JPS62193122A - パタ−ン位置合わせ方法 - Google Patents

パタ−ン位置合わせ方法

Info

Publication number
JPS62193122A
JPS62193122A JP61034225A JP3422586A JPS62193122A JP S62193122 A JPS62193122 A JP S62193122A JP 61034225 A JP61034225 A JP 61034225A JP 3422586 A JP3422586 A JP 3422586A JP S62193122 A JPS62193122 A JP S62193122A
Authority
JP
Japan
Prior art keywords
manual alignment
pattern
alignment marks
pair
alignment mark
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP61034225A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0222531B2 (enExample
Inventor
Mamoru Kaneko
守 金子
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sanyo Electric Co Ltd
Original Assignee
Sanyo Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sanyo Electric Co Ltd filed Critical Sanyo Electric Co Ltd
Priority to JP61034225A priority Critical patent/JPS62193122A/ja
Publication of JPS62193122A publication Critical patent/JPS62193122A/ja
Publication of JPH0222531B2 publication Critical patent/JPH0222531B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
JP61034225A 1986-02-19 1986-02-19 パタ−ン位置合わせ方法 Granted JPS62193122A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP61034225A JPS62193122A (ja) 1986-02-19 1986-02-19 パタ−ン位置合わせ方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP61034225A JPS62193122A (ja) 1986-02-19 1986-02-19 パタ−ン位置合わせ方法

Publications (2)

Publication Number Publication Date
JPS62193122A true JPS62193122A (ja) 1987-08-25
JPH0222531B2 JPH0222531B2 (enExample) 1990-05-18

Family

ID=12408202

Family Applications (1)

Application Number Title Priority Date Filing Date
JP61034225A Granted JPS62193122A (ja) 1986-02-19 1986-02-19 パタ−ン位置合わせ方法

Country Status (1)

Country Link
JP (1) JPS62193122A (enExample)

Also Published As

Publication number Publication date
JPH0222531B2 (enExample) 1990-05-18

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Legal Events

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