JPS62207887A - 砒化インジウムアルミニウムのエツチング液 - Google Patents
砒化インジウムアルミニウムのエツチング液Info
- Publication number
- JPS62207887A JPS62207887A JP4961786A JP4961786A JPS62207887A JP S62207887 A JPS62207887 A JP S62207887A JP 4961786 A JP4961786 A JP 4961786A JP 4961786 A JP4961786 A JP 4961786A JP S62207887 A JPS62207887 A JP S62207887A
- Authority
- JP
- Japan
- Prior art keywords
- etching
- soln
- hydrogen peroxide
- water
- aluminum arsenide
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000005530 etching Methods 0.000 title claims abstract description 57
- AUCDRFABNLOFRE-UHFFFAOYSA-N alumane;indium Chemical compound [AlH3].[In] AUCDRFABNLOFRE-UHFFFAOYSA-N 0.000 title claims abstract description 7
- MHAJPDPJQMAIIY-UHFFFAOYSA-N Hydrogen peroxide Chemical compound OO MHAJPDPJQMAIIY-UHFFFAOYSA-N 0.000 claims abstract description 24
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 13
- VHUUQVKOLVNVRT-UHFFFAOYSA-N Ammonium hydroxide Chemical compound [NH4+].[OH-] VHUUQVKOLVNVRT-UHFFFAOYSA-N 0.000 claims abstract description 12
- 239000000243 solution Substances 0.000 claims description 16
- 235000011114 ammonium hydroxide Nutrition 0.000 claims description 10
- 239000011259 mixed solution Substances 0.000 claims description 3
- QOSATHPSBFQAML-UHFFFAOYSA-N hydrogen peroxide;hydrate Chemical compound O.OO QOSATHPSBFQAML-UHFFFAOYSA-N 0.000 claims description 2
- QGZKDVFQNNGYKY-UHFFFAOYSA-N ammonia Natural products N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 abstract description 9
- 239000007800 oxidant agent Substances 0.000 abstract description 2
- 229910021529 ammonia Inorganic materials 0.000 abstract 2
- 230000003647 oxidation Effects 0.000 abstract 1
- 238000007254 oxidation reaction Methods 0.000 abstract 1
- 239000000203 mixture Substances 0.000 description 8
- 238000000034 method Methods 0.000 description 6
- 238000010586 diagram Methods 0.000 description 5
- 239000004065 semiconductor Substances 0.000 description 4
- 230000000694 effects Effects 0.000 description 3
- 239000012535 impurity Substances 0.000 description 3
- 239000007788 liquid Substances 0.000 description 3
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 description 2
- 239000003795 chemical substances by application Substances 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- PJLJHXZTANASPP-UHFFFAOYSA-N O.OO.OS(O)(=O)=O Chemical compound O.OO.OS(O)(=O)=O PJLJHXZTANASPP-UHFFFAOYSA-N 0.000 description 1
- 239000004902 Softening Agent Substances 0.000 description 1
- 239000002253 acid Substances 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 230000001590 oxidative effect Effects 0.000 description 1
- 230000002040 relaxant effect Effects 0.000 description 1
Landscapes
- ing And Chemical Polishing (AREA)
- Weting (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4961786A JPS62207887A (ja) | 1986-03-07 | 1986-03-07 | 砒化インジウムアルミニウムのエツチング液 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4961786A JPS62207887A (ja) | 1986-03-07 | 1986-03-07 | 砒化インジウムアルミニウムのエツチング液 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62207887A true JPS62207887A (ja) | 1987-09-12 |
| JPH052742B2 JPH052742B2 (enrdf_load_stackoverflow) | 1993-01-13 |
Family
ID=12836193
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4961786A Granted JPS62207887A (ja) | 1986-03-07 | 1986-03-07 | 砒化インジウムアルミニウムのエツチング液 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62207887A (enrdf_load_stackoverflow) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0555193A (ja) * | 1991-08-21 | 1993-03-05 | Honda Motor Co Ltd | 化合物半導体の製造方法 |
| KR20050034491A (ko) * | 2003-10-09 | 2005-04-14 | (주)이엠피테크놀로지 | 세라믹 코팅용 알루미늄 전처리제 조성물 및 전처리 방법 |
-
1986
- 1986-03-07 JP JP4961786A patent/JPS62207887A/ja active Granted
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0555193A (ja) * | 1991-08-21 | 1993-03-05 | Honda Motor Co Ltd | 化合物半導体の製造方法 |
| KR20050034491A (ko) * | 2003-10-09 | 2005-04-14 | (주)이엠피테크놀로지 | 세라믹 코팅용 알루미늄 전처리제 조성물 및 전처리 방법 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH052742B2 (enrdf_load_stackoverflow) | 1993-01-13 |
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