JPS6220844Y2 - - Google Patents

Info

Publication number
JPS6220844Y2
JPS6220844Y2 JP1982083475U JP8347582U JPS6220844Y2 JP S6220844 Y2 JPS6220844 Y2 JP S6220844Y2 JP 1982083475 U JP1982083475 U JP 1982083475U JP 8347582 U JP8347582 U JP 8347582U JP S6220844 Y2 JPS6220844 Y2 JP S6220844Y2
Authority
JP
Japan
Prior art keywords
photomask
pattern
holes
area
hole
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1982083475U
Other languages
English (en)
Japanese (ja)
Other versions
JPS58185850U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1982083475U priority Critical patent/JPS58185850U/ja
Publication of JPS58185850U publication Critical patent/JPS58185850U/ja
Application granted granted Critical
Publication of JPS6220844Y2 publication Critical patent/JPS6220844Y2/ja
Granted legal-status Critical Current

Links

JP1982083475U 1982-06-07 1982-06-07 ホトマスク Granted JPS58185850U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1982083475U JPS58185850U (ja) 1982-06-07 1982-06-07 ホトマスク

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1982083475U JPS58185850U (ja) 1982-06-07 1982-06-07 ホトマスク

Publications (2)

Publication Number Publication Date
JPS58185850U JPS58185850U (ja) 1983-12-10
JPS6220844Y2 true JPS6220844Y2 (enrdf_load_stackoverflow) 1987-05-27

Family

ID=30092485

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1982083475U Granted JPS58185850U (ja) 1982-06-07 1982-06-07 ホトマスク

Country Status (1)

Country Link
JP (1) JPS58185850U (enrdf_load_stackoverflow)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100873275B1 (ko) * 2007-03-19 2008-12-11 매그나칩 반도체 유한회사 이미지센서의 제조 방법
JP7605050B2 (ja) * 2021-07-06 2024-12-24 株式会社デンソー 半導体装置と半導体装置の製造方法
CN115663022B (zh) * 2022-11-11 2023-04-07 湖南三安半导体有限责任公司 半导体结构和半导体结构的制备方法

Also Published As

Publication number Publication date
JPS58185850U (ja) 1983-12-10

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