JPS6225249B2 - - Google Patents

Info

Publication number
JPS6225249B2
JPS6225249B2 JP3386978A JP3386978A JPS6225249B2 JP S6225249 B2 JPS6225249 B2 JP S6225249B2 JP 3386978 A JP3386978 A JP 3386978A JP 3386978 A JP3386978 A JP 3386978A JP S6225249 B2 JPS6225249 B2 JP S6225249B2
Authority
JP
Japan
Prior art keywords
substrate
crystal
molecules
temperature
present
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP3386978A
Other languages
English (en)
Japanese (ja)
Other versions
JPS54125967A (en
Inventor
Seiichi Nagata
Tsuneo Tanaka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP3386978A priority Critical patent/JPS54125967A/ja
Publication of JPS54125967A publication Critical patent/JPS54125967A/ja
Publication of JPS6225249B2 publication Critical patent/JPS6225249B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Cleaning Or Drying Semiconductors (AREA)
  • Led Devices (AREA)
  • Drying Of Semiconductors (AREA)
  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
JP3386978A 1978-03-23 1978-03-23 Crystal growth method Granted JPS54125967A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3386978A JPS54125967A (en) 1978-03-23 1978-03-23 Crystal growth method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3386978A JPS54125967A (en) 1978-03-23 1978-03-23 Crystal growth method

Publications (2)

Publication Number Publication Date
JPS54125967A JPS54125967A (en) 1979-09-29
JPS6225249B2 true JPS6225249B2 (https=) 1987-06-02

Family

ID=12398507

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3386978A Granted JPS54125967A (en) 1978-03-23 1978-03-23 Crystal growth method

Country Status (1)

Country Link
JP (1) JPS54125967A (https=)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6057937A (ja) * 1983-09-09 1985-04-03 Ushio Inc 紫外線洗浄方法
JPS6260218A (ja) * 1985-09-10 1987-03-16 Sumitomo Electric Ind Ltd 薄膜成長方法
JPS6258613A (ja) * 1985-09-09 1987-03-14 Sumitomo Electric Ind Ltd 薄膜成長方法
JPS62159432A (ja) * 1986-01-08 1987-07-15 Matsushita Electric Ind Co Ltd ドライエツチング方法

Also Published As

Publication number Publication date
JPS54125967A (en) 1979-09-29

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