JPS6240845B2 - - Google Patents

Info

Publication number
JPS6240845B2
JPS6240845B2 JP1168378A JP1168378A JPS6240845B2 JP S6240845 B2 JPS6240845 B2 JP S6240845B2 JP 1168378 A JP1168378 A JP 1168378A JP 1168378 A JP1168378 A JP 1168378A JP S6240845 B2 JPS6240845 B2 JP S6240845B2
Authority
JP
Japan
Prior art keywords
vacuum chamber
vacuum
group
thin film
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1168378A
Other languages
English (en)
Japanese (ja)
Other versions
JPS54104772A (en
Inventor
Tsuneo Tanaka
Seiichi Nagata
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP1168378A priority Critical patent/JPS54104772A/ja
Publication of JPS54104772A publication Critical patent/JPS54104772A/ja
Publication of JPS6240845B2 publication Critical patent/JPS6240845B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
  • Led Devices (AREA)
JP1168378A 1978-02-03 1978-02-03 Thin film growth method and its unit Granted JPS54104772A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1168378A JPS54104772A (en) 1978-02-03 1978-02-03 Thin film growth method and its unit

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1168378A JPS54104772A (en) 1978-02-03 1978-02-03 Thin film growth method and its unit

Publications (2)

Publication Number Publication Date
JPS54104772A JPS54104772A (en) 1979-08-17
JPS6240845B2 true JPS6240845B2 (https=) 1987-08-31

Family

ID=11784797

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1168378A Granted JPS54104772A (en) 1978-02-03 1978-02-03 Thin film growth method and its unit

Country Status (1)

Country Link
JP (1) JPS54104772A (https=)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05190473A (ja) * 1992-06-03 1993-07-30 Semiconductor Energy Lab Co Ltd 光ｃｖｄ装置
JP2842269B2 (ja) * 1995-01-25 1998-12-24 日本電気株式会社 化合物半導体結晶成長装置

Also Published As

Publication number Publication date
JPS54104772A (en) 1979-08-17

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