JPS62227478A - アルミナ薄膜の製造方法 - Google Patents
アルミナ薄膜の製造方法Info
- Publication number
- JPS62227478A JPS62227478A JP7121286A JP7121286A JPS62227478A JP S62227478 A JPS62227478 A JP S62227478A JP 7121286 A JP7121286 A JP 7121286A JP 7121286 A JP7121286 A JP 7121286A JP S62227478 A JPS62227478 A JP S62227478A
- Authority
- JP
- Japan
- Prior art keywords
- spray solution
- alumina
- thin film
- sprayed
- alumina membrane
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Application Of Or Painting With Fluid Materials (AREA)
- Compounds Of Alkaline-Earth Elements, Aluminum Or Rare-Earth Metals (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7121286A JPS62227478A (ja) | 1986-03-31 | 1986-03-31 | アルミナ薄膜の製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7121286A JPS62227478A (ja) | 1986-03-31 | 1986-03-31 | アルミナ薄膜の製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62227478A true JPS62227478A (ja) | 1987-10-06 |
| JPH0455129B2 JPH0455129B2 (cs) | 1992-09-02 |
Family
ID=13454148
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7121286A Granted JPS62227478A (ja) | 1986-03-31 | 1986-03-31 | アルミナ薄膜の製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62227478A (cs) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006096629A (ja) * | 2004-09-30 | 2006-04-13 | Nof Corp | 酸化アルミニウム薄膜および酸化アルミニウム薄膜形成用組成物 |
-
1986
- 1986-03-31 JP JP7121286A patent/JPS62227478A/ja active Granted
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006096629A (ja) * | 2004-09-30 | 2006-04-13 | Nof Corp | 酸化アルミニウム薄膜および酸化アルミニウム薄膜形成用組成物 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0455129B2 (cs) | 1992-09-02 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |