JPS6221002Y2 - - Google Patents
Info
- Publication number
- JPS6221002Y2 JPS6221002Y2 JP1982042248U JP4224882U JPS6221002Y2 JP S6221002 Y2 JPS6221002 Y2 JP S6221002Y2 JP 1982042248 U JP1982042248 U JP 1982042248U JP 4224882 U JP4224882 U JP 4224882U JP S6221002 Y2 JPS6221002 Y2 JP S6221002Y2
- Authority
- JP
- Japan
- Prior art keywords
- ring
- coupling
- processing tank
- rotating drum
- vertical piece
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 230000008878 coupling Effects 0.000 claims description 25
- 238000010168 coupling process Methods 0.000 claims description 25
- 238000005859 coupling reaction Methods 0.000 claims description 25
- 239000004065 semiconductor Substances 0.000 claims description 9
- 235000012431 wafers Nutrition 0.000 claims description 9
- 238000001035 drying Methods 0.000 claims description 2
- JEIPFZHSYJVQDO-UHFFFAOYSA-N iron(III) oxide Inorganic materials O=[Fe]O[Fe]=O JEIPFZHSYJVQDO-UHFFFAOYSA-N 0.000 description 10
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 7
- 238000004140 cleaning Methods 0.000 description 4
- 230000000694 effects Effects 0.000 description 4
- 239000000428 dust Substances 0.000 description 3
- 229920000459 Nitrile rubber Polymers 0.000 description 2
- 238000007789 sealing Methods 0.000 description 2
- 238000007599 discharging Methods 0.000 description 1
- 229920001971 elastomer Polymers 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
Landscapes
- Drying Of Solid Materials (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1982042248U JPS58144834U (ja) | 1982-03-25 | 1982-03-25 | 回転乾燥機 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1982042248U JPS58144834U (ja) | 1982-03-25 | 1982-03-25 | 回転乾燥機 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS58144834U JPS58144834U (ja) | 1983-09-29 |
| JPS6221002Y2 true JPS6221002Y2 (enrdf_load_stackoverflow) | 1987-05-28 |
Family
ID=30053386
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1982042248U Granted JPS58144834U (ja) | 1982-03-25 | 1982-03-25 | 回転乾燥機 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS58144834U (enrdf_load_stackoverflow) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6783624B2 (ja) * | 2016-10-27 | 2020-11-11 | 株式会社ディスコ | 洗浄装置 |
-
1982
- 1982-03-25 JP JP1982042248U patent/JPS58144834U/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS58144834U (ja) | 1983-09-29 |
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