JPS62191Y2 - - Google Patents
Info
- Publication number
- JPS62191Y2 JPS62191Y2 JP1983016597U JP1659783U JPS62191Y2 JP S62191 Y2 JPS62191 Y2 JP S62191Y2 JP 1983016597 U JP1983016597 U JP 1983016597U JP 1659783 U JP1659783 U JP 1659783U JP S62191 Y2 JPS62191 Y2 JP S62191Y2
- Authority
- JP
- Japan
- Prior art keywords
- potential
- circuit
- electron beam
- measured
- measurement
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000010894 electron beam technology Methods 0.000 claims description 24
- 239000004065 semiconductor Substances 0.000 claims description 17
- 238000005259 measurement Methods 0.000 claims description 13
- 230000001678 irradiating effect Effects 0.000 claims description 2
- 238000000034 method Methods 0.000 description 7
- 230000007274 generation of a signal involved in cell-cell signaling Effects 0.000 description 4
- 230000002159 abnormal effect Effects 0.000 description 3
- 229910052782 aluminium Inorganic materials 0.000 description 3
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 3
- 238000006243 chemical reaction Methods 0.000 description 2
- 238000001514 detection method Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000011326 mechanical measurement Methods 0.000 description 2
- 238000010297 mechanical methods and process Methods 0.000 description 2
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 2
- 230000005856 abnormality Effects 0.000 description 1
- 230000001133 acceleration Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000000691 measurement method Methods 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000004088 simulation Methods 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
Landscapes
- Testing Of Individual Semiconductor Devices (AREA)
- Tests Of Electronic Circuits (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1659783U JPS58150839U (ja) | 1983-02-07 | 1983-02-07 | 電子ビ−ムを用いた測定装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1659783U JPS58150839U (ja) | 1983-02-07 | 1983-02-07 | 電子ビ−ムを用いた測定装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS58150839U JPS58150839U (ja) | 1983-10-08 |
| JPS62191Y2 true JPS62191Y2 (de) | 1987-01-07 |
Family
ID=30028960
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1659783U Granted JPS58150839U (ja) | 1983-02-07 | 1983-02-07 | 電子ビ−ムを用いた測定装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS58150839U (de) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4974484A (de) * | 1972-11-17 | 1974-07-18 |
-
1983
- 1983-02-07 JP JP1659783U patent/JPS58150839U/ja active Granted
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4974484A (de) * | 1972-11-17 | 1974-07-18 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS58150839U (ja) | 1983-10-08 |
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