JPS62183885A - 回転塗布方法 - Google Patents

回転塗布方法

Info

Publication number
JPS62183885A
JPS62183885A JP30135886A JP30135886A JPS62183885A JP S62183885 A JPS62183885 A JP S62183885A JP 30135886 A JP30135886 A JP 30135886A JP 30135886 A JP30135886 A JP 30135886A JP S62183885 A JPS62183885 A JP S62183885A
Authority
JP
Japan
Prior art keywords
coated
speed
coating
outer peripheral
peripheral edge
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP30135886A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0426912B2 (enExample
Inventor
Keiichi Shibata
圭一 柴田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp filed Critical Toshiba Corp
Priority to JP30135886A priority Critical patent/JPS62183885A/ja
Publication of JPS62183885A publication Critical patent/JPS62183885A/ja
Publication of JPH0426912B2 publication Critical patent/JPH0426912B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/16—Coating processes; Apparatus therefor
    • G03F7/162—Coating on a rotating support, e.g. using a whirler or a spinner

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)
  • Coating Apparatus (AREA)
JP30135886A 1986-12-19 1986-12-19 回転塗布方法 Granted JPS62183885A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP30135886A JPS62183885A (ja) 1986-12-19 1986-12-19 回転塗布方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP30135886A JPS62183885A (ja) 1986-12-19 1986-12-19 回転塗布方法

Publications (2)

Publication Number Publication Date
JPS62183885A true JPS62183885A (ja) 1987-08-12
JPH0426912B2 JPH0426912B2 (enExample) 1992-05-08

Family

ID=17895906

Family Applications (1)

Application Number Title Priority Date Filing Date
JP30135886A Granted JPS62183885A (ja) 1986-12-19 1986-12-19 回転塗布方法

Country Status (1)

Country Link
JP (1) JPS62183885A (enExample)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03176933A (ja) * 1989-12-05 1991-07-31 Asahi Glass Co Ltd ブラウン管用パネルフェースの表面処理方法及びその装置
JP2008016708A (ja) * 2006-07-07 2008-01-24 Victor Co Of Japan Ltd 処理液塗布装置

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS551145A (en) * 1978-06-19 1980-01-07 Nec Corp Semiconductor wafer photo-resist applicator
JPS581144A (ja) * 1981-06-25 1983-01-06 Fujitsu Ltd フオトレジストの塗布方法

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS551145A (en) * 1978-06-19 1980-01-07 Nec Corp Semiconductor wafer photo-resist applicator
JPS581144A (ja) * 1981-06-25 1983-01-06 Fujitsu Ltd フオトレジストの塗布方法

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03176933A (ja) * 1989-12-05 1991-07-31 Asahi Glass Co Ltd ブラウン管用パネルフェースの表面処理方法及びその装置
JP2008016708A (ja) * 2006-07-07 2008-01-24 Victor Co Of Japan Ltd 処理液塗布装置

Also Published As

Publication number Publication date
JPH0426912B2 (enExample) 1992-05-08

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