JPS62188319A - 半導体装置の製造方法 - Google Patents

半導体装置の製造方法

Info

Publication number
JPS62188319A
JPS62188319A JP61031190A JP3119086A JPS62188319A JP S62188319 A JPS62188319 A JP S62188319A JP 61031190 A JP61031190 A JP 61031190A JP 3119086 A JP3119086 A JP 3119086A JP S62188319 A JPS62188319 A JP S62188319A
Authority
JP
Japan
Prior art keywords
silicon substrate
back surface
alignment marks
alignment mark
pattern
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP61031190A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0515051B2 (enrdf_load_stackoverflow
Inventor
Kazumi Hirata
和美 平田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp filed Critical NEC Corp
Priority to JP61031190A priority Critical patent/JPS62188319A/ja
Publication of JPS62188319A publication Critical patent/JPS62188319A/ja
Publication of JPH0515051B2 publication Critical patent/JPH0515051B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
JP61031190A 1986-02-14 1986-02-14 半導体装置の製造方法 Granted JPS62188319A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP61031190A JPS62188319A (ja) 1986-02-14 1986-02-14 半導体装置の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP61031190A JPS62188319A (ja) 1986-02-14 1986-02-14 半導体装置の製造方法

Publications (2)

Publication Number Publication Date
JPS62188319A true JPS62188319A (ja) 1987-08-17
JPH0515051B2 JPH0515051B2 (enrdf_load_stackoverflow) 1993-02-26

Family

ID=12324510

Family Applications (1)

Application Number Title Priority Date Filing Date
JP61031190A Granted JPS62188319A (ja) 1986-02-14 1986-02-14 半導体装置の製造方法

Country Status (1)

Country Link
JP (1) JPS62188319A (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH0515051B2 (enrdf_load_stackoverflow) 1993-02-26

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