JPS622428B2 - - Google Patents
Info
- Publication number
- JPS622428B2 JPS622428B2 JP53014973A JP1497378A JPS622428B2 JP S622428 B2 JPS622428 B2 JP S622428B2 JP 53014973 A JP53014973 A JP 53014973A JP 1497378 A JP1497378 A JP 1497378A JP S622428 B2 JPS622428 B2 JP S622428B2
- Authority
- JP
- Japan
- Prior art keywords
- mercury
- rare gas
- discharge lamp
- input
- anode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 claims description 23
- 229910052753 mercury Inorganic materials 0.000 claims description 23
- 238000000034 method Methods 0.000 claims description 14
- 238000007639 printing Methods 0.000 description 9
- 230000005855 radiation Effects 0.000 description 7
- 238000010586 diagram Methods 0.000 description 6
- 239000011347 resin Substances 0.000 description 6
- 229920005989 resin Polymers 0.000 description 6
- 239000004065 semiconductor Substances 0.000 description 5
- 238000012546 transfer Methods 0.000 description 5
- 239000004020 conductor Substances 0.000 description 4
- 239000011888 foil Substances 0.000 description 4
- 239000010453 quartz Substances 0.000 description 4
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 4
- 230000007423 decrease Effects 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 3
- 230000008569 process Effects 0.000 description 3
- 238000007789 sealing Methods 0.000 description 3
- 238000004904 shortening Methods 0.000 description 3
- 230000008901 benefit Effects 0.000 description 2
- 238000010894 electron beam technology Methods 0.000 description 2
- 238000011835 investigation Methods 0.000 description 2
- 238000004020 luminiscence type Methods 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 229920003229 poly(methyl methacrylate) Polymers 0.000 description 2
- 239000004926 polymethyl methacrylate Substances 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- 229910052724 xenon Inorganic materials 0.000 description 2
- FHNFHKCVQCLJFQ-UHFFFAOYSA-N xenon atom Chemical compound [Xe] FHNFHKCVQCLJFQ-UHFFFAOYSA-N 0.000 description 2
- 238000013459 approach Methods 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 230000006378 damage Effects 0.000 description 1
- 238000013480 data collection Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 238000010891 electric arc Methods 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000012827 research and development Methods 0.000 description 1
- 230000009528 severe injury Effects 0.000 description 1
Landscapes
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Discharge Lamp (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1497378A JPS54108478A (en) | 1978-02-14 | 1978-02-14 | Printing or transcribing method of semiconductor and discharge lamp suitable for printing or transcription |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1497378A JPS54108478A (en) | 1978-02-14 | 1978-02-14 | Printing or transcribing method of semiconductor and discharge lamp suitable for printing or transcription |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP57067257A Division JPS57185663A (en) | 1982-04-23 | 1982-04-23 | Lighting of mercury rare-gas electric-discharge lamp |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS54108478A JPS54108478A (en) | 1979-08-25 |
| JPS622428B2 true JPS622428B2 (de) | 1987-01-20 |
Family
ID=11875911
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1497378A Granted JPS54108478A (en) | 1978-02-14 | 1978-02-14 | Printing or transcribing method of semiconductor and discharge lamp suitable for printing or transcription |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS54108478A (de) |
Families Citing this family (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57185663A (en) * | 1982-04-23 | 1982-11-15 | Ushio Inc | Lighting of mercury rare-gas electric-discharge lamp |
| JPS6070452A (ja) * | 1983-09-28 | 1985-04-22 | Nippon Kogaku Kk <Nikon> | 露光装置 |
| JPS6120324A (ja) * | 1984-07-07 | 1986-01-29 | Ushio Inc | 水銀灯による半導体ウエハ−材料の露光方法 |
| JPS6120325A (ja) * | 1984-07-07 | 1986-01-29 | Ushio Inc | 水銀灯による半導体ウエハ−材料の露光方法 |
| JPS6120326A (ja) * | 1984-07-07 | 1986-01-29 | Ushio Inc | 水銀灯による半導体ウエハ−材料の露光方法 |
| JPS6119940A (ja) * | 1984-07-07 | 1986-01-28 | Mitsubishi Heavy Ind Ltd | 吸気及び排気方法 |
| JPS6120322A (ja) * | 1984-07-07 | 1986-01-29 | Ushio Inc | 水銀灯による半導体ウエハ−材料の露光方法 |
| JPS6120323A (ja) * | 1984-07-07 | 1986-01-29 | Ushio Inc | 水銀灯による半導体ウエハ−材料の露光方法 |
| JP2781555B2 (ja) * | 1987-08-21 | 1998-07-30 | 株式会社日立製作所 | 超高圧水銀灯 |
-
1978
- 1978-02-14 JP JP1497378A patent/JPS54108478A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS54108478A (en) | 1979-08-25 |
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