスタ Granted JPS58209138A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57092885A JPS58209138A (ja) 1982-05-31 1982-05-31 電子ビ−ムを用いたｉｃテスタ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57092885A JPS58209138A (ja) 1982-05-31 1982-05-31 電子ビ−ムを用いたｉｃテスタ

Publications (2)

Publication Number Publication Date
JPS58209138A JPS58209138A (ja) 1983-12-06
JPS6226179B2 true JPS6226179B2 (enExample) 1987-06-08

Family

ID=14066905

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57092885A Granted JPS58209138A (ja) 1982-05-31 1982-05-31 電子ビ−ムを用いたｉｃテスタ

Country Status (1)

Country Link
JP (1) JPS58209138A (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4706019A (en) * 1985-11-15 1987-11-10 Fairchild Camera And Instrument Corporation Electron beam test probe system for analyzing integrated circuits

Also Published As

Publication number Publication date
JPS58209138A (ja) 1983-12-06

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