JPS622438B2 - - Google Patents
Info
- Publication number
- JPS622438B2 JPS622438B2 JP2755979A JP2755979A JPS622438B2 JP S622438 B2 JPS622438 B2 JP S622438B2 JP 2755979 A JP2755979 A JP 2755979A JP 2755979 A JP2755979 A JP 2755979A JP S622438 B2 JPS622438 B2 JP S622438B2
- Authority
- JP
- Japan
- Prior art keywords
- heat generating
- layer
- generating part
- sio
- heat
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000005530 etching Methods 0.000 claims description 17
- 239000004020 conductor Substances 0.000 claims description 11
- 239000000758 substrate Substances 0.000 claims description 10
- 239000000463 material Substances 0.000 claims description 2
- 239000012777 electrically insulating material Substances 0.000 claims 1
- 239000003779 heat-resistant material Substances 0.000 claims 1
- 229910004298 SiO 2 Inorganic materials 0.000 description 17
- 239000000243 solution Substances 0.000 description 8
- PXHVJJICTQNCMI-UHFFFAOYSA-N nickel Substances [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 6
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Substances [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 6
- 238000010438 heat treatment Methods 0.000 description 4
- 238000000034 method Methods 0.000 description 4
- 229910052759 nickel Inorganic materials 0.000 description 4
- 229910052697 platinum Inorganic materials 0.000 description 4
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 3
- LYCAIKOWRPUZTN-UHFFFAOYSA-N Ethylene glycol Chemical compound OCCO LYCAIKOWRPUZTN-UHFFFAOYSA-N 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 239000013078 crystal Substances 0.000 description 2
- 230000020169 heat generation Effects 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 230000003647 oxidation Effects 0.000 description 2
- 238000007254 oxidation reaction Methods 0.000 description 2
- 229920002120 photoresistant polymer Polymers 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- DDFHBQSCUXNBSA-UHFFFAOYSA-N 5-(5-carboxythiophen-2-yl)thiophene-2-carboxylic acid Chemical compound S1C(C(=O)O)=CC=C1C1=CC=C(C(O)=O)S1 DDFHBQSCUXNBSA-UHFFFAOYSA-N 0.000 description 1
- PIICEJLVQHRZGT-UHFFFAOYSA-N Ethylenediamine Chemical compound NCCN PIICEJLVQHRZGT-UHFFFAOYSA-N 0.000 description 1
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- 239000007864 aqueous solution Substances 0.000 description 1
- 238000007084 catalytic combustion reaction Methods 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000010292 electrical insulation Methods 0.000 description 1
- WGCNASOHLSPBMP-UHFFFAOYSA-N hydroxyacetaldehyde Natural products OCC=O WGCNASOHLSPBMP-UHFFFAOYSA-N 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 238000000059 patterning Methods 0.000 description 1
- 238000001259 photo etching Methods 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
Landscapes
- Surface Heating Bodies (AREA)
- Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2755979A JPS55119381A (en) | 1979-03-08 | 1979-03-08 | Electric heater |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2755979A JPS55119381A (en) | 1979-03-08 | 1979-03-08 | Electric heater |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS55119381A JPS55119381A (en) | 1980-09-13 |
| JPS622438B2 true JPS622438B2 (ko) | 1987-01-20 |
Family
ID=12224397
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2755979A Granted JPS55119381A (en) | 1979-03-08 | 1979-03-08 | Electric heater |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS55119381A (ko) |
Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5618750A (en) * | 1979-07-25 | 1981-02-21 | Ricoh Co Ltd | Gas detector |
| JPS5794641A (en) * | 1980-12-04 | 1982-06-12 | Ricoh Co Ltd | Manufacture of electric heater |
| US4542650A (en) * | 1983-08-26 | 1985-09-24 | Innovus | Thermal mass flow meter |
| JPH0733979B2 (ja) * | 1984-07-31 | 1995-04-12 | 光照 木村 | 温度センサ |
| WO2008038611A1 (fr) * | 2006-09-28 | 2008-04-03 | National Institute Of Advanced Industrial Science And Technology | Pompe d'acheminement de gaz, procédé de formation d'un dispositif de chauffage et capteur |
| JP5387842B2 (ja) * | 2009-05-14 | 2014-01-15 | セイコーエプソン株式会社 | 圧電デバイス |
| WO2012111368A1 (ja) | 2011-02-18 | 2012-08-23 | 学校法人 東北学院 | 流体の温度と種類の影響を校正した熱伝導型センサと、これを用いた熱型フローセンサおよび熱型気圧センサ |
-
1979
- 1979-03-08 JP JP2755979A patent/JPS55119381A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS55119381A (en) | 1980-09-13 |
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