JPS6220156B2 - - Google Patents
Info
- Publication number
- JPS6220156B2 JPS6220156B2 JP15987177A JP15987177A JPS6220156B2 JP S6220156 B2 JPS6220156 B2 JP S6220156B2 JP 15987177 A JP15987177 A JP 15987177A JP 15987177 A JP15987177 A JP 15987177A JP S6220156 B2 JPS6220156 B2 JP S6220156B2
- Authority
- JP
- Japan
- Prior art keywords
- sio
- furnace
- carbon
- sic
- chamber
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 25
- 229910052799 carbon Inorganic materials 0.000 claims description 21
- 238000006243 chemical reaction Methods 0.000 claims description 19
- 238000010438 heat treatment Methods 0.000 claims description 18
- 239000000758 substrate Substances 0.000 claims description 17
- 238000005192 partition Methods 0.000 claims description 8
- 239000011248 coating agent Substances 0.000 claims description 7
- 238000000576 coating method Methods 0.000 claims description 7
- 239000002994 raw material Substances 0.000 claims description 5
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 27
- 229910010271 silicon carbide Inorganic materials 0.000 description 27
- 239000007789 gas Substances 0.000 description 23
- 239000000463 material Substances 0.000 description 14
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 8
- 238000000034 method Methods 0.000 description 6
- 229910002804 graphite Inorganic materials 0.000 description 4
- 239000010439 graphite Substances 0.000 description 4
- 239000000377 silicon dioxide Substances 0.000 description 4
- 230000015572 biosynthetic process Effects 0.000 description 2
- 239000003575 carbonaceous material Substances 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 229910052736 halogen Inorganic materials 0.000 description 1
- 150000002367 halogens Chemical class 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 239000002244 precipitate Substances 0.000 description 1
- 239000000376 reactant Substances 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 229920002379 silicone rubber Polymers 0.000 description 1
- 239000004945 silicone rubber Substances 0.000 description 1
- 239000004575 stone Substances 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15987177A JPS5490216A (en) | 1977-12-27 | 1977-12-27 | Heating furnace for sic coating process |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15987177A JPS5490216A (en) | 1977-12-27 | 1977-12-27 | Heating furnace for sic coating process |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5490216A JPS5490216A (en) | 1979-07-17 |
| JPS6220156B2 true JPS6220156B2 (enrdf_load_stackoverflow) | 1987-05-06 |
Family
ID=15703019
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15987177A Granted JPS5490216A (en) | 1977-12-27 | 1977-12-27 | Heating furnace for sic coating process |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5490216A (enrdf_load_stackoverflow) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0633951B2 (ja) * | 1986-07-15 | 1994-05-02 | イビデン株式会社 | 高温加熱炉 |
| US5116679A (en) * | 1988-07-29 | 1992-05-26 | Alcan International Limited | Process for producing fibres composed of or coated with carbides or nitrides |
| JP5510456B2 (ja) * | 2009-07-10 | 2014-06-04 | 日立金属株式会社 | Ｒ−Ｆｅ−Ｂ系希土類焼結磁石の製造方法および蒸気制御部材 |
| JP5737547B2 (ja) * | 2009-09-04 | 2015-06-17 | 東洋炭素株式会社 | 炭化ケイ素被覆黒鉛粒子の製造方法及び炭化ケイ素被覆黒鉛粒子 |
-
1977
- 1977-12-27 JP JP15987177A patent/JPS5490216A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5490216A (en) | 1979-07-17 |
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