JPH0247552Y2 - - Google Patents
Info
- Publication number
- JPH0247552Y2 JPH0247552Y2 JP13231786U JP13231786U JPH0247552Y2 JP H0247552 Y2 JPH0247552 Y2 JP H0247552Y2 JP 13231786 U JP13231786 U JP 13231786U JP 13231786 U JP13231786 U JP 13231786U JP H0247552 Y2 JPH0247552 Y2 JP H0247552Y2
- Authority
- JP
- Japan
- Prior art keywords
- sample
- objective lens
- anode
- chamber
- cathode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000001816 cooling Methods 0.000 description 9
- 238000010586 diagram Methods 0.000 description 8
- 108010083687 Ion Pumps Proteins 0.000 description 3
- 239000003507 refrigerant Substances 0.000 description 3
- 230000008602 contraction Effects 0.000 description 2
- 238000010894 electron beam technology Methods 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 239000010936 titanium Substances 0.000 description 2
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13231786U JPH0247552Y2 (enrdf_load_stackoverflow) | 1986-08-29 | 1986-08-29 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13231786U JPH0247552Y2 (enrdf_load_stackoverflow) | 1986-08-29 | 1986-08-29 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6338249U JPS6338249U (enrdf_load_stackoverflow) | 1988-03-11 |
| JPH0247552Y2 true JPH0247552Y2 (enrdf_load_stackoverflow) | 1990-12-13 |
Family
ID=31031586
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13231786U Expired JPH0247552Y2 (enrdf_load_stackoverflow) | 1986-08-29 | 1986-08-29 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0247552Y2 (enrdf_load_stackoverflow) |
-
1986
- 1986-08-29 JP JP13231786U patent/JPH0247552Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6338249U (enrdf_load_stackoverflow) | 1988-03-11 |
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