JPS62193124A - パタ−ン位置合わせ方法 - Google Patents

パタ−ン位置合わせ方法

Info

Publication number
JPS62193124A
JPS62193124A JP61034229A JP3422986A JPS62193124A JP S62193124 A JPS62193124 A JP S62193124A JP 61034229 A JP61034229 A JP 61034229A JP 3422986 A JP3422986 A JP 3422986A JP S62193124 A JPS62193124 A JP S62193124A
Authority
JP
Japan
Prior art keywords
pattern
manual alignment
target
center
mark
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP61034229A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0222533B2 (enrdf_load_stackoverflow
Inventor
Mamoru Kaneko
守 金子
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sanyo Electric Co Ltd
Original Assignee
Sanyo Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sanyo Electric Co Ltd filed Critical Sanyo Electric Co Ltd
Priority to JP61034229A priority Critical patent/JPS62193124A/ja
Publication of JPS62193124A publication Critical patent/JPS62193124A/ja
Publication of JPH0222533B2 publication Critical patent/JPH0222533B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2223/00—Details relating to semiconductor or other solid state devices covered by the group H01L23/00
    • H01L2223/544—Marks applied to semiconductor devices or parts
    • H01L2223/54453—Marks applied to semiconductor devices or parts for use prior to dicing
    • H01L2223/54466—Located in a dummy or reference die

Landscapes

  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
JP61034229A 1986-02-19 1986-02-19 パタ−ン位置合わせ方法 Granted JPS62193124A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP61034229A JPS62193124A (ja) 1986-02-19 1986-02-19 パタ−ン位置合わせ方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP61034229A JPS62193124A (ja) 1986-02-19 1986-02-19 パタ−ン位置合わせ方法

Publications (2)

Publication Number Publication Date
JPS62193124A true JPS62193124A (ja) 1987-08-25
JPH0222533B2 JPH0222533B2 (enrdf_load_stackoverflow) 1990-05-18

Family

ID=12408315

Family Applications (1)

Application Number Title Priority Date Filing Date
JP61034229A Granted JPS62193124A (ja) 1986-02-19 1986-02-19 パタ−ン位置合わせ方法

Country Status (1)

Country Link
JP (1) JPS62193124A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05109873A (ja) * 1991-04-12 1993-04-30 Goldstar Electron Co Ltd 半導体チツプのアライメント方法およびレーザ修理用ターゲツト

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05109873A (ja) * 1991-04-12 1993-04-30 Goldstar Electron Co Ltd 半導体チツプのアライメント方法およびレーザ修理用ターゲツト

Also Published As

Publication number Publication date
JPH0222533B2 (enrdf_load_stackoverflow) 1990-05-18

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term