JPH0521303B2 - - Google Patents

Info

Publication number
JPH0521303B2
JPH0521303B2 JP60164471A JP16447185A JPH0521303B2 JP H0521303 B2 JPH0521303 B2 JP H0521303B2 JP 60164471 A JP60164471 A JP 60164471A JP 16447185 A JP16447185 A JP 16447185A JP H0521303 B2 JPH0521303 B2 JP H0521303B2
Authority
JP
Japan
Prior art keywords
electronic component
conductor
terminal
vacuum chamber
vacuum
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP60164471A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6225439A (ja
Inventor
Akio Ito
Yoshiaki Goto
Toshihiro Ishizuka
Kazuyuki Ozaki
Kazuo Ookubo
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP60164471A priority Critical patent/JPS6225439A/ja
Publication of JPS6225439A publication Critical patent/JPS6225439A/ja
Publication of JPH0521303B2 publication Critical patent/JPH0521303B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
  • Tests Of Electronic Circuits (AREA)
JP60164471A 1985-07-25 1985-07-25 真空試料台 Granted JPS6225439A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60164471A JPS6225439A (ja) 1985-07-25 1985-07-25 真空試料台

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60164471A JPS6225439A (ja) 1985-07-25 1985-07-25 真空試料台

Publications (2)

Publication Number Publication Date
JPS6225439A JPS6225439A (ja) 1987-02-03
JPH0521303B2 true JPH0521303B2 (enExample) 1993-03-24

Family

ID=15793806

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60164471A Granted JPS6225439A (ja) 1985-07-25 1985-07-25 真空試料台

Country Status (1)

Country Link
JP (1) JPS6225439A (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2680024B2 (ja) * 1988-03-23 1997-11-19 新日本製鐵株式会社 高純度酸化鉄を製造する方法

Also Published As

Publication number Publication date
JPS6225439A (ja) 1987-02-03

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