JPS62193121A - パタ−ン位置合わせ方法 - Google Patents

パタ−ン位置合わせ方法

Info

Publication number
JPS62193121A
JPS62193121A JP61034224A JP3422486A JPS62193121A JP S62193121 A JPS62193121 A JP S62193121A JP 61034224 A JP61034224 A JP 61034224A JP 3422486 A JP3422486 A JP 3422486A JP S62193121 A JPS62193121 A JP S62193121A
Authority
JP
Japan
Prior art keywords
manual alignment
pattern
alignment mark
center
distance
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP61034224A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0222530B2 (enrdf_load_stackoverflow
Inventor
Mamoru Kaneko
守 金子
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sanyo Electric Co Ltd
Original Assignee
Sanyo Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sanyo Electric Co Ltd filed Critical Sanyo Electric Co Ltd
Priority to JP61034224A priority Critical patent/JPS62193121A/ja
Publication of JPS62193121A publication Critical patent/JPS62193121A/ja
Publication of JPH0222530B2 publication Critical patent/JPH0222530B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
JP61034224A 1986-02-19 1986-02-19 パタ−ン位置合わせ方法 Granted JPS62193121A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP61034224A JPS62193121A (ja) 1986-02-19 1986-02-19 パタ−ン位置合わせ方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP61034224A JPS62193121A (ja) 1986-02-19 1986-02-19 パタ−ン位置合わせ方法

Publications (2)

Publication Number Publication Date
JPS62193121A true JPS62193121A (ja) 1987-08-25
JPH0222530B2 JPH0222530B2 (enrdf_load_stackoverflow) 1990-05-18

Family

ID=12408174

Family Applications (1)

Application Number Title Priority Date Filing Date
JP61034224A Granted JPS62193121A (ja) 1986-02-19 1986-02-19 パタ−ン位置合わせ方法

Country Status (1)

Country Link
JP (1) JPS62193121A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005123279A (ja) * 2003-10-15 2005-05-12 Mitsumi Electric Co Ltd 半導体装置の製造方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005123279A (ja) * 2003-10-15 2005-05-12 Mitsumi Electric Co Ltd 半導体装置の製造方法

Also Published As

Publication number Publication date
JPH0222530B2 (enrdf_load_stackoverflow) 1990-05-18

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Legal Events

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