JPS6223457B2 - - Google Patents

Info

Publication number
JPS6223457B2
JPS6223457B2 JP58156258A JP15625883A JPS6223457B2 JP S6223457 B2 JPS6223457 B2 JP S6223457B2 JP 58156258 A JP58156258 A JP 58156258A JP 15625883 A JP15625883 A JP 15625883A JP S6223457 B2 JPS6223457 B2 JP S6223457B2
Authority
JP
Japan
Prior art keywords
pellet
threshold value
signal
image
region
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP58156258A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5981767A (ja
Inventor
Michihiro Mese
Seiji Kashioka
Masakazu Ejiri
Takafumi Myatake
Isamu Yamazaki
Toshimitsu Hamada
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP58156258A priority Critical patent/JPS5981767A/ja
Publication of JPS5981767A publication Critical patent/JPS5981767A/ja
Publication of JPS6223457B2 publication Critical patent/JPS6223457B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H10W72/0711—

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
  • Image Processing (AREA)
  • Image Analysis (AREA)
JP58156258A 1983-08-29 1983-08-29 信号処理装置 Granted JPS5981767A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58156258A JPS5981767A (ja) 1983-08-29 1983-08-29 信号処理装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58156258A JPS5981767A (ja) 1983-08-29 1983-08-29 信号処理装置

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP5651976A Division JPS52140278A (en) 1976-05-19 1976-05-19 Position detector

Publications (2)

Publication Number Publication Date
JPS5981767A JPS5981767A (ja) 1984-05-11
JPS6223457B2 true JPS6223457B2 (cg-RX-API-DMAC10.html) 1987-05-22

Family

ID=15623861

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58156258A Granted JPS5981767A (ja) 1983-08-29 1983-08-29 信号処理装置

Country Status (1)

Country Link
JP (1) JPS5981767A (cg-RX-API-DMAC10.html)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2805771B2 (ja) * 1988-10-12 1998-09-30 株式会社ニコン アライメント方法
JP2000260699A (ja) 1999-03-09 2000-09-22 Canon Inc 位置検出装置及び該位置検出装置を用いた半導体露光装置

Also Published As

Publication number Publication date
JPS5981767A (ja) 1984-05-11

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