JPS6223460B2 - - Google Patents
Info
- Publication number
- JPS6223460B2 JPS6223460B2 JP59260788A JP26078884A JPS6223460B2 JP S6223460 B2 JPS6223460 B2 JP S6223460B2 JP 59260788 A JP59260788 A JP 59260788A JP 26078884 A JP26078884 A JP 26078884A JP S6223460 B2 JPS6223460 B2 JP S6223460B2
- Authority
- JP
- Japan
- Prior art keywords
- metal wiring
- wiring layer
- hole
- holes
- layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 229910052751 metal Inorganic materials 0.000 claims description 39
- 239000002184 metal Substances 0.000 claims description 39
- 230000002093 peripheral effect Effects 0.000 claims description 16
- 239000004065 semiconductor Substances 0.000 claims description 8
- 238000005530 etching Methods 0.000 description 12
- 229910052782 aluminium Inorganic materials 0.000 description 6
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 6
- 238000000034 method Methods 0.000 description 6
- 238000004519 manufacturing process Methods 0.000 description 5
- 238000009792 diffusion process Methods 0.000 description 4
- 239000000463 material Substances 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 238000009413 insulation Methods 0.000 description 2
- 238000000206 photolithography Methods 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 230000003071 parasitic effect Effects 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
Landscapes
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP26078884A JPS60192350A (ja) | 1984-12-12 | 1984-12-12 | 半導体集積回路装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP26078884A JPS60192350A (ja) | 1984-12-12 | 1984-12-12 | 半導体集積回路装置 |
Related Parent Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2036577A Division JPS5839380B2 (ja) | 1977-02-28 | 1977-02-28 | 半導体集積回路装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS60192350A JPS60192350A (ja) | 1985-09-30 |
| JPS6223460B2 true JPS6223460B2 (fr) | 1987-05-22 |
Family
ID=17352741
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP26078884A Granted JPS60192350A (ja) | 1984-12-12 | 1984-12-12 | 半導体集積回路装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60192350A (fr) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63164776U (fr) * | 1987-04-15 | 1988-10-27 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5255379A (en) * | 1975-10-31 | 1977-05-06 | Toshiba Corp | Semiconductor device |
-
1984
- 1984-12-12 JP JP26078884A patent/JPS60192350A/ja active Granted
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5255379A (en) * | 1975-10-31 | 1977-05-06 | Toshiba Corp | Semiconductor device |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63164776U (fr) * | 1987-04-15 | 1988-10-27 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS60192350A (ja) | 1985-09-30 |
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