JPS6223466B2 - - Google Patents
Info
- Publication number
- JPS6223466B2 JPS6223466B2 JP55018139A JP1813980A JPS6223466B2 JP S6223466 B2 JPS6223466 B2 JP S6223466B2 JP 55018139 A JP55018139 A JP 55018139A JP 1813980 A JP1813980 A JP 1813980A JP S6223466 B2 JPS6223466 B2 JP S6223466B2
- Authority
- JP
- Japan
- Prior art keywords
- region
- type
- layer
- integrated circuit
- substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000009792 diffusion process Methods 0.000 claims description 21
- 239000004065 semiconductor Substances 0.000 claims description 13
- 239000000969 carrier Substances 0.000 claims description 6
- 239000000758 substrate Substances 0.000 description 16
- 229910052751 metal Inorganic materials 0.000 description 13
- 239000002184 metal Substances 0.000 description 13
- 230000003071 parasitic effect Effects 0.000 description 10
- 238000000034 method Methods 0.000 description 9
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 7
- 239000010931 gold Substances 0.000 description 7
- 229910052737 gold Inorganic materials 0.000 description 7
- 238000002955 isolation Methods 0.000 description 5
- 230000007257 malfunction Effects 0.000 description 4
- 230000000694 effects Effects 0.000 description 3
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- 230000003321 amplification Effects 0.000 description 2
- 230000015556 catabolic process Effects 0.000 description 2
- 238000003199 nucleic acid amplification method Methods 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- 230000004888 barrier function Effects 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 229910001385 heavy metal Inorganic materials 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D84/00—Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers
- H10D84/60—Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers characterised by the integration of at least one component covered by groups H10D10/00 or H10D18/00, e.g. integration of BJTs
- H10D84/611—Combinations of BJTs and one or more of diodes, resistors or capacitors
- H10D84/613—Combinations of vertical BJTs and one or more of diodes, resistors or capacitors
- H10D84/617—Combinations of vertical BJTs and only diodes
Landscapes
- Element Separation (AREA)
- Bipolar Integrated Circuits (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1813980A JPS56115555A (en) | 1980-02-16 | 1980-02-16 | Semiconductor integrated circuit device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1813980A JPS56115555A (en) | 1980-02-16 | 1980-02-16 | Semiconductor integrated circuit device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS56115555A JPS56115555A (en) | 1981-09-10 |
| JPS6223466B2 true JPS6223466B2 (enrdf_load_stackoverflow) | 1987-05-22 |
Family
ID=11963262
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1813980A Granted JPS56115555A (en) | 1980-02-16 | 1980-02-16 | Semiconductor integrated circuit device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS56115555A (enrdf_load_stackoverflow) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02102605U (enrdf_load_stackoverflow) * | 1989-02-02 | 1990-08-15 | ||
| JPH02224378A (ja) * | 1989-02-27 | 1990-09-06 | Hamamatsu Photonics Kk | 発光素子 |
-
1980
- 1980-02-16 JP JP1813980A patent/JPS56115555A/ja active Granted
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02102605U (enrdf_load_stackoverflow) * | 1989-02-02 | 1990-08-15 | ||
| JPH02224378A (ja) * | 1989-02-27 | 1990-09-06 | Hamamatsu Photonics Kk | 発光素子 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS56115555A (en) | 1981-09-10 |
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