JPS6220663B2 - - Google Patents

Info

Publication number
JPS6220663B2
JPS6220663B2 JP50136001A JP13600175A JPS6220663B2 JP S6220663 B2 JPS6220663 B2 JP S6220663B2 JP 50136001 A JP50136001 A JP 50136001A JP 13600175 A JP13600175 A JP 13600175A JP S6220663 B2 JPS6220663 B2 JP S6220663B2
Authority
JP
Japan
Prior art keywords
sample
objective lens
gas
cooling body
magnetic pole
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP50136001A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5260061A (en
Inventor
Toshinori Goto
Yoshasu Harada
Akio Mikajiri
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Nihon Denshi KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nihon Denshi KK filed Critical Nihon Denshi KK
Priority to JP50136001A priority Critical patent/JPS5260061A/ja
Publication of JPS5260061A publication Critical patent/JPS5260061A/ja
Publication of JPS6220663B2 publication Critical patent/JPS6220663B2/ja
Granted legal-status Critical Current

Links

JP50136001A 1975-11-12 1975-11-12 Electronic microscope and its similar equipment Granted JPS5260061A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP50136001A JPS5260061A (en) 1975-11-12 1975-11-12 Electronic microscope and its similar equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP50136001A JPS5260061A (en) 1975-11-12 1975-11-12 Electronic microscope and its similar equipment

Publications (2)

Publication Number Publication Date
JPS5260061A JPS5260061A (en) 1977-05-18
JPS6220663B2 true JPS6220663B2 (enrdf_load_stackoverflow) 1987-05-08

Family

ID=15164859

Family Applications (1)

Application Number Title Priority Date Filing Date
JP50136001A Granted JPS5260061A (en) 1975-11-12 1975-11-12 Electronic microscope and its similar equipment

Country Status (1)

Country Link
JP (1) JPS5260061A (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5384786B2 (ja) * 2006-11-14 2014-01-08 株式会社日立ハイテクノロジーズ 荷電ビーム装置、及びその鏡体

Also Published As

Publication number Publication date
JPS5260061A (en) 1977-05-18

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