JPS62238370A - プラズマｃｖｄ装置 - Google Patents

プラズマｃｖｄ装置

Info

Publication number
JPS62238370A
JPS62238370A JP61080080A JP8008086A JPS62238370A JP S62238370 A JPS62238370 A JP S62238370A JP 61080080 A JP61080080 A JP 61080080A JP 8008086 A JP8008086 A JP 8008086A JP S62238370 A JPS62238370 A JP S62238370A
Authority
JP
Japan
Prior art keywords
magnetic field
electrode
recess groove
plasma
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP61080080A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0249385B2 (enExample
Inventor
Hirohiko Izumi
泉　宏比古
Akira Ishibashi
暁 石橋
Yasuaki Hayashi
林　康明
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ulvac Inc
Original Assignee
Ulvac Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ulvac Inc filed Critical Ulvac Inc
Priority to JP61080080A priority Critical patent/JPS62238370A/ja
Publication of JPS62238370A publication Critical patent/JPS62238370A/ja
Publication of JPH0249385B2 publication Critical patent/JPH0249385B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03G—ELECTROGRAPHY; ELECTROPHOTOGRAPHY; MAGNETOGRAPHY
    • G03G5/00—Recording-members for original recording by exposure, e.g. to light, to heat or to electrons; Manufacture thereof; Selection of materials therefor
    • G03G5/02—Charge-receiving layers
    • G03G5/04—Photoconductive layers; Charge-generation layers or charge-transporting layers; Additives therefor; Binders therefor
    • G03G5/08—Photoconductive layers; Charge-generation layers or charge-transporting layers; Additives therefor; Binders therefor characterised by the photoconductive material being inorganic
    • G03G5/082—Photoconductive layers; Charge-generation layers or charge-transporting layers; Additives therefor; Binders therefor characterised by the photoconductive material being inorganic and not being incorporated in a bonding material, e.g. vacuum deposited

Landscapes

  • Chemical & Material Sciences (AREA)
  • Inorganic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Photoreceptors In Electrophotography (AREA)
  • Chemical Vapour Deposition (AREA)
JP61080080A 1986-04-09 1986-04-09 プラズマｃｖｄ装置 Granted JPS62238370A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP61080080A JPS62238370A (ja) 1986-04-09 1986-04-09 プラズマｃｖｄ装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP61080080A JPS62238370A (ja) 1986-04-09 1986-04-09 プラズマｃｖｄ装置

Publications (2)

Publication Number Publication Date
JPS62238370A true JPS62238370A (ja) 1987-10-19
JPH0249385B2 JPH0249385B2 (enExample) 1990-10-30

Family

ID=13708238

Family Applications (1)

Application Number Title Priority Date Filing Date
JP61080080A Granted JPS62238370A (ja) 1986-04-09 1986-04-09 プラズマｃｖｄ装置

Country Status (1)

Country Link
JP (1) JPS62238370A (enExample)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01226148A (ja) * 1988-03-07 1989-09-08 Mitsui Toatsu Chem Inc 膜形成装置
JPH01227427A (ja) * 1988-03-08 1989-09-11 Mitsui Toatsu Chem Inc 成膜装置
JP2016513336A (ja) * 2013-02-06 2016-05-12 アルセロルミッタル インベスティガシオン イ デサロージョ エセ．エレ． プラズマ源

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01226148A (ja) * 1988-03-07 1989-09-08 Mitsui Toatsu Chem Inc 膜形成装置
JPH01227427A (ja) * 1988-03-08 1989-09-11 Mitsui Toatsu Chem Inc 成膜装置
JP2016513336A (ja) * 2013-02-06 2016-05-12 アルセロルミッタル インベスティガシオン イ デサロージョ エセ．エレ． プラズマ源

Also Published As

Publication number Publication date
JPH0249385B2 (enExample) 1990-10-30

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Legal Events

Date Code Title Description
R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

LAPS Cancellation because of no payment of annual fees