JPS62229526A - 磁気記録媒体 - Google Patents
磁気記録媒体Info
- Publication number
- JPS62229526A JPS62229526A JP14024286A JP14024286A JPS62229526A JP S62229526 A JPS62229526 A JP S62229526A JP 14024286 A JP14024286 A JP 14024286A JP 14024286 A JP14024286 A JP 14024286A JP S62229526 A JPS62229526 A JP S62229526A
- Authority
- JP
- Japan
- Prior art keywords
- film
- protective film
- silicon oxide
- apparent density
- oil
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000001681 protective effect Effects 0.000 claims abstract description 51
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims abstract description 48
- 229910052814 silicon oxide Inorganic materials 0.000 claims abstract description 48
- 239000003921 oil Substances 0.000 claims abstract description 21
- 230000001050 lubricating effect Effects 0.000 claims abstract description 11
- 239000000758 substrate Substances 0.000 claims abstract description 8
- 239000010408 film Substances 0.000 claims description 97
- 239000010409 thin film Substances 0.000 claims description 19
- 230000005415 magnetization Effects 0.000 claims description 8
- 229910052751 metal Inorganic materials 0.000 claims description 7
- 239000002184 metal Substances 0.000 claims description 7
- 229920005570 flexible polymer Polymers 0.000 claims description 3
- 238000004544 sputter deposition Methods 0.000 abstract description 17
- 235000003642 hunger Nutrition 0.000 abstract 2
- 230000037351 starvation Effects 0.000 abstract 2
- 229920006254 polymer film Polymers 0.000 abstract 1
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 56
- 239000007789 gas Substances 0.000 description 29
- 229910052786 argon Inorganic materials 0.000 description 28
- 238000005530 etching Methods 0.000 description 19
- 230000007423 decrease Effects 0.000 description 11
- 238000000034 method Methods 0.000 description 6
- 239000012528 membrane Substances 0.000 description 5
- 239000010687 lubricating oil Substances 0.000 description 4
- 239000000203 mixture Substances 0.000 description 4
- 239000011347 resin Substances 0.000 description 4
- 229920005989 resin Polymers 0.000 description 4
- LIVNPJMFVYWSIS-UHFFFAOYSA-N silicon monoxide Chemical compound [Si-]#[O+] LIVNPJMFVYWSIS-UHFFFAOYSA-N 0.000 description 4
- LYCAIKOWRPUZTN-UHFFFAOYSA-N Ethylene glycol Chemical compound OCCO LYCAIKOWRPUZTN-UHFFFAOYSA-N 0.000 description 3
- 230000015572 biosynthetic process Effects 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 229940057995 liquid paraffin Drugs 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 238000009832 plasma treatment Methods 0.000 description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000001704 evaporation Methods 0.000 description 2
- 230000008020 evaporation Effects 0.000 description 2
- 239000012530 fluid Substances 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- DDFHBQSCUXNBSA-UHFFFAOYSA-N 5-(5-carboxythiophen-2-yl)thiophene-2-carboxylic acid Chemical compound S1C(C(=O)O)=CC=C1C1=CC=C(C(O)=O)S1 DDFHBQSCUXNBSA-UHFFFAOYSA-N 0.000 description 1
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 description 1
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 description 1
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 1
- 238000002441 X-ray diffraction Methods 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 239000013256 coordination polymer Substances 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 238000001739 density measurement Methods 0.000 description 1
- 230000000779 depleting effect Effects 0.000 description 1
- 238000005315 distribution function Methods 0.000 description 1
- 229910052731 fluorine Inorganic materials 0.000 description 1
- 239000011737 fluorine Substances 0.000 description 1
- 230000004907 flux Effects 0.000 description 1
- 229960002050 hydrofluoric acid Drugs 0.000 description 1
- 238000005461 lubrication Methods 0.000 description 1
- 229910052752 metalloid Inorganic materials 0.000 description 1
- 150000002738 metalloids Chemical class 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 150000004767 nitrides Chemical class 0.000 description 1
- 229910000889 permalloy Inorganic materials 0.000 description 1
- -1 polyethylene terephthalate Polymers 0.000 description 1
- 229920000139 polyethylene terephthalate Polymers 0.000 description 1
- 239000005020 polyethylene terephthalate Substances 0.000 description 1
- 229920001721 polyimide Polymers 0.000 description 1
- 229920001296 polysiloxane Polymers 0.000 description 1
- 229910021426 porous silicon Inorganic materials 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 239000013077 target material Substances 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
- 229910000859 α-Fe Inorganic materials 0.000 description 1
Landscapes
- Lubricants (AREA)
- Magnetic Record Carriers (AREA)
- Manufacturing Of Magnetic Record Carriers (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60-293292 | 1985-12-27 | ||
| JP29329285 | 1985-12-27 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62229526A true JPS62229526A (ja) | 1987-10-08 |
| JPH0414414B2 JPH0414414B2 (enrdf_load_stackoverflow) | 1992-03-12 |
Family
ID=17792944
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14024286A Granted JPS62229526A (ja) | 1985-12-27 | 1986-06-18 | 磁気記録媒体 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62229526A (enrdf_load_stackoverflow) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02236120A (ja) * | 1989-03-09 | 1990-09-19 | Matsushita Electric Ind Co Ltd | 磁気エンコーダ |
| JPH03189565A (ja) * | 1989-12-19 | 1991-08-19 | Matsushita Electric Ind Co Ltd | 磁気エンコーダ |
| US5132173A (en) * | 1989-02-10 | 1992-07-21 | Canon Kabushiki Kaisha | Magnetic recording medium having a silicon oxide protective layer with an electrical specific resistance of from 3.3×1013 to 5.0×15 ohm.cm |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57167131A (en) * | 1981-04-03 | 1982-10-14 | Fujitsu Ltd | Magnetic recording medium |
-
1986
- 1986-06-18 JP JP14024286A patent/JPS62229526A/ja active Granted
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57167131A (en) * | 1981-04-03 | 1982-10-14 | Fujitsu Ltd | Magnetic recording medium |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5132173A (en) * | 1989-02-10 | 1992-07-21 | Canon Kabushiki Kaisha | Magnetic recording medium having a silicon oxide protective layer with an electrical specific resistance of from 3.3×1013 to 5.0×15 ohm.cm |
| JPH02236120A (ja) * | 1989-03-09 | 1990-09-19 | Matsushita Electric Ind Co Ltd | 磁気エンコーダ |
| JPH03189565A (ja) * | 1989-12-19 | 1991-08-19 | Matsushita Electric Ind Co Ltd | 磁気エンコーダ |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0414414B2 (enrdf_load_stackoverflow) | 1992-03-12 |
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