JPS622457B2 - - Google Patents

Info

Publication number
JPS622457B2
JPS622457B2 JP53104826A JP10482678A JPS622457B2 JP S622457 B2 JPS622457 B2 JP S622457B2 JP 53104826 A JP53104826 A JP 53104826A JP 10482678 A JP10482678 A JP 10482678A JP S622457 B2 JPS622457 B2 JP S622457B2
Authority
JP
Japan
Prior art keywords
substrate
claws
blocks
wafer
boat
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP53104826A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5533027A (en
Inventor
Daijiro Kudo
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP10482678A priority Critical patent/JPS5533027A/ja
Publication of JPS5533027A publication Critical patent/JPS5533027A/ja
Publication of JPS622457B2 publication Critical patent/JPS622457B2/ja
Granted legal-status Critical Current

Links

JP10482678A 1978-08-30 1978-08-30 Substrate conveyor Granted JPS5533027A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10482678A JPS5533027A (en) 1978-08-30 1978-08-30 Substrate conveyor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10482678A JPS5533027A (en) 1978-08-30 1978-08-30 Substrate conveyor

Publications (2)

Publication Number Publication Date
JPS5533027A JPS5533027A (en) 1980-03-08
JPS622457B2 true JPS622457B2 (cs) 1987-01-20

Family

ID=14391186

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10482678A Granted JPS5533027A (en) 1978-08-30 1978-08-30 Substrate conveyor

Country Status (1)

Country Link
JP (1) JPS5533027A (cs)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0589047U (ja) * 1992-05-12 1993-12-03 関東自動車工業株式会社 ドアロック装置

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02276261A (ja) * 1989-04-18 1990-11-13 Kokusai Electric Co Ltd 半導体ウエーハ移送装置
US5423503A (en) * 1990-10-31 1995-06-13 Tokyo Electron Sagami Limited Plate-like member conveying apparatus

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5812439Y2 (ja) * 1976-01-23 1983-03-09 日本電気ホームエレクトロニクス株式会社 ウェハピッチ変換器

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0589047U (ja) * 1992-05-12 1993-12-03 関東自動車工業株式会社 ドアロック装置

Also Published As

Publication number Publication date
JPS5533027A (en) 1980-03-08

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